M
Michael Christopher Sarin
Researcher at ASM International
Publications - 2
Citations - 163
Michael Christopher Sarin is an academic researcher from ASM International. The author has contributed to research in topics: Positive displacement meter & Flow coefficient. The author has an hindex of 1, co-authored 2 publications receiving 163 citations.
Papers
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Patent
Systems and methods for mass flow controller verification
Michael Christopher Sarin,Rafael Mendez,Gregory Bartlett,Eric Hill,Keith R. Lawson,Andrew D. Rosser +5 more
TL;DR: In this article, a method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a Mass Flow Controller used with a tool for semiconductor or solar cell fabrication.
Patent
Apparatus and method related to reaction chamber with shutter system
TL;DR: In this paper, a reaction chamber assembly with a shutter system may be used in the processing of semiconductor substrates, which may facilitate gas flow control and temperature control within the reaction chamber.