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R. S. Title

Bio: R. S. Title is an academic researcher. The author has contributed to research in topics: Amorphous solid & Amorphous silicon. The author has an hindex of 2, co-authored 3 publications receiving 569 citations.

Papers
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Journal ArticleDOI
TL;DR: In this article, the g value, line shape, and linewidth of an ESR signal in Si layers which have been damaged by ion implantation of Si, P, or As at room temperature are found to be identical to those of the electron states observed in amorphous Si films prepared by rf sputtering.
Abstract: The g value, line shape, and linewidth of an ESR signal in Si layers which have been damaged by ion implantation of Si, P, or As at room temperature are found to be identical to those of the electron states observed in amorphous Si films prepared by rf sputtering. Interference phenomena observed in the optical absorption spectra allow a determination of the depth to which the Si has been damaged by the energetic heavy ions. These two techniques together provide a new tool for investigating lattice disorder in ion‐implanted Si layers.

153 citations


Cited by
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Journal ArticleDOI
David E. Aspnes1, A. A. Studna1
TL;DR: In this paper, the pseudodielectric functions of spectroscopic ellipsometry and refractive indices were measured using the real-time capability of the spectro-optical ellipsometer.
Abstract: We report values of pseudodielectric functions $〈\ensuremath{\epsilon}〉=〈{\ensuremath{\epsilon}}_{1}〉+i〈{\ensuremath{\epsilon}}_{2}〉$ measured by spectroscopic ellipsometry and refractive indices $\stackrel{\ifmmode \tilde{}\else \~{}\fi{}}{n}=n+ik$, reflectivities $R$, and absorption coefficients $\ensuremath{\alpha}$ calculated from these data. Rather than correct ellipsometric results for the presence of overlayers, we have removed these layers as far as possible using the real-time capability of the spectroscopic ellipsometer to assess surface quality during cleaning. Our results are compared with previous data. In general, there is good agreement among optical parameters measured on smooth, clean, and undamaged samples maintained in an inert atmosphere regardless of the technique used to obtain the data. Differences among our data and previous results can generally be understood in terms of inadequate sample preparation, although results obtained by Kramers-Kronig analysis of reflectance measurements often show effects due to improper extrapolations. The present results illustrate the importance of proper sample preparation and of the capability of separately determining both ${\ensuremath{\epsilon}}_{1}$ and ${\ensuremath{\epsilon}}_{2}$ in optical measurements.

3,094 citations

Journal ArticleDOI
TL;DR: In this paper, a new reversible photoelectronic effect was reported for amorphous Si produced by glow discharge of SiH4, where long exposure to light decreases both the photoconductivity and the dark conductivity.
Abstract: A new reversible photoelectronic effect is reported for amorphous Si produced by glow discharge of SiH4. Long exposure to light decreases both the photoconductivity and the dark conductivity, the latter by nearly four orders of magnitude. Annealing above 150 °C reverses the process. A model involving optically induced changes in gap states is proposed. The results have strong implications for both the physical nature of the material and for its applications in thin‐film solar cells, as well as the reproducibility of measurements on discharge‐produced Si.

2,673 citations

Book
23 Jun 1994
TL;DR: In this article, the optical properties of implanted semiconductors, electrooptic components formed by ion implantation, general principles that determine most luminescent systems, effects of implantation temperature, luminescence centers in LiF-Mg-Ti radiation dosimeters, and use of line spectra in defect studies.
Abstract: Publisher Summary A refractive index can be increased by ion implantation by changes in density and structure, by the addition of high-polarizability impurity ions, by a reduction of the plasma effect that increases the index and that is most important in the wavelength region far from the energy gap, and by absorption changing in the index in the region of the gap, that is, via the Kramers–Kronig relation. This chapter discusses the optical properties of implanted semiconductors, electrooptic components formed by ion implantation, general principles that determine most luminescent systems, effects of implantation temperature, luminescence centers in LiF-Mg-Ti radiation dosimeters, and use of line spectra in defect studies. In the LiF system, the luminescence bands are broad, and if alternative versions of the same complex exist, they cannot be resolved from the spectra. The addition, by implantation, of ions with incomplete inner electron shells opens up new possibilities as the lattice distortions of the free-ion energy levels are strongly perturbed by the defects in the neighborhood of the ion.

944 citations

Journal ArticleDOI
TL;DR: In this article, the authors search, compile, and analyze refractive index data for silicon and germanium and generate recommended values for the transparent spectral region were generated in the ranges 1.2 to 14 μm and 100-740 K for silicon, and 1.9 to 16 µm and100-550 K for germanIUM.
Abstract: Refractive index data for silicon and germanium were searched, compiled, and analyzed. Recommended values of refractive index for the transparent spectral region were generated in the ranges 1.2 to 14 μm and 100–740 K for silicon, and 1.9 to 16 μm and 100–550 K for germanium. Generation of these values was based on a dispersion equation which best fits selected data sets covering wide temperature and wavelength ranges. Temperature derivative of refractive index was simply calculated from the first derivative of the equation with respect to temperature. The results are in concordance with the existing dn/dT data.

661 citations

Journal ArticleDOI
G.L. Olson1, J.A. Roth1
TL;DR: In this paper, the authors examined the crystallization behavior of a-Si over the temperature range from 500 °C to ∼ 1380°C and showed that the random crystallization process is a well-behaved function of temperature over that temperature range with an activation energy of 4 eV.

601 citations