Author
Marco Balucani
Bio: Marco Balucani is an academic researcher from Sapienza University of Rome. The author has contributed to research in topics: Porous silicon & Silicon. The author has an hindex of 16, co-authored 106 publications receiving 911 citations.
Topics: Porous silicon, Silicon, Hybrid silicon laser, Wafer, Antenna (radio)
Papers published on a yearly basis
Papers
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Proceedings Article•
08 Apr 2013
TL;DR: This work presents a short conical helical antenna built applying MEMS micro-fabrication techniques whose dimensions can scale down to 100 μm (for operation in the THz region) and that can be integrated on silicon chips for communication and imaging purpose.
Abstract: The aggressive scaling of the CMOS technology and the convergence of CMOS and MEMS technologies along the “More Than Moore” axis of the International Technology Roadmap for Semiconductors, paves the way to the realization of millimeter-waves front-end circuits with integrated three-dimensional antennas. In this work we present a short conical helical antenna built applying MEMS micro-fabrication techniques whose dimensions can scale down to 100 μm (for operation in the THz region) and that can be integrated on silicon chips for communication and imaging purpose. Antenna design rules and methodology, electromagnetic characteristics and actual measurement are presented.
175 citations
TL;DR: A new approach to tissue and cell manipulation is presented, which employs a conceptually new conjugate surfaces flexure hinge (CSFH) silicon MEMS-based technology micro-gripper that solves most of the above-mentioned problems.
Abstract: Although tissue and cell manipulation nowadays is a common task in biomedical analysis, there are still many different ways to accomplish it, most of which are still not sufficiently general, inexpensive, accurate, efficient or effective. Several problems arise both for in vivo or in vitro analysis, such as the maximum overall size of the device and the gripper jaws (like in minimally-invasive open biopsy) or very limited manipulating capability, degrees of freedom or dexterity (like in tissues or cell-handling operations). This paper presents a new approach to tissue and cell manipulation, which employs a conceptually new conjugate surfaces flexure hinge (CSFH) silicon MEMS-based technology micro-gripper that solves most of the above-mentioned problems. The article describes all of the phases of the development, including topology conception, structural design, simulation, construction, actuation testing and in vitro observation. The latter phase deals with the assessment of the function capability, which consists of taking a series of in vitro images by optical microscopy. They offer a direct morphological comparison between the gripper and a variety of tissues.
62 citations
TL;DR: In this paper, a flexure hinge for MEMS applications is presented, which combines a curved beam, as a flexible element, and a pair of conjugate surfaces, whose contact depends on load conditions.
Abstract: This paper presents a new concept flexure hinge for MEMS applications and reveals how to design, construct, and experimentally test. This hinge combines a curved beam, as a flexible element, and a pair of conjugate surfaces, whose contact depends on load conditions. The geometry is conceived in such a way that minimum stress conditions are maintained within the flexible beam. A comparison of the new design with the other kind of revolute and flexible joints is presented. Then, the static behavior of the hinge is analyzed by means of a theoretical approach, based on continuum mechanics, and the results are compared to those obtained by means of finite element analysis (FEA) simulation. A silicon hinge prototype is also presented and the construction process, based on single step lithography and reactive ion etching (RIE) technology, is discussed. Finally, a crucial in–SEM experiment is performed and the experimental results are interpreted through the theoretical models.
56 citations
TL;DR: A CSFH has been analyzed with both theoretical and finite element methods, in order to obtain the relation between voltage and generated torque, and showed that CSFH performs better than linear flexure hinges in terms of larger rotations and less stress for given applied voltage.
Abstract: Progress in MEMS technology continuously stimulates new developments in the mechanical structure of micro systems, such as, for example, the concept of so-called CSFH (conjugate surfaces flexural hinge), which makes it possible, simultaneously, to minimize the internal stresses and to increase motion range and robustness. Such a hinge may be actuated by means of a rotary comb-drive, provided that a proper set of simulations and tests are capable to assess its feasibility. In this paper, a CSFH has been analyzed with both theoretical and finite element (FEM) methods, in order to obtain the relation between voltage and generated torque. The FEM model considers also the fringe effect on the comb drive finger. Electromechanical couple–field analysis is performed by means of both direct and load transfer methods. Experimental tests have been also performed on a CSFH embedded in a MEMS prototype, which has been fabricated starting from a SOI wafer and using D–RIE (deep reactive ion etching). Results showed that CSFH performs better than linear flexure hinges in terms of larger rotations and less stress for given applied voltage.
32 citations
TL;DR: In this article, Mesoporous Silicon Electrochemical Deposition and Characterization of Ni in service is discussed. But the authors focus on the characterization of the Ni in the service.
Abstract: 2012, Volume 159, Issue 10, Pages D623-D627. J. Electrochem. Soc. M. Balucani and V. Bondarenko A. Dolgiy, S. V. Redko, H. Bandarenka, S. L. Prischepa, K. Yanushkevich, P. Nenzi, Mesoporous Silicon Electrochemical Deposition and Characterization of Ni in service Email alerting click here in the box at the top right corner of the article or Receive free email alerts when new articles cite this article sign up
28 citations
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TL;DR: The photoluminescence properties of porous silicon have attracted considerable research interest since their discovery in 1990 as discussed by the authors, which is due to excitonic recombination quantum confined in Si nanocrystals which remain after the partial electrochemical dissolution of silicon.
1,261 citations
TL;DR: In this paper, a review summarises the theoretical work as well as the attempts to prepare carbon(IV) nitrides by chemical and physical vapour deposition, and in particular on the concepts and results of bulk synthesis routes.
387 citations
Patent•
04 Oct 1999
TL;DR: In this paper, an endovascular graft system for repair of aneurysms is presented, which consists of a trunk component and first and second leg components, supported by a plurality of stents which are spaced apart and affixed to the graft material.
Abstract: The invention provides an endovascular graft system for repair of aneurysms. The graft system includes a trunk component and first and second leg components. The graft components include graft material supported by a plurality of stents which are spaced apart and affixed to the graft material in a manner that allows articulation of the graft system without excessive wear of the graft material. The stents are formed by intersecting struts which may be tapered to relieve stress. A stabilizing mechanism is provided to stabilize the position of the legs with respect to the trunk when the graft system is deployed.
385 citations
TL;DR: In this paper, the authors compared two types of geometry, Si avalanche-based LED and Si field effect LED, in the same device, and established the dimensional dependence of the switching speed of the LED.
Abstract: In this paper, optoelectronic characteristics and related switching behavior of one monolithically integrated silicon light-emitting device (LED) with an interesting wavelength range of 400–900 nm are studied. Through the comparison of two types of geometry, Si avalanche-based LED and Si field-effect LED (Si FE LED), in the same device, we establish the dimensional dependence of the switching speed of the LED. Almost-linear modulation curve implies lower distortion is shown for the Si FE LED with light emission enhancement, and technology computer aided design (TCAD) simulations are in line with the experimental results. Our findings indicate that ON–OFF keying up to GHz frequencies should be feasible with such diodes. Potential applications should include Si FE LED integrated into the micro-photonic systems.
276 citations