R
Roger T. Howe
Researcher at Stanford University
Publications - 484
Citations - 26767
Roger T. Howe is an academic researcher from Stanford University. The author has contributed to research in topics: Silicon & Surface micromachining. The author has an hindex of 85, co-authored 481 publications receiving 25818 citations. Previous affiliations of Roger T. Howe include Silicon Labs & University of California, Berkeley.
Papers
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Journal ArticleDOI
Critical Review: Adhesion in surface micromechanical structures
Roya Maboudian,Roger T. Howe +1 more
TL;DR: In this paper, the authors present a review on the state of knowledge of surface phenomena behind adhesion in surface micromechanical structures, including surface roughening and chemical modification of polycrystalline silicon surfaces.
Journal ArticleDOI
Laterally Driven Polysilicon Resonant Microstructures
TL;DR: In this article, a 2 μm-thick phosphorus-doped low-pressure chemical-vapor-deposited (LPCVD) polysilicon film was used for exciting the resonance.
Proceedings ArticleDOI
Laterally driven polysilicon resonant microstructures
TL;DR: In this article, interdigitated finger structures are used for electrostatically exciting the resonance of polysilicon microstructures parallel to the plane of the substrate, with frequencies ranging from 18 kHz to 80 kHz and quality factors from 20 to 130.
Journal ArticleDOI
Surface micromachining for microelectromechanical systems
TL;DR: Surface micromachining is characterized by the fabrication of micromechanical structures from deposited thin films as discussed by the authors, which typically requires that they be freed from the planar substrate.
Journal ArticleDOI
Three-dimensional integration of nanotechnologies for computing and data storage on a single chip
Max M. Shulaker,Max M. Shulaker,Gage Hills,Rebecca Park,Roger T. Howe,Krishna C. Saraswat,H.-S. Philip Wong,Subhasish Mitra +7 more
TL;DR: A prototype of a transformative nanosystem that can capture massive amounts of data every second, store it directly on-chip, perform in situ processing of the captured data, and produce ‘highly processed’ information is presented.