S
S.M. Spearing
Researcher at University of Southampton
Publications - 167
Citations - 8092
S.M. Spearing is an academic researcher from University of Southampton. The author has contributed to research in topics: Wafer & Wafer bonding. The author has an hindex of 49, co-authored 165 publications receiving 7467 citations. Previous affiliations of S.M. Spearing include University of Cambridge & University of California, Santa Barbara.
Papers
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Journal ArticleDOI
Materials issues in microelectromechanical systems (MEMS)
TL;DR: In this article, the status of microelectromechanical systems (MEMS) is reviewed with particular emphasis on materials issues therein, and the potential impact of materials solutions is discussed.
Journal ArticleDOI
MEMS actuators and sensors: observations on their performance and selection for purpose
TL;DR: In this paper, the performance of microelectromechanical systems (MEMS) actuators and sensors as a function of operating principle is compared with each other and with equivalent macroscopic devices.
Journal ArticleDOI
Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)
TL;DR: In this article, a set of experiments was designed and performed to fully characterize the sensitivity of surface morphology and mechanical behavior of silicon samples produced with different DRIE operating conditions, and the data was then fitted to response surfaces to model the dependence of response variables on dry processing conditions.
Journal ArticleDOI
In situ fibre fracture measurement in carbon-epoxy laminates using high resolution computed tomography
TL;DR: In this paper, high resolution Synchrotron Radiation Computed Tomography (SRCT) was used to capture fiber damage progression in a carbon-epoxy notched [90/0]s laminate loaded to failure.
Proceedings ArticleDOI
Micro-heat engines, gas turbines, and rocket engines -the mit microengine project-
Alan H. Epstein,Stephen D. Senturia,O. Al-Midani,G. Anathasuresh,Arturo A. Ayon,Kenneth S. Breuer,Kuo-Shen Chen,F. F. Ehrich,E. M. Esteve,Luc G. Fréchette,G. Gauba,Reza Ghodssi,C. Groshenry,Stuart A. Jacobson,Jack L. Kerrebrock,Jeffrey H. Lang,C. C. Lin,A. P. London,J. Lopata,A. Mehra,J. O.Mur Miranda,Steven F. Nagle,D. J. Orr,E. S. Piekos,Martin A. Schmidt,G. Shirley,S.M. Spearing,Chuan Seng Tan,Y. S. Tzeng,L. A. Waitz +29 more
TL;DR: The work in progress on microelectrical and mechanical systems (MEMS)-based gas turbine engines, turbogenerators, and rocket engines currently under development at MIT is described in this paper.