Author
S. Ramanathan
Bio: S. Ramanathan is an academic researcher from Indian Institute of Technology Madras. The author has contributed to research in topics: Chemical-mechanical planarization & Copper. The author has an hindex of 17, co-authored 35 publications receiving 1316 citations.
Papers
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TL;DR: In this article, chemical mechanical polishing of copper in nitric acid based slurry, with hydrazine as inhibitor was investigated, and it was shown that the polish rate and static etch rate decreased with the addition of hydrazines.
13 citations
TL;DR: In this article, the response of an electrochemical reacting system to potential perturbations during electrochemical impedance spectrum measurement is investigated using numerical simulation, and the results illustrate the importance of validating the impedance data with KKT before further analysis.
11 citations
11 citations
TL;DR: In this article, the effect of downward pressure, rotational speed of the turntable as well as the ceria abrasive loading on the selectivity of a shallow trench isolation chemical mechanical polishing slurries was investigated over a pH range.
11 citations
TL;DR: In this article, electrical equivalent circuit (EEC) and reaction mechanism analysis (RMA) were employed to determine the mechanistic reaction pathway of Cu dissolution in NH4OH-hydrogen peroxide system.
Abstract: Chemical mechanical polishing (CMP) of copper in ammonium hydroxide based slurry in the presence of hydrogen peroxide was investigated. The polishing trend was found to be similar to that exhibited by other slurries containing hydrogen peroxide and various complexing agents used for Cu CMP. When the hydrogen peroxide concentration is increased, the polish rate increases, reaches a maximum and then decreases. The location and the magnitude of the maximum depend on the ammonium hydroxide concentration. The dissolution of copper in the NH4OH–hydrogen peroxide solution was probed by potentiodynamic polarization and electrochemical impedance spectroscopy (EIS) experiments. Electrical equivalent circuit (EEC) and reaction mechanism analysis (RMA) were employed to determine the mechanistic reaction pathway of Cu dissolution in NH4OH–hydrogen peroxide system. Based on the RMA analysis, a four step catalytic mechanism with two adsorbed intermediate species is proposed.
8 citations
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TL;DR: This critical review focuses on developments in the Sonogashira reaction achieved in recent years concerning catalysts, reaction conditions and substrates.
Abstract: The coupling of aryl or vinyl halides with terminal acetylenes catalysed by palladium and other transition metals, commonly termed as Sonogashira cross-coupling reaction, is one of the most important and widely used sp2–sp carbon–carbon bond formation reactions in organic synthesis, frequently employed in the synthesis of natural products, biologically active molecules, heterocycles, molecular electronics, dendrimers and conjugated polymers or nanostructures. This critical review focuses on developments in the Sonogashira reaction achieved in recent years concerning catalysts, reaction conditions and substrates (352 references).
1,246 citations
TL;DR: In this paper, various applications of microwave food processing such as microwave cooking, microwave pasteurization and microwave assisted drying were extensively reviewed and the advantages and the factors affecting the microwave cooking of food materials have been reviewed.
673 citations
TL;DR: In this paper, most of the significant phenomena that cause heating during microwave-material interaction and heat transfer during microwave energy absorption in materials are discussed. But, the mechanisms associated with the processing are less understood; popular mechanisms such as dipolar heating and conduction heating have been mostly explored.
Abstract: Efforts to use microwaves in material processing are gradually increasing. However, the phenomena associated with the processing are less understood; popular mechanisms such as dipolar heating and conduction heating have been mostly explored. The current paper reviews most of the significant phenomena that cause heating during microwave–material interaction and heat transfer during microwave energy absorption in materials. Mechanisms involved during interaction of microwave with characteristically different materials – metals, non-metals and composites (metal matrix composites, ceramic matrix composites and polymer matrix composites) have been discussed using suitable illustrations. It was observed that while microwave heating of metal based materials is due to the magnetic field based loss effects, dipolar loss and conduction loss are the phenomena associated with the electric field effects in microwave heating of non-metals. Challenges in processing of advanced materials, particularly composites have been identified from the available literature; further research directions with possible benefits have been highlighted.
502 citations
TL;DR: The special interaction mechanisms between microwave and metal-based materials are attracting increasing interest for a variety of metallurgical, plasma and discharge applications, and therefore are reviewed particularly regarding the aspects of the reflection, heating and discharge effects.
Abstract: Microwave heating is rapidly emerging as an effective and efficient tool in various technological and scientific fields. A comprehensive understanding of the fundamentals of microwave-matter interactions is the precondition for better utilization of microwave technology. However, microwave heating is usually only known as dielectric heating, and the contribution of the magnetic field component of microwaves is often ignored, which, in fact, contributes greatly to microwave heating of some aqueous electrolyte solutions, magnetic dielectric materials and certain conductive powder materials, etc. This paper focuses on this point and presents a careful review of microwave heating mechanisms in a comprehensive manner. Moreover, in addition to the acknowledged conventional microwave heating mechanisms, the special interaction mechanisms between microwave and metal-based materials are attracting increasing interest for a variety of metallurgical, plasma and discharge applications, and therefore are reviewed particularly regarding the aspects of the reflection, heating and discharge effects. Finally, several distinct strategies to improve microwave energy utilization efficiencies are proposed and discussed with the aim of tackling the energy-efficiency-related issues arising from the application of microwave heating. This work can present a strategic guideline for the developed understanding and utilization of the microwave heating technology.
393 citations
TL;DR: In this article, the performance data of metal oxide thin film electrodes by microwave-assisted as an inexpensive, quick and versatile technique is presented for supercapacitor performance data, and metal oxide films will continue to play a major role in supercapACitor technology and are expected to considerably increase the capabilities of these devices in near future.
355 citations