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S

S. Ramanathan

Researcher at Indian Institute of Technology Madras

Publications -  36
Citations -  1655

S. Ramanathan is an academic researcher from Indian Institute of Technology Madras. The author has contributed to research in topics: Chemical-mechanical planarization & Copper. The author has an hindex of 17, co-authored 35 publications receiving 1316 citations.

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Microwave food processing—A review

TL;DR: In this paper, various applications of microwave food processing such as microwave cooking, microwave pasteurization and microwave assisted drying were extensively reviewed and the advantages and the factors affecting the microwave cooking of food materials have been reviewed.
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Microwave material processing—a review

TL;DR: In this article, a review on microwave heating and their interaction with materials for various applications in a comprehensive manner has been presented and some of the unresolved problems are identified and directions for further research are also suggested.
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Experimental and theoretical investigation on microwave melting of metals

TL;DR: Experiments were conducted for microwave heating and melting of lead, tin, aluminium and copper with the aid of susceptors and detailed results were presented for various microwave power levels and sample loading.
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Chemical mechanical planarization of copper in alkaline slurry with uric acid as inhibitor

TL;DR: In this article, chemical mechanical planarization of copper disks in hydrogen peroxide and l -arginine based alkaline slurry was investigated and the results indicate that it is possible to conduct a robust copper CMP with alkaline slurries while maintaining an excellent Cu/silicon dioxide polish rate selectivity.
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Characterization of TMAH based cleaning solution for post Cu-CMP application

TL;DR: In this paper, a tetra methyl ammonium hydroxide (TMAH) was used as the cleaning agent and arginine as the chelating agent to remove BTA and silica particles from the copper surface.