An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide semiconductor film typified by zinc oxide, and a manufacturing method thereof. For the semiconductor device, a gate electrode is formed over a substrate; a gate insulating film is formed covering the gate electrode; an oxide semiconductor film is formed over the gate insulating film; and a first conductive film and a second conductive film are formed over the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel region.

Semiconductor device, and manufacturing method thereof

Process gas discharged from a bypass pipe to a gas exhaust system can be prevented from diffusing back to the inside of a process chamber without having to install a dedicated vacuum pump at the downstream side of the bypass pipe. The substrate processing apparatus includes a process chamber accommodating a substrate, a gas supply system supplying process gas from a process gas source to the process chamber for processing the substrate, a gas exhaust system configured to exhaust the process chamber, two or more vacuum pumps installed in series at the gas exhaust system, and a bypass pipe connected between the gas supply system and the gas exhaust system. The most upstream one of the vacuum pumps is a mechanical booster pump, and the bypass pipe is connected between the mechanical booster pump and the rest vacuum pumps located at a downstream side of the mechanical booster pump.

Substrate Processing Apparatus

An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.

Toroidal low-field reactive gas source

Embodiments related to managing the process feed conditions for a semiconductor process module are provided. In one example, a gas channel plate for a semiconductor process module is provided. The example gas channel plate includes a heat exchange surface including a plurality of heat exchange structures separated from one another by intervening gaps. The example gas channel plate also includes a heat exchange fluid director plate support surface for supporting a heat exchange fluid director plate above the plurality of heat exchange structures so that at least a portion of the plurality of heat exchange structures are spaced from the heat exchange fluid director plate.

Process feed management for semiconductor substrate processing

A method of forming an insulation film by alternating multiple times, respectively, a process of adsorbing a precursor onto a substrate and a process of treating the adsorbed surface using reactant gas and a plasma, wherein a plasma is applied in the process of supplying the precursor.

Method of forming insulation film by modified PEALD

A method of supplying electrical power to and controlling corona discharge cells used for the generation of ozone employs a single-cycle discontinuous waveform which is characterized by a fixed pulse width and a variable repetition rate. Discrete bipolar pulses are composed of a pair of unipolar pulses of opposite polarity. The bipolar pulse repetition rate is varied to control the average corona power, providing an infinite turndown of ozone output. When powering discharge cells which are asymmetric in their response to pulse polarity, such as those containing a dielectric coated with a conducting surface as a first electrode and a metal as a second electrode, the present invention configures the first pulse of each pair to make the dielectric electrode electronically negative with respect to the metal electrode. This polarity sequence produces a more stable corona and far less electrical noise. Furthermore, to decrease acoustic and mechanical resonances and fatigue to system components and to the human ear, this invention broadens the frequency distribution of the pulse repetition rate by repetitively sweeping or randomly jittering the intervals between bipolar pulses.

method of powering corona discharge in ozone generators

A freeze-thaw air dryer utilizes a heat pump to remove moisture from air by cooling the air to below the freezing point of water, causing the water to pass directly from the vapor state to the solid state and thereby to be removed from the flow of air The vapor frozen on the cold surfaces is periodically thawed by either turning off or reversing the heat pump, and the condensate and thawed ice are automatically drained out of the device without interruption of the airflow The geometry of the cold surfaces and the generally centripetal airflow path are designed expressly to cause a buildup of ice without impairing efficiency or blocking the airflow

Freeze-thaw air dryer

A method for preventing stagnation and biofilm formation in the jet pump circuit of a spa, therapy pool or bath employing separate pumps or plumbing circuits for circulation and for pressure jet/massaging functions. The method includes a bidirectional water conduit through which water flows in one direction when the circulation pump is on, and in the other direction when the jet pump is on. All plumbing in the jet pump circuit is thereby kept free of biofilm by causing water containing a dissolved disinfectant to flow through it while the circulation pump is on. The invention further includes methods for automatically flushing the massage jet air lines and the air bubbler chamber with disinfectant-containing water while the circulation pump is on. This method increases the reliability and safety of spa disinfection, reduces the quantity of disinfectant needed, and in some cases enables ozone to be used as the major or sole disinfectant.

Method for preventing biofilm in spas

A method of controlling the power used and the ozone generated by an ozone generator. The rate of gas flow through the generator (and/or also the temperature or pressure) is used to either adjust or to limit the output of the power supply. A control signal derived from the gas flow rate is fed to the power supply, influencing its output and thereby affecting the power drawn by the ozone generator. This method enables the concentration or the total quantity of the ozone generated to remain relatively constant with varying gas flow rate, or it can continuously regulate the power level so as to automatically generate the highest possible ozone concentration at any flow rate. In addition, this method allows a single power supply and ozone generator to feed ozone to multiple users with different and/or varying demands, while holding the ozone concentration constant as the users go on and off independently of each other.

Method of controlling ozone generator

A flat plate corona cell for generating ozone with a generally convergent radial gas flow The net gas flow direction through the corona gap is from the outer edges of the cell inward towards an exit port in the approximate center of the cell This eliminates parasitic arcing at the perimeter, greatly increases the life of the perimeter seal, and provides a homogenous gas flow which increases ozone output The cell design allows both electrodes to be operated at high voltage, therefore reducing the effective kilovolts with respect to ground by half

Richard H. Conrad

Papers

method of powering corona discharge in ozone generators

Freeze-thaw air dryer

Method for preventing biofilm in spas

Method of controlling ozone generator

Flat plate corona cell for generating ozone