P. Patel

Bio: P. Patel is an academic researcher from University of Illinois at Urbana–Champaign. The author has contributed to research in topics: X-ray photoelectron spectroscopy & Thin film. The author has an hindex of 3, co-authored 3 publications receiving 95 citations.

Characterization of diamond-like nanocomposite thin films grown by plasma enhanced chemical vapor deposition

Abstract: Diamond-like nanocomposite (DLN) thin films, comprising the networks of a-C:H and a-Si:O were deposited on pyrex glass or silicon substrate using gas precursors (e.g., hexamethyldisilane, hexamethyldisiloxane, hexamethyldisilazane, or their different combinations) mixed with argon gas, by plasma enhanced chemical vapor deposition technique. Surface morphology of DLN films was analyzed by atomic force microscopy. High-resolution transmission electron microscopic result shows that the films contain nanoparticles within the amorphous structure. Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, and x-ray photoelectron spectroscopy (XPS) were used to determine the structural change within the DLN films. The hardness and friction coefficient of the films were measured by nanoindentation and scratch test techniques, respectively. FTIR and XPS studies show the presence of CC, CH, SiC, and SiH bonds in the a-C:H and a-Si:O networks. Using Raman spectroscopy, we also found that the hardness of the DLN films varies with the intensity ratio ID/IG. Finally, we observed that the DLN films has a better performance compared to DLC, when it comes to properties like high hardness, high modulus of elasticity, low surface roughness and low friction coefficient. These characteristics are the critical components in microelectromechanical systems (MEMS) and emerging nanoelectromechanical systems (NEMS).

Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

Abstract: T. S. Santra1, T. K. Bhattacharyya2, P. Patel3, F. G. Tseng1 and T. K. Barik4 1Institute of Nanoengineering and Microsystems (NEMS), National Tsing Hua University, Hsinchu, Taiwan 2Department of Electronics and Electrical Communication Engineering, Indian Institute of Technology, Kharagpur, West Bengal, 3Department of Electrical and Computer Engineering, University of Illinois at Urbana Champaign, 4School of Applied Sciences and Humanities, Haldia Institute of Technology, Haldia, Purba Medinipur, West Bengal, 1Republic of China 2,4India 3USA

Structural and tribological properties of diamond-like nanocomposite thin films

Abstract: The structural and tribological properties of diamond-like nanocomposite (DLN) thin films, deposited by radio frequency plasma enhanced chemical vapor deposition (rf-PECVD) on the pyrex glass or silicon substrate using the combinations of siloxane and silazane based gas precursors, are discussed. High resolution transmission electron microscopy (HRTEM) result shows the DLN film structure with different nanoparticle size. The surface morphology of the DLN films has been investigated by using atomic force microscopy (AFM). The structural properties of the DLN films are analyzed by Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). We have observed different bonds like C―C, C―H, C―Si, C―O, Si―O, Si―H, etc. in the DLN films by XPS and FTIR analysis, which reveal that it consists of a-C:H and a-Si:O networks. The disorder and graphitic structure of amorphous carbon of the deposited films are analyzed by Raman spectroscopy. The hardness and friction coefficient of the films are measured by nanoindentation and scratch test techniques. Finally, we find that mixed siloxane and silazane precursor (MSSP) based DLN films provide better film-properties like surface roughness, friction coefficient, etc. than those of single siloxane or silazane precursor (SSSP) based DLN films.

Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview

Abstract: The use of wide bandgap semiconductor thin films as sensing materials for micro-electrical---mechanical systems (MEMS) sensors has been the subject of much discussion in the academic and industrial communities. The motivation is that such materials are recognized as being suitable for extreme environment applications, namely: high temperatures, intense radiation and corrosive atmospheres. Among the wide bandgap semiconductor materials, aluminum nitride (AlN), zinc oxide (ZnO), diamond-like carbon (DLC) and silicon carbide (SiC) are highlighted due to their inherent sensing properties and compatibility with MEMS fabrication processes. Here we show an overview on the development technologies and applications of AlN, ZnO, DLC and SiC thin films in piezoelectric and piezoresistive MEMS sensors. Emphasis is placed on the influence of the temperature on the piezoelectric and piezoresistive properties of these films.

Diamond like carbon nanocomposites with embedded metallic nanoparticles

Abstract: In this work we present an overview on structure formation, optical and electrical properties of diamond like carbon (DLC) based metal nanocomposites deposited by reactive magnetron sputtering and treated by plasma and laser ablation methods. The influence of deposition mode and other technological conditions on the properties of the nanosized filler, matrix components and composition were studied systematically in relation to the final properties of the nanocomposites. Applications of the nanocomposites in the development of novel biosensors combining resonance response of wave guiding structures in DLC based nanocomposites as well as plasmonic effects are also presented.