M
Matthew A. Hopcroft
Researcher at University of California, Berkeley
Publications - 90
Citations - 4819
Matthew A. Hopcroft is an academic researcher from University of California, Berkeley. The author has contributed to research in topics: Resonator & Q factor. The author has an hindex of 31, co-authored 89 publications receiving 4324 citations. Previous affiliations of Matthew A. Hopcroft include Hewlett-Packard & University of California, Santa Barbara.
Papers
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Journal ArticleDOI
What is the Young's Modulus of Silicon?
TL;DR: In this paper, the authors present the best known elasticity data for silicon, both in depth and in a summary form, so that it may be readily accessible to MEMS designers.
Journal ArticleDOI
Temperature Dependence of Quality Factor in MEMS Resonators
Bongsang Kim,Matthew A. Hopcroft,Rob N. Candler,C.M. Jha,M. Agarwal,Renata Melamud,Saurabh A. Chandorkar,Gary Yama,Thomas W. Kenny +8 more
TL;DR: In this article, the authors analyzed the temperature dependence of the quality factor of microelectromechanical system (MEMS) resonators and measured the sensitivity of up to 1% changes in quality factor per degree Celsius change of temperature.
Journal ArticleDOI
Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators
Rob N. Candler,Matthew A. Hopcroft,Bongsang Kim,Woo-Tae Park,Renata Melamud,Manu Agarwal,Gary Yama,Aaron Partridge,Markus Lutz,Thomas W. Kenny +9 more
TL;DR: In this paper, a single-wafer vacuum encapsulation for microelectromechanical systems (MEMS) using a 20-mum polysilicon encapsulation was developed.
Journal ArticleDOI
Temperature-compensated aluminum nitride lamb wave resonators
Chih-Ming Lin,Ting-Ta Yen,Yun-Ju Lai,Valery V. Felmetsger,Matthew A. Hopcroft,Jan H. Kuypers,Albert P. Pisano +6 more
TL;DR: This temperature-compensated AlN Lamb wave resonator based on a stack of AlN and SiO2 layers can achieve a zero first-order temperature coefficient of frequency (TCF) and is promising for future applications including thermally stable oscillators, filters, and sensors.
Journal ArticleDOI
Temperature-Insensitive Composite Micromechanical Resonators
Renata Melamud,Saurabh A. Chandorkar,Bongsang Kim,Hyung Kyu Lee,James Christian Salvia,Gaurav Bahl,Matthew A. Hopcroft,Thomas W. Kenny +7 more
TL;DR: In this article, composite resonators with zero linear temperature coefficient of frequency were fabricated and characterized, and the resulting resonators have a quadratic temperature coefficient for Young's modulus of approximately -20 ppb/degC2 and a tunable turnover temperature in the -55degC to 125degC range.