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Peter J. de Groot

Researcher at Zygo Corporation

Publications -  202
Citations -  7458

Peter J. de Groot is an academic researcher from Zygo Corporation. The author has contributed to research in topics: Interferometry & Interference microscopy. The author has an hindex of 44, co-authored 198 publications receiving 7063 citations. Previous affiliations of Peter J. de Groot include PerkinElmer & Utrecht University.

Papers
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High-speed noncontact profiler based on scanning white-light interferometry

TL;DR: A system for fast three-dimensional profilometry, of both optically smooth and optically rough surfaces, based on scanning white-light techniques, using an efficient algorithm to extract and save only the region of interference, substantially reducing both the acquisition and the analysis times.
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Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain

TL;DR: In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.
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Principles of interference microscopy for the measurement of surface topography

TL;DR: Recent advances considered here include performance improvements, vibration robustness, full color imaging, accommodation of highly sloped surfaces, correlation to contact methods, transparent film analysis, and international standardization of calibration and specification.
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Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window

TL;DR: A systematic way to derive efficient, error-compensating algorithms for phase-shifting interferometry by integer approximation of well-known data-sampling windows by observing that many of the common sources of phase-estimation error can be related to the frequency-domain characteristics of the sampling window.
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Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms

TL;DR: In this paper, the authors demonstrate a simple way of increasing the data acquisition and processing speed in a scanning white-light interferometer for surface topography measurement, which consists of undersampling interference data and processing the resultant sub-Nyquist interferograms in the frequency domain to create complete three-dimensional images.