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Martin Plihal

Bio: Martin Plihal is an academic researcher from KLA-Tencor. The author has contributed to research in topics: Kondo effect & Scattering. The author has an hindex of 14, co-authored 53 publications receiving 1232 citations. Previous affiliations of Martin Plihal include University of California, Irvine & Rutgers University.


Papers
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Journal ArticleDOI
TL;DR: By the use of a position-dependent dielectric constant and the plane-wave method, the photonic band structure for electromagnetic waves in a structure consisting of a periodic array of parallel dielectrics rods of circular cross section, whose intersections with a perpendicular plane form a triangular lattice is calculated.
Abstract: By the use of a position-dependent dielectric constant and the plane-wave method, we have calculated the photonic band structure for electromagnetic waves in a structure consisting of a periodic array of parallel dielectric rods of circular cross section, whose intersections with a perpendicular plane form a triangular lattice. The rods are embedded in a background medium with a different dielectric constant. The electromagnetic waves are assumed to propagate in a plane perpendicular to the rods, and two polarizations of the waves are considered. Absolute gaps in the resulting band structures are found for waves of both polarizations, and the dependence of the widths of these gaps on the ratio of the dielectric constants of the rods and of the background, and on the fraction of the total volume occupied by the rods, is investigated.

616 citations

Journal ArticleDOI
TL;DR: In this paper, the photonic band structure for electromagnetic waves in a structure that consists of a periodic array of parallel dielectric rods of circular cross section, whose intersections with a perpendicular plane constitute a square lattice.

165 citations

Patent
07 Feb 2003
TL;DR: In this article, a plug-in rule module manager receives and manages any number of plug in rule modules, and assigns a confidence value based at least in part upon how well the event data fits the given classification.
Abstract: A system for determining an assigned classification for a set of physical events on a substrate. Sensors sense the physical events on the substrate and produce event data. A plug in rule module manager receives and manages any number of plug in rule modules. Each plug in rule module has an input, a local filter, an analyzer, and an output. The input receives the event data and confidence values from preceding plug in rule modules. The local filter analyzes the received confidence values from the preceding plug in rule modules and selectively by passes the plug in rule module based at least in part upon the received confidence values from the preceding plug in rule modules. The analyzer analyzes the event data in view of a given classification associated with the plug in rule module, and assigns a confidence value based at least in part upon how well the event data fits the given classification. The output provides the confidence value to subsequent plug in rule modules. A post processor receives the confidence values provided by the plug in rule modules, and makes a final selection of the assigned classification to be associated with the set of physical events from the given classifications based at least in part upon a comparison of the confidence values produced by all plug in rule modules.

50 citations

Journal ArticleDOI
TL;DR: In this paper, the response of a quantum dot in the Kondo regime to rectangular pulsed bias potentials of various strengths and durations is studied theoretically, and it is found that the rise time is faster than the fall time, and also faster than time scales normally associated with the kondo problem.
Abstract: The response of a quantum dot in the Kondo regime to rectangular pulsed bias potentials of various strengths and durations is studied theoretically. It is found that the rise time is faster than the fall time, and also faster than time scales normally associated with the Kondo problem. For larger values of the pulsed bias, one can induce dramatic oscillations in the induced current with a frequency approximating the splitting between the Kondo peaks that would be present in steady state. The effect persists in the total charge transported per pulse, which should facilitate the experimental observation of the phenomenon. (c) 2000 The American Physical Society.

43 citations

Patent
12 Oct 2004
TL;DR: In this paper, a module measurement cell coupled to a host inspection system is configured to inspect a wafer using one or more modes prior to inspection of the wafer by the host system, such as backside inspection, edge inspection, frontside macro defect inspection, or a combination thereof.
Abstract: Wafer inspection systems and methods are provided. One inspection system includes a module measurement cell coupled to a host inspection system by a wafer handler. The module measurement cell is configured to inspect a wafer using one or more modes prior to inspection of the wafer by the host inspection system. The one or more modes include backside inspection, edge inspection, frontside macro defect inspection, or a combination thereof. Another inspection system includes two or more low resolution electronic sensors arranged at multiple viewing angles. The sensors are configured to detect light returned from a wafer substantially simultaneously. A method for analyzing inspection data includes selecting a template corresponding to a support device that contacts a backside of a wafer prior to inspection of the backside of the wafer. The method also includes subtracting data representing the template from inspection data generated by inspection of the backside of the wafer.

37 citations


Cited by
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Journal ArticleDOI
TL;DR: This work shows that by employing accidental degeneracy, dielectric photonic crystals can be designed and fabricated that exhibit Dirac cone dispersion at the centre of the Brillouin zone at a finite frequency and numerically and experimentally demonstrates in the microwave regime that these crystals manipulate waves as if they had near-zero refractive indices at and near the Dirac point frequency.
Abstract: A zero-refractive-index metamaterial is one in which waves do not experience any spatial phase change, and such a peculiar material has many interesting wave-manipulating properties. These materials can in principle be realized using man-made composites comprising metallic resonators or chiral inclusions, but metallic components have losses that compromise functionality at high frequencies. It would be highly desirable if we could achieve a zero refractive index using dielectrics alone. Here, we show that by employing accidental degeneracy, dielectric photonic crystals can be designed and fabricated that exhibit Dirac cone dispersion at the centre of the Brillouin zone at a finite frequency. In addition to many interesting properties intrinsic to a Dirac cone dispersion, we can use effective medium theory to relate the photonic crystal to a material with effectively zero permittivity and permeability. We then numerically and experimentally demonstrate in the microwave regime that such dielectric photonic crystals with reasonable dielectric constants manipulate waves as if they had near-zero refractive indices at and near the Dirac point frequency.

806 citations

Journal ArticleDOI
TL;DR: In this paper, the band structure of acoustic and elastic waves propagating in two dimensional periodic fluid or solid systems is calculated, and the authors show that gaps are obtained easily, in contrast to the case of solids, where a large density mismatch is required.

741 citations

Journal ArticleDOI
TL;DR: In this article, a 3D periodic dielectric structure with circular, elliptical, or rectangular shape is introduced. But the 3D layer structure can be easily fabricated using conventional microfabrication techniques on the scale of optical wavelengths.

737 citations

Journal ArticleDOI
01 Oct 1996-Nature
TL;DR: In this article, the authors show that by restricting the geometry of the photonic crystal to two dimensions (in a waveguide configuration), structures with polarization-sensitive photonic band-gaps at still lower wavelengths (in the range 800-900 nm) can be readily fabricated.
Abstract: PHOTONIC crystals are artificial structures having a periodic dielectric structure designed to influence the behaviour of photons in much the same way that the crystal structure of a semiconductor affects the properties of electrons1. In particular, photonic crystals forbid propagation of photons having a certain range of energies (known as a photonic bandgap), a property that could be incorporated in the design of novel optoelectronic devices2. Following the demonstration of a material with a full photonic bandgap at microwave frequencies3, there has been considerable progress in the fabrication of three-dimensional photonic crystals with operational wavelengths as short as 1.5 μm (ref. 4), although the optical properties of such structures are still far from ideal5. Here we show that, by restricting the geometry of the photonic crystal to two dimensions (in a waveguide configuration), structures with polarization-sensitive photonic band-gaps at still lower wavelengths (in the range 800–900 nm) can be readily fabricated. Our approach should permit the straightfor-ward integration of photonic-bandgap structures with other optical and optoelectronic devices.

727 citations

Patent
Khurram Zafar1, Sagar A. Kekare1, Ellis Chang1, Allen Park1, Peter Rose1 
20 Nov 2006
TL;DR: In this paper, a computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space.
Abstract: Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.

528 citations