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Michael D. Stewart

Researcher at University of Texas at Austin

Publications -  30
Citations -  3759

Michael D. Stewart is an academic researcher from University of Texas at Austin. The author has contributed to research in topics: Lithography & Photolithography. The author has an hindex of 18, co-authored 30 publications receiving 3607 citations.

Papers
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Proceedings ArticleDOI

Step and flash imprint lithography: a new approach to high-resolution patterning

TL;DR: In this article, a template is created on a standard mask blank by using the patterned chromium as an etch mask to produce high-resolution relief images in the quartz.
Journal ArticleDOI

Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography

TL;DR: In this paper, a 1 in. diameter curved surface with a 46 mm radius of curvature was demonstrated with step and flash imprint lithography (SFIL) using templates patterned by ion beam proximity printing (IBP).
Journal ArticleDOI

Acid catalyst mobility in resist resins

TL;DR: In this article, the acid catalyst diffusion in photoresist resins is studied and it is shown that the diffusing catalyst promotes chemical reactions which change the properties of its surrounding resin.