N
Nadim I. Maluf
Researcher at General Electric
Publications - 7
Citations - 980
Nadim I. Maluf is an academic researcher from General Electric. The author has contributed to research in topics: Closed position & Etching (microfabrication). The author has an hindex of 5, co-authored 7 publications receiving 959 citations.
Papers
More filters
Journal ArticleDOI
Bulk micromachining of silicon
TL;DR: In this article, the available etching methods fall into three categories in terms of the state of the etchant: wet, vapor, and plasma, and they are reviewed and compared by comparing the results, cost, complexity, process compatibility, and other factors.
Patent
Proportional micromechanical device
Nadim I. Maluf,Kirt R. Williams,Bert P. van Drieenhuizen,Edward Nelson Fuller,Richard J. Barron +4 more
TL;DR: In this paper, a proportional microvalve (10) having a first, second and third layer, and having high aspect ratio geometries, is presented, where the first layer defines a cavity (24) with inlet (20) and outlet (22) ports.
Patent
Microvalve with pressure equalization
Kirt R. Williams,Bert P. van Drieenhuizen,Dominik P. Jaeggi,Nadim I. Maluf,Edward Nelson Fuller,Richard J. Barron +5 more
TL;DR: In this paper, the displaceable member of a closed microvalve slides across an inlet port, thereby creating an orifice, and a pressure equalizing contour is positioned beneath the disleaveable member and is in fluid contact with the inlet.
Patent
Proportional micromechanical valve
Nadim I. Maluf,Kirt R. Williams,Bert P. van Drieenhuizen,Edward Nelson Fuller,Richard J. Barron +4 more
TL;DR: In this paper, the authors proposed a proportional microvalve with a first, second, and third layer, having high aspect ratio geometries, and a thermal actuator for actuating the displaceable member to a position between and including an open and a closed position.