S
S. Mcauley
Publications - 5
Citations - 203
S. Mcauley is an academic researcher. The author has contributed to research in topics: Microelectromechanical systems & Etching (microfabrication). The author has an hindex of 3, co-authored 3 publications receiving 201 citations.
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Journal ArticleDOI
Silicon micromachining using a high-density plasma source
TL;DR: In this paper, the authors developed a technique to address the problem of feature size control at the interface of the ICP etch tool, which is an industry wide problem in microelectro-mechanical applications.
Proceedings ArticleDOI
Advances in Deep Anisotropic Silicon Etch Processing for Mems
Huma Ashraf,Jyoti Kiron Bhardwaj,S. Hall,Janet Hopkins,Alan Michael Hynes,I. Johnston,S. Mcauley,G. Nicholls,L. Atabo,M. E. Ryan,S. Watcham +10 more
Journal ArticleDOI
Defining Conditions for the Etching of Silicon in an Inductive Coupled Plasma Reactor
Huma Ashraf,Jyoti Kiron Bhardwaj,E. Guibarra,S. Hall,Janet Hopkins,Alan Michael Hynes,I. Johnston,L. Lea,S. Mcauley,G. Nicholls,Paul O'Brien +10 more
TL;DR: In this paper, the etching of silicon wafers in an inductive coupled plasma reactor, using SF6, has been studied, and a systematic empirical investigation has allowed us to define many of the experimental parameters that control the etch rate.
Proceedings ArticleDOI
Adsorption of volatile organic compounds inside a nanoporous silica waveguide
Nirmalay Barua,William T. Winter,S. Mcauley,Paul T. Clarkson,Joshua Prestage,Andrew Salmon,Tanya Hutter +6 more
TL;DR: In this paper , a novel approach for measuring adsorption in situ that uses a nanoporous silica waveguide and near-infrared spectroscopy for selective measurement of adsorbed compounds is presented.
Journal ArticleDOI
Spectral comparison of nanoporous silica-adsorbed organic molecules with gaseous and liquid states using a new waveguide technology
Nirmalay Barua,William T. Winter,S. Mcauley,Joshua Prestage,Andrew Salmon,Paul T. Clackson,Hye-Jeong Lee,Tse-Ang Lee,Yixian Wang,Tanya Hutter +9 more
TL;DR: In this article , the authors used near-infrared spectroscopy to measure spectra of volatile organic compounds (VOCs) adsorbed inside a nanoporous silica waveguide and compare to the spectral features of the VOCs' gas and liquid phase spectra.