Masanori Ueda

Bio: Masanori Ueda is an academic researcher from Fujitsu. The author has contributed to research in topics: Resonator & Surface acoustic wave. The author has an hindex of 26, co-authored 149 publications receiving 2302 citations. Previous affiliations of Masanori Ueda include Chiba University & Taiyo Yuden.

Development of Piezoelectric Thin Film Resonator and Its Impact on Future Wireless Communication Systems

Abstract: The bulk acoustic wave filter composed of piezoelectric thin film resonators has many features superior to those of other small filters such as a surface acoustic wave (SAW) filter and a ceramic filter. As it has no fine structure in its electrode design, it has a high Q factor that leads to low-loss and sharp-cut off characteristics and a high power durability particularly in the high-frequency range. Furthermore, it has the potentiality of integrated devices on a Si substrate. In this paper, we review the recent developments of piezoelectric thin film resonator filters in the world, including our development for mobile communication applications. After describing the feature and history of the piezoelectric thin film resonator filters, our technologies are introduced in focusing on the resonator structures, the piezoelectric thin film and electrode film materials, the cavity structures, the filter structure and its design rules and characteristics, comparing with SAW filters. The competition and coexistence between the piezoelectric thin film resonator filters and the SAW filters are also described. In this paper, we describe the development of a piezoelectric thin film resonator from the standpoint of researchers who have a long experience of SAW filter development.

Piezoelectric thin-film resonator and filter using the same

Abstract: A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1

Microwave Acoustic Wave Devices: Recent Advances on Architectures, Modeling, Materials, and Packaging

Abstract: This paper reviews applications of acoustic wave devices in mobile communication. After a general and historical introduction to bulk acoustic wave (BAW) and surface acoustic wave (SAW) devices, a review is given on the architectures where acoustic wave devices are applied driving the requirements on the SAW and BAW components. Following this, we discuss the progress in technology important materials. Next, an overview on the modeling and characterization of SAW and BAW at high power levels is given. Finally an overview of packaging technologies and an outlook to future developments is provided. Finally, an outlook to future developments is provided.

Surface acoustic wave device and method of fabricating the same

Abstract: A surface acoustic wave device includes a piezoelectric substrate having a first surface on which comb-like electrodes, first pads connected thereto, and a first film are provided. The first film is located so as to surround the comb-like electrodes. A base substrate has a second surface on which second pads joined to the first pads and a second film joined to the first film are provided. The first and second films joined by a surface activation process define a cavity in which the comb-like electrodes and the first and second pads are hermetically sealed.

Filter and duplexer

Abstract: A filter includes one or a plurality of parallel resonators coupled in parallel and one or a plurality of a film bulk acoustic resonators coupled in series, the film bulk acoustic resonator having a substrate, a lower electrode, a piezoelectric membrane, and an upper electrode, wherein: at least one of the lower electrode and the upper electrode has a thick membrane region having a thickness larger than that of a center portion of a resonance region at an edge of the resonance region, the resonance region being a region where the lower electrode and the upper electrode face with each other through the piezoelectric membrane; and a width of the thick membrane region is smaller than a wavelength of an acoustic wave propagating in a direction crossing a thickness direction of the piezoelectric membrane.

Bound states in the continuum

Abstract: Bound states in the continuum (BICs) are waves that remain localized even though they coexist with a continuous spectrum of radiating waves that can carry energy away. Their very existence defies conventional wisdom. Although BICs were first proposed in quantum mechanics, they are a general wave phenomenon and have since been identified in electromagnetic waves, acoustic waves in air, water waves and elastic waves in solids. These states have been studied in a wide range of material systems, such as piezoelectric materials, dielectric photonic crystals, optical waveguides and fibres, quantum dots, graphene and topological insulators. In this Review, we describe recent developments in this field with an emphasis on the physical mechanisms that lead to BICs across seemingly very different materials and types of waves. We also discuss experimental realizations, existing applications and directions for future work. The fascinating wave phenomenon of ‘bound states in the continuum’ spans different material and wave systems, including electron, electromagnetic and mechanical waves. In this Review, we focus on the common physical mechanisms underlying these bound states, whilst also discussing recent experimental realizations, current applications and future opportunities for research.

Blood treatment systems and methods

Abstract: Dialysis systems comprising actuators that cooperate to perform dialysis functions and sensors that cooperate to monitor dialysis functions are disclosed. According to one aspect, such a hemodialysis system comprises a user interface model layer, a therapy layer, below the user interface model layer, and a machine layer below the therapy layer. The user interface model layer is configured to manage the state of a graphical user interface and receive inputs from a graphical user interface. The therapy layer is configured to run state machines that generate therapy commands based at least in part on the inputs from the graphical user interface. The machine layer is configured to provide commands for the actuators based on the therapy commands.

Boundary acoustic wave device

Abstract: A dielectric substance is laminated on one surface of a piezoelectric substance, and an IDT and reflectors are disposed as electrodes at a boundary between the piezoelectric substance and the dielectric substance, and the thickness of the electrodes is determined so that the acoustic velocity of the Stoneley wave is decreased less than that of a slow transverse wave propagating through the dielectric substance and that of a slow transverse wave propagating through the piezoelectric substance, thereby forming a boundary acoustic wave device.