M
Michael D. Stewart
Researcher at University of Texas at Austin
Publications - 30
Citations - 3759
Michael D. Stewart is an academic researcher from University of Texas at Austin. The author has contributed to research in topics: Lithography & Photolithography. The author has an hindex of 18, co-authored 30 publications receiving 3607 citations.
Papers
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Journal ArticleDOI
New approaches to nanofabrication: molding, printing, and other techniques.
Proceedings ArticleDOI
Step and flash imprint lithography: a new approach to high-resolution patterning
Matthew E. Colburn,Stephen C. Johnson,Michael D. Stewart,S. Damle,Todd Bailey,Bernard Choi,M. Wedlake,Timothy Michaelson,Sidlgata V. Sreenivasan,John G. Ekerdt,C. Grant Willson +10 more
TL;DR: In this article, a template is created on a standard mask blank by using the patterned chromium as an etch mask to produce high-resolution relief images in the quartz.
Journal ArticleDOI
New Approaches to Nanofabrication: Molding, Printing, and Other Techniques
Byron D. Gates,Qiaobing Xu,Michael D. Stewart,Declan Ryan,C. Grant Willson,George M. Whitesides +5 more
Journal ArticleDOI
Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography
Paul Ruchhoeft,Matthew E. Colburn,Byung Jin Choi,Hatem N. Nounu,Scott C. Johnson,Todd Bailey,S. Damle,Michael D. Stewart,John G. Ekerdt,Sidlgata V. Sreenivasan,John C. Wolfe,Carlton G Willson +11 more
TL;DR: In this paper, a 1 in. diameter curved surface with a 46 mm radius of curvature was demonstrated with step and flash imprint lithography (SFIL) using templates patterned by ion beam proximity printing (IBP).
Journal ArticleDOI
Acid catalyst mobility in resist resins
Michael D. Stewart,Hoang Vi Tran,Gerard M. Schmid,Timothy B. Stachowiak,Darren J. Becker,C. Grant Willson +5 more
TL;DR: In this article, the acid catalyst diffusion in photoresist resins is studied and it is shown that the diffusing catalyst promotes chemical reactions which change the properties of its surrounding resin.