Pasqualina M. Sarro

TL;DR: In this article, an analysis of the performance of integrated silicon thermopiles is presented and several thermal sensors that measure magnetic, mechanical, radiation and chemical signals, as well as electrical converters are reviewed.

TL;DR: Silicon carbide (SiC) is a material with very attractive properties for microsystems applications as discussed by the authors, its mechanical strength, high thermal conductivity, ability to operate at high temperatures and extreme chemical inertness in several liquid electrolytes, make SiC an attractive candidate for MEMS applications, both as structural material and as coating layer.

TL;DR: The nanoreactor concept opens up new possibilities for in situ studies of nanomaterials and the ways they interact with their ambient working environment in diverse areas, such as heterogeneous catalysis, electrochemistry, nanofabrication, materials science and biology.

TL;DR: In this article, a surface micromachining process, using an oxide sacrificial layer and poly/nitride/poly membranes, has been developed for light modulators integrated on the same chip as the signal processing.

TL;DR: An electrostatically controlled flexible mirror has been fabricated on a silicon chip by means of bulk micromachining and the possibility of electrostatic control of the reflecting surface make the on-chip mirror useful for various electro-optical applications.