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R.H. Liu

Bio: R.H. Liu is an academic researcher from University of Illinois at Urbana–Champaign. The author has contributed to research in topics: Microchannel & Electroforming. The author has an hindex of 3, co-authored 3 publications receiving 1224 citations.

Papers
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Journal ArticleDOI
TL;DR: A three-dimensional serpentine microchannel design with a "C shaped" repeating unit is presented in this paper as a means of implementing chaotic advection to passively enhance fluid mixing.
Abstract: A three-dimensional serpentine microchannel design with a "C shaped" repeating unit is presented in this paper as a means of implementing chaotic advection to passively enhance fluid mixing. The device is fabricated in a silicon wafer using a double-sided KOH wet-etching technique to realize a three-dimensional channel geometry. Experiments using phenolphthalein and sodium hydroxide solutions demonstrate the ability of flow in this channel to mix faster and more uniformly than either pure molecular diffusion or flow in a "square-wave" channel for Reynolds numbers from 6 to 70. The mixing capability of the channel increases with increasing Reynolds number. At least 98% of the maximum intensity of reacted phenolphthalein is observed in the channel after five mixing segments for Reynolds numbers greater than 25. At a Reynolds number of 70, the serpentine channel produces 16 times more reacted phenolphthalein than a straight channel and 1.6 times more than the square-wave channel. Mixing rates in the serpentine channel at the higher Reynolds numbers are consistent with the occurrence of chaotic advection. Visualization of the interface formed in the channel between streams of water and ethyl alcohol indicates that the mixing is due to both diffusion and fluid stirring.

1,218 citations

Journal ArticleDOI
TL;DR: In this article, a spin-on glass was used to fabricate nonplanar dielectric structures (channel plate microstructures) with aspect ratios (i.e., ratio of channel length to channel width) of 20:1.
Abstract: This paper presents a new application of spin-on glass to fabricate nonplanar dielectric structures (channel plate microstructures) with aspect ratios (i.e., ratio of channel length to channel width) of 20:1. A variety of microchannel geometries have been fabricated. The LIGA process is used to make nickel molds up to 150 /spl mu/m in height with mechanically planarized surfaces. Spin-on glass (SOG) is applied to obtain glass structures in nickel molds. A multiple dispensing/drying/curing process was developed resulting in crack-free SOG structures. Reverse electroplating is used to remove the nickel mold and release the glass structures. The resulting freestanding glass microchannel plates (>100 /spl mu/m in height) demonstrated good electrical properties (400-V//spl mu/m breakdown voltage) and good spatial definition.

51 citations

Proceedings ArticleDOI
16 Jun 1997-Sensors
TL;DR: In this paper, the LIGA process is used to fabricate nickel molds up to 150 /spl mu/m in height with planarized surfaces, and a reverse electroplating was used to remove the Ni mold and release the glass structures with height of more than 100 /spl mm/m.
Abstract: This paper describes the development of microchannel plate prototypes with aspect ratios of 20:1 and a variety of microchannel geometries. The LIGA process is utilized to fabricate nickel molds up to 150 /spl mu/m in height with planarized surfaces. A novel application of spin-on glass is developed to obtain glass structures in Ni molds. A reverse electroplating is used to remove the Ni mold and release the glass structures with height of more than 100 /spl mu/m.

10 citations


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Journal ArticleDOI
TL;DR: A review of the physics of small volumes (nanoliters) of fluids is presented, as parametrized by a series of dimensionless numbers expressing the relative importance of various physical phenomena as mentioned in this paper.
Abstract: Microfabricated integrated circuits revolutionized computation by vastly reducing the space, labor, and time required for calculations. Microfluidic systems hold similar promise for the large-scale automation of chemistry and biology, suggesting the possibility of numerous experiments performed rapidly and in parallel, while consuming little reagent. While it is too early to tell whether such a vision will be realized, significant progress has been achieved, and various applications of significant scientific and practical interest have been developed. Here a review of the physics of small volumes (nanoliters) of fluids is presented, as parametrized by a series of dimensionless numbers expressing the relative importance of various physical phenomena. Specifically, this review explores the Reynolds number Re, addressing inertial effects; the Peclet number Pe, which concerns convective and diffusive transport; the capillary number Ca expressing the importance of interfacial tension; the Deborah, Weissenberg, and elasticity numbers De, Wi, and El, describing elastic effects due to deformable microstructural elements like polymers; the Grashof and Rayleigh numbers Gr and Ra, describing density-driven flows; and the Knudsen number, describing the importance of noncontinuum molecular effects. Furthermore, the long-range nature of viscous flows and the small device dimensions inherent in microfluidics mean that the influence of boundaries is typically significant. A variety of strategies have been developed to manipulate fluids by exploiting boundary effects; among these are electrokinetic effects, acoustic streaming, and fluid-structure interactions. The goal is to describe the physics behind the rich variety of fluid phenomena occurring on the nanoliter scale using simple scaling arguments, with the hopes of developing an intuitive sense for this occasionally counterintuitive world.

4,044 citations

Journal ArticleDOI
TL;DR: An overview of flows in microdevices with focus on electrokinetics, mixing and dispersion, and multiphase flows is provided, highlighting topics important for the description of the fluid dynamics: driving forces, geometry, and the chemical characteristics of surfaces.
Abstract: Microfluidic devices for manipulating fluids are widespread and finding uses in many scientific and industrial contexts. Their design often requires unusual geometries and the interplay of multiple physical effects such as pressure gradients, electrokinetics, and capillarity. These circumstances lead to interesting variants of well-studied fluid dynamical problems and some new fluid responses. We provide an overview of flows in microdevices with focus on electrokinetics, mixing and dispersion, and multiphase flows. We highlight topics important for the description of the fluid dynamics: driving forces, geometry, and the chemical characteristics of surfaces.

3,307 citations

Journal ArticleDOI
25 Jan 2002-Science
TL;DR: This work presents a passive method for mixing streams of steady pressure-driven flows in microchannels at low Reynolds number, and uses bas-relief structures on the floor of the channel that are easily fabricated with commonly used methods of planar lithography.
Abstract: It is difficult to mix solutions in microchannels. Under typical operating conditions, flows in these channels are laminar—the spontaneous fluctuations of velocity that tend to homogenize fluids in turbulent flows are absent, and molecular diffusion across the channels is slow. We present a passive method for mixing streams of steady pressure-driven flows in microchannels at low Reynolds number. Using this method, the length of the channel required for mixing grows only logarithmically with the Pe «clet number, and hydrodynamic dispersion along the channel is reduced relative to that in a simple, smooth channel. This method uses bas-relief structures on the floor of the channel that are easily fabricated with commonly used methods of planar lithography.

3,269 citations

Journal ArticleDOI
TL;DR: Soft lithography offers the ability to control the molecular structure of surfaces and to pattern the complex molecules relevant to biology, to fabricate channel structures appropriate for microfluidics, and topattern and manipulate cells.
Abstract: ▪ Abstract Soft lithography, a set of techniques for microfabrication, is based on printing and molding using elastomeric stamps with the patterns of interest in bas-relief. As a technique for fabricating microstructures for biological applications, soft lithography overcomes many of the shortcomings of photolithography. In particular, soft lithography offers the ability to control the molecular structure of surfaces and to pattern the complex molecules relevant to biology, to fabricate channel structures appropriate for microfluidics, and to pattern and manipulate cells. For the relatively large feature sizes used in biology (≥50 μm), production of prototype patterns and structures is convenient, inexpensive, and rapid. Self-assembled monolayers of alkanethiolates on gold are particularly easy to pattern by soft lithography, and they provide exquisite control over surface biochemistry.

2,659 citations

Journal ArticleDOI
TL;DR: The focus of this review is microscale phenomena and the use of the physics of the scale to create devices and systems that provide functionality useful to the life sciences.
Abstract: ■ Abstract Fluid flow at the microscale exhibits unique phenomena that can be leveraged to fabricate devices and components capable of performing functions useful for biological studies. The physics of importance to microfluidics are reviewed. Common methods of fabricating microfluidic devices and systems are described. Components, including valves, mixers, and pumps, capable of controlling fluid flow by utilizing the physics of the microscale are presented. Techniques for sensing flow characteristics are described and examples of devices and systems that perform bioanalysis are presented. The focus of this review is microscale phenomena and the use of the physics of the scale to create devices and systems that provide functionality useful to the life sciences.

1,721 citations