S. Grabarnik

Bio: S. Grabarnik is an academic researcher from Delft University of Technology. The author has contributed to research in topics: Diffraction grating & Lithography. The author has an hindex of 9, co-authored 20 publications receiving 316 citations.

Vertically tapered layers for optical applications fabricated using resist reflow

Abstract: This paper reports on the IC-compatible fabrication of vertically tapered optical layers for use in linear variable optical filters (LVOF). The taper angle is fully defined by a mask design. Only one masked lithography step is required for defining strips in a photoresist with trenches etched therein of a density varying along the length of the strip. In a subsequent reflow, this patterned photoresist is planarized, resulting in a strip with a local thickness defined by the initial layer thickness and the trench density at that position before reflow. Hence a taper can be flexibly programmed by the mask design to be from 0.001o to 0.1o, which enables the simultaneous fabrication of tapered layers of different taper angles. The 3D pattern of resist structures is subsequently transferred into Si or SiO2 by appropriate etching. Complete LVOF fabrication involves CMOS-compatible deposition of a lower dielectric mirror using a stack of dielectrics on the wafer, tapered layer formation and deposition of the top dielectric mirror. Design principle, processing and simulation results plus experimental validation of the technique on the profile in the resist and after transfer of the taper into Si and SiO2 are presented.

Planar double-grating microspectrometer

Abstract: We report on a miniature spectrometer with a volume of 0.135 cm3 and dimensions of 3×3×11 mm, mounted directly on the surface of a CCD sensor. The spectrometer is formed by two flat diffraction gratings that are designed to perform both the dispersion and imaging functions, eliminating the need for any spherical optics. Two separate parts of the device were fabricated with the single-mask 1 μm lithography on a single glass wafer. The wafer was diced and the device was assembled and directly mounted onto a CCD sensor. The resolution of 3 nm, spectral range of 450 to 750 nm and the optical throughput of ∼9% were measured to be in a complete agreement with the model used for the development of the device.

Characterization of thermal cross-talk in a MEMS-based thermopile detector array

Abstract: The spectral resolution of a MEMS-based IR microspectrometer critically depends on the thermal cross-talk between adjacent TE elements in the detector array. Thermal isolation between elements is realized by using bulk micromachining directly following CMOS processing. This paper reports on the characterization results of bridge-shaped TE detector elements that are cut out of a membrane. Elements with dimensions of 650 × 36 ?m2 are separated by 10 ?m wide gaps in order to minimize the thermal cross-talk by heat conduction through the support structure. The static and dynamic aspects of thermal cross-talk have been evaluated with an emphasis on the effect of the thermal conductivity of air as a function of the package pressure.

Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer

Abstract: This paper reports on an IC-Compatible process for the fabrication of Linear Variable Optical Filter (LVOF). The LVOF is integrated with a detector array to result in a micro-spectrometer. The technological challenge in fabrication of an LVOF is fabrication of a well-controlled tapered cavity layer. Very small taper angles, ranging from 0.001 degrees to 0.1 degrees. are fabricated in a resist layer by just one lithography step and a subsequent reflow process. The 3D pattern of resist structures is subsequently transferred into SiO2 by an appropriate etching. Complete LVOF fabrication involves CMOS-compatible deposition of a lower dielectric mirror using a stack of dielectrics on the wafer, tapered layer formation and the deposition of the top dielectric mirror. The design principle, IC-Compatible processing and the characterization results on fabricated LVOFs are presented. (C) 2010 Elsevier B.V. All rights reserved.

A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer

Abstract: The design and fabrication of a thermopile detector array for use in a fully integrated infrared optical spectrometer are described IC-compatible MEMS technologies are used for fabrication of the spectrometer components, such as the slit, planar imaging diffraction grating and detector array The IR micro-spectrometer was designed for operation in the 15‐3 µm wavelength range with the size of the largest dimension about 8 mm The imaging properties of the diffraction grating result in non-uniform dispersion, which imposes special requirements on the dimensions of each single detector in the array The result is an array of unequally sized elements The design considers technological constraints, sensitivity and cross-talk between elements Simulation results, final design, fabrication technique and fabricated devices are presented (Some figures in this article are in colour only in the electronic version)

Optical gas sensing: a review

Abstract: The detection and measurement of gas concentrations using the characteristic optical absorption of the gas species is important for both understanding and monitoring a variety of phenomena from industrial processes to environmental change. This study reviews the field, covering several individual gas detection techniques including non-dispersive infrared, spectrophotometry, tunable diode laser spectroscopy and photoacoustic spectroscopy. We present the basis for each technique, recent developments in methods and performance limitations. The technology available to support this field, in terms of key components such as light sources and gas cells, has advanced rapidly in recent years and we discuss these new developments. Finally, we present a performance comparison of different techniques, taking data reported over the preceding decade, and draw conclusions from this benchmarking.

Compact folded metasurface spectrometer

Abstract: An optical design space that can highly benefit from the recent developments in metasurfaces is the folded optics architecture where light is confined between reflective surfaces, and the wavefront is controlled at the reflective interfaces. In this manuscript, we introduce the concept of folded metasurface optics by demonstrating a compact spectrometer made from a 1-mm-thick glass slab with a volume of 7 cubic millimeters. The spectrometer has a resolution of ~1.2 nm, resolving more than 80 spectral points from 760 to 860 nm. The device is composed of three reflective dielectric metasurfaces, all fabricated in a single lithographic step on one side of a substrate, which simultaneously acts as the propagation space for light. The folded metasystem design can be applied to many optical systems, such as optical signal processors, interferometers, hyperspectral imagers, and computational optical systems, significantly reducing their sizes and increasing their mechanical robustness and potential for integration.

Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter

Abstract: In this paper the concept of a microspectrometer based on a Linear Variable Optical Filter (LVOF) for operation in the visible spectrum is presented and used in two different designs: the first is for the narrow spectral band between 610 nm and 680 nm, whereas the other is for the wider spectral band between 570 nm and 740 nm. Design considerations, fabrication and measurement results of the LVOF are presented. An iterative signal processing algorithm based on an initial calibration has been implemented to enhance the spectral resolution. Experimental validation is based on the spectrum of a Neon lamp. The results of measurements have been used to analyze the operating limits of the concept and to explain the sources of error in the algorithm. It is shown that the main benefits of a LVOF-based microspectrometer are in case of implementation in a narrowband application. The realized LVOF microspectrometers show a spectral resolution of 2.2 nm in the wideband design and 0.7 nm in the narrowband design.

High-resolution optical spectroscopy using multimode interference in a compact tapered fibre.

Abstract: Optical spectroscopy is a fundamental tool in numerous areas of science and technology. Much effort has focused on miniaturizing spectrometers, but thus far at the cost of spectral resolution and broad operating range. Here we describe a compact spectrometer that achieves both high spectral resolution and broad bandwidth. The device relies on imaging multimode interference from leaky modes along a multimode tapered optical fibre, resulting in spectrally distinguishable spatial patterns over a wide range of wavelengths from 500 to 1,600 nm. This tapered fibre multimode interference spectrometer achieves a spectral resolution down to 40 pm in the visible spectrum and 10 pm in the near-infrared spectrum (corresponding to resolving powers of 104–105). Multimode interference spectroscopy is suitable in a variety of device geometries, including planar waveguides in a broad range of transparent materials. While desirable for compact solutions, the miniaturization of spectrometers comes at the cost of spectral resolution and operating range. Here, Wanet al. propose a tapered fibre multimode interference spectrometer exhibiting high spectral resolution from the visible to the near infrared in a compact configuration.

Compact Folded Metasurface Spectrometer

Abstract: Recent advances in optical metasurfaces enable control of the wavefront, polarization and dispersion of optical waves beyond the capabilities of conventional diffractive optics. An optical design space that is poised to highly benefit from these developments is the folded optics architecture where light is confined between reflective surfaces and the wavefront is controlled at the reflective interfaces. In this manuscript we introduce the concept of folded metasurface optics by demonstrating a compact high resolution optical spectrometer made from a 1-mm-thick glass slab with a volume of 7 cubic millimeters. The spectrometer has a resolution of 1.2 nm, resolving more than 80 spectral points in a 100-nm bandwidth centered around 810 nm. The device is composed of three different reflective dielectric metasurfaces, all fabricated in a single lithographic step on one side of a transparent optical substrate, which simultaneously acts as the propagation space for light. An image sensor, parallel to the spectrometer substrate, can be directly integrated on top of it to achieve a compact mono- lithic device including all the active and passive components. Multiple spectrometers, with similar or different characteristics and operation bandwidths may also be integrated on the same chip and fabricated in a batch process, significantly reducing their costs and increas- ing their functionalities and integration potential. In addition, the folded metasystems design can be applied to many optical systems, such as optical signal processors, interferometers, hyperspectral imagers and computational optical systems, significantly reducing their sizes and increasing their mechanical robustness and potential for integration.