Marc D. Levenson

Bio: Marc D. Levenson is an academic researcher from IBM. The author has contributed to research in topics: Optical fiber & Quantum noise. The author has an hindex of 26, co-authored 79 publications receiving 3875 citations.

Improving resolution in photolithography with a phase-shifting mask

Abstract: The phase-shifting mask consists of a normal transmission mask that has been coated with a transparent layer patterned to ensure that the optical phases of nearest apertures are opposite. Destructive interference between waves from adjacent apertures cancels some diffraction effects and increases the spatial resolution with which such patterns can be projected. A simple theory predicts a near doubling of resolution for illumination with partial incoherence σ < 0.3, and substantial improvements in resolution for σ < 0.7. Initial results obtained with a phase-shifting mask patterned with typical device structures by electron-beam lithography and exposed using a Mann 4800 10× tool reveals a 40-percent increase in usuable resolution with some structures printed at a resolution of 1000 lines/mm. Phase-shifting mask structures can be used to facilitate proximity printing with larger gaps between mask and wafer. Theory indicates that the increase in resolution is accompanied by a minimal decrease in depth of focus. Thus the phase-shifting mask may be the most desirable device for enhancing optical lithography resolution in the VLSI/VHSIC era.

Improving resolution in photolithography with a phase-shifting mask

Abstract: The phase-shifting mask consists of a normal transmission mask that has been coated with a transparent layer patterned to ensure that the optical phases of nearest apertures are opposite. Destructive interference between waves from adjacent apertures cancels some diffraction effects and increases the spatial resolution with which such patterns can be projected. A simple theory predicts a near doubling of resolution for illumination with partial incoherence σ < 0.3, and substantial improvements in resolution for σ < 0.7. Initial results obtained with a phase-shifting mask patterned with typical device structures by electron-beam lithography and exposed using a Mann 4800 10X tool reveals a 40-percent increase in usuable resolution with some structures printed at a resolution of 1000 lines/mm. Phase-shifting mask structures can be used to facilitate proximity printing with larger gaps between mask and wafer. Theory indicates that the increase in resolution is accompanied by a minimal decrease in depth of focus. Thus the phase-shifting mask may be the most desirable device for enhancing optical lithography resolution in the VLSI/VHSIC era.

Broad-band parametric deamplification of quantum noise in an optical fiber.

Abstract: Broad-band squeezed states of light are generated by forward nondegenerate four-wave mixing in a single-mode optical fiber cooled below 4.2 K. The minimum total noise level was (12.5 \ifmmode\pm\else\textpm\fi{} 0.5)% below the standard quantum limit.

Guided acoustic-wave Brillouin scattering.

Abstract: Forward light scattering by the thermally excited guided acoustic modes of an optical fiber produce numerous narrow lines not predicted by the usual theory of Brillouin scattering. Optical heterodyne detection has been used to resolve the scattering spectrum which begins at about 20 MHz and extends to the detection limit. A simple theory quantitatively accounts for the frequencies, polarizations, and intensities of the components. The light scattering from these modes constitutes a thermal-noise source in optical fibers that may prove significant in other experiments.

Quantum nondemolition detection of optical quadrature amplitudes.

Abstract: In an optical fiber, nonlinear optical interactions couple the sideband modes of two strong pump waves at different frequencies just as required for a quantum nondemolition measurement. Experimental measurements demonstrate that 37% of the rms phase fluctuations of one wave are caused by the quantum amplitude fluctuations of the other.

Cavity Optomechanics

Abstract: We review the field of cavity optomechanics, which explores the interaction between electromagnetic radiation and nano- or micromechanical motion This review covers the basics of optical cavities and mechanical resonators, their mutual optomechanical interaction mediated by the radiation pressure force, the large variety of experimental systems which exhibit this interaction, optical measurements of mechanical motion, dynamical backaction amplification and cooling, nonlinear dynamics, multimode optomechanics, and proposals for future cavity quantum optomechanics experiments In addition, we describe the perspectives for fundamental quantum physics and for possible applications of optomechanical devices

Quantum Information with Continuous Variables

Abstract: Preface. About the Editors. Part I: Quantum Computing. 1. Quantum computing with qubits S.L. Braunstein, A.K. Pati. 2. Quantum computation over continuous variables S. Lloyd, S.L. Braunstein. 3. Error correction for continuous quantum variables S.L. Braunstein. 4. Deutsch-Jozsa algorithm for continuous variables A.K. Pati, S.L. Braunstein. 5. Hybrid quantum computing S. Lloyd. 6. Efficient classical simulation of continuous variable quantum information processes S.D. Bartlett, B.C. Sanders, S.L. Braunstein, K. Nemoto. Part II: Quantum Entanglement. 7. Introduction to entanglement-based protocols S.L. Braunstein, A.K. Pati. 8. Teleportation of continuous uantum variables S.L. Braunstein, H.J. Kimble. 9. Experimental realization of continuous variable teleportation A. Furusawa, H.J. Kimble. 10. Dense coding for continuous variables S.L. Braunstein, H.J. Kimble. 11. Multipartite Greenberger-Horne-Zeilinger paradoxes for continuous variables S. Massar, S. Pironio. 12. Multipartite entanglement for continuous variables P. van Loock, S.L. Braunstein. 13. Inseparability criterion for continuous variable systems Lu-Ming Duan, G. Giedke, J.I. Cirac, P. Zoller. 14. Separability criterion for Gaussian states R. Simon. 15. Distillability and entanglement purification for Gaussian states G. Giedke, Lu-Ming Duan, J.I. Cirac, P. Zoller. 16. Entanglement purification via entanglement swapping S. Parke, S. Bose, M.B. Plenio. 17. Bound entanglement for continuous variables is a rare phenomenon P. Horodecki, J.I. Cirac, M. Lewenstein. Part III: Continuous Variable Optical-Atomic Interfacing. 18. Atomic continuous variable processing and light-atoms quantum interface A. Kuzmich, E.S. Polzik. Part IV: Limits on Quantum Information and Cryptography. 19. Limitations on discrete quantum information and cryptography S.L. Braunstein, A.K. Pati. 20. Quantum cloning with continuous variables N.J. Cerf. 21. Quantum key distribution with continuous variables in optics T.C. Ralph. 22. Secure quantum key distribution using squeezed states D. Gottesman, J. Preskill. 23. Experimental demonstration of dense coding and quantum cryptography with continuous variables Kunchi Peng, Qing Pan, Jing Zhang, Changde Xie. 24. Quantum solitons in optical fibres: basic requisites for experimental quantum communication G. Leuchs, Ch. Silberhorn, E. Konig, P.K. Lam, A. Sizmann, N. Korolkova. Index.

Surface properties probed by second-harmonic and sum-frequency generation

Abstract: Optical second-harmonic generation and the related technique of infrared – visible light sum-frequency generation are extremely versatile tools for studies of many kinds of surfaces and interfaces. With the help of ultra-short laser pulses, they can be used to monitor surface dynamics and reactions with sub-picosecond time resolution.

Multiphoton Absorbing Materials : Molecular Designs, Characterizations, and Applications

Abstract: 4. Survey of Novel Multiphoton Active Materials 1257 4.1. Multiphoton Absorbing Systems 1257 4.2. Organic Molecules 1257 4.3. Organic Liquids and Liquid Crystals 1259 4.4. Conjugated Polymers 1259 4.4.1. Polydiacetylenes 1261 4.4.2. Polyphenylenevinylenes (PPVs) 1261 4.4.3. Polythiophenes 1263 4.4.4. Other Conjugated Polymers 1265 4.4.5. Dendrimers 1265 4.4.6. Hyperbranched Polymers 1267 4.5. Fullerenes 1267 4.6. Coordination and Organometallic Compounds 1271 4.6.1. Metal Dithiolenes 1271 4.6.2. Pyridine-Based Multidentate Ligands 1272 4.6.3. Other Transition-Metal Complexes 1273 4.6.4. Lanthanide Complexes 1275 4.6.5. Ferrocene Derivatives 1275 4.6.6. Alkynylruthenium Complexes 1279 4.6.7. Platinum Acetylides 1279 4.7. Porphyrins and Metallophophyrins 1279 4.8. Nanoparticles 1281 4.9. Biomolecules and Derivatives 1282 5. Nonlinear Optical Characterizations of Multiphoton Active Materials 1282

Statistical optics

Abstract: Course Description This is an advanced course in which we explore the field of Statistical Optics. Topics covered include such subjects as the statistical properties of natural (thermal) and laser light, spatial and temporal coherence, effects of partial coherence on optical imaging instruments, effects on imaging due to randomly inhomogeneous media, and a statistical treatment of the detection of light. Development of this more comprehensive model of the behavior of light draws upon the use of tools traditionally available to the electrical engineer, such as linear system theory and the theory of stochastic processes.