Bio: S.X.P. Su is an academic researcher. The author has contributed to research in topic(s): Surface micromachining & Amplification factor. The author has an hindex of 1, co-authored 1 publication(s) receiving 133 citation(s).
14 Nov 2005-IEEE Sensors Journal
TL;DR: In this article, a push-pull differential resonant accelerometer with double-ended-tuning-fork (DETF) as the inertial force sensor was designed and tested.
Abstract: We present the design, fabrication, and testing of a push-pull differential resonant accelerometer with double-ended-tuning-fork (DETF) as the inertial force sensor. The accelerometer is fabricated with the silicon-on-insulator microelectromechanical systems (MEMS) technology that bridges surface micromachining and bulk micromachining by integrating the 50-/spl mu/m-thick high-aspect ratio MEMS structure with the standard circuit foundry process. Two DETF resonators serve as the force sensor measuring the acceleration through a frequency shift caused by the inertial force acting as axial loading. Two-stage microleverage mechanisms with an amplification factor of 80 are designed for force amplification to increase the overall sensitivity to 160 Hz/g, which is confirmed by the experimental value of 158 Hz/g. Trans-resistance amplifiers are designed and integrated on the same chip for output signal amplification and processing. The 50-/spl mu/m thickness of the high-aspect ratio MEMS structure has no effect on the amplification factor of the mechanism but contributes to a greater capacitance force; therefore, the resonator can be actuated by a much lower ac voltage comparing to the 2-/spl mu/m-thick DETF resonators. The testing results agree with the designed sensitivity for static acceleration.
TL;DR: In this article, a micromachined uniaxial silicon resonant accelerometer characterized by a high sensitivity and very small dimensions is presented, which is based on the frequency variations of two resonating beams coupled to a proof mass.
Abstract: A new micromachined uniaxial silicon resonant accelerometer characterized by a high sensitivity and very small dimensions is presented. The device's working principle is based on the frequency variations of two resonating beams coupled to a proof mass. Under an external acceleration, the movement of the proof mass causes an axial load on the beams, generating opposite stiffness variations, which, in turn, result in a differential separation of their resonance frequencies. A high level of sensitivity is obtained, owing to an innovative and optimized geometrical design of the device that guarantees a great amplification of the axial loads. The acceleration measure is obtained, owing to a properly designed oscillating circuit. In agreement with the theoretical prediction, the experimental results show a sensitivity of 455 Hz/ ( g being the gravity acceleration) with a resonant frequency of about 58 kHz and a good linearity in the range of interest.
TL;DR: In this article, the authors review a recent technology development based on coupled MEMS resonators that has the potential of fundamentally transforming MEMS Resonant sensors, including the mode localization effect.
Abstract: In this paper, we review a recent technology development based on coupled MEMS resonators that has the potential of fundamentally transforming MEMS resonant sensors. Conventionally MEMS resonant sensors use only a single resonator as the sensing element, and the output of the sensor is typically a frequency shift caused by the external stimulus altering the mechanical properties, i.e. the mass or stiffness, of the resonator. Recently, transduction techniques utilizing additional coupled resonators have emerged. The mode-localized resonant sensor is one example of such a technique. If the mode localization effect is utilized, the vibrational amplitude pattern of the resonators changes as a function of the quantity to be measured. Compared to using frequency shift as an output signal, the sensitivity can be improved by several orders of magnitude. Another feature of the mode-localized sensors is the common mode rejection abilities due to the differential structure. These advantages have opened doors for new sensors with unprecedented sensitivity.
01 Mar 2010
TL;DR: In this paper, the authors describe the development of the MEMS sensor design and performance with a specific emphasis on the performance drivers and predictions of the future applications of the various sensor technologies.
Abstract: : For many navigation applications, improved accuracy/performance is not necessarily the most important issue, but meeting performance at reduced cost and size is In particular, small navigation sensor size allows the introduction of guidance, navigation, and control into applications previously considered out of reach (eg, artillery shells, guided bullets) Three major technologies have enabled advances in military and commercial capabilities: Ring Laser Gyros, Fiber Optic Gyros, and Micro-Electro-Mechanical Systems (MEMS) gyros and accelerometers RLGs and FOGs are now mature technologies, although there are still technology advances underway for FOGs MEMS is still a very active development area Technology developments in these fields are described with specific emphasis on MEMS sensor design and performance Some aspects of performance drivers are mentioned as they relate to specific sensors Finally, predictions are made of the future applications of the various sensor technologies
TL;DR: In this paper, an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization was reported. But the proposed mode localization with the differential perturbation method leads to a sensitivity enhancement of a factor of 2 than the common single perturbations method.
Abstract: This paper reports an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on the proof masses, differential electrostatic stiffness perturbations will be applied to the WCRs, leading to mode localization, and thus, mode shape changes. Therefore, acceleration can be sensed by measuring the amplitude ratio shift. The proposed mode localization with the differential perturbation method leads to a sensitivity enhancement of a factor of 2 than the common single perturbation method. The theoretical model of the sensitivity, bandwidth, and linearity of the accelerometer is established and verified. The measured relative shift in amplitude ratio ( $\sim 312162$ ppm/g) is 302 times higher than the shift in resonance frequency ( $\sim 1035$ ppm/g) within the measurement range of ±1 g. The measured resolution based on the amplitude ratio is 0.619 mg and the nonlinearity is $\sim 3.5$ % in the open-loop measurement operation. [2015-0247]
••07 Nov 2010
TL;DR: In this paper, the authors provide an overview of microfluidic biochips and describe emerging computer-aided design tools for the automated synthesis and optimization of bio-chips, from physical modeling to fluidic-level synthesis and then to chip-level design.
Abstract: Advances in droplet-based digital microfluidics have led to the emergence of biochips for automating laboratory procedures in biochemistry and molecular biology. These devices enable the precise control of microliter of nanoliter volumes of biochemical samples and reagents. They combine electronics with biology, and integrate various bioassay operations, such as sample preparation, analysis, separation, and detection. Compared to conventional laboratory procedures, which are cumbersome and expensive, miniaturized digital microfluidic biochips (DMFBs) offer the advantages of higher sensitivity, lower cost, system integration, and less likelihood of human error. This tutorial paper provides an overview of DMFBs and describes emerging computer-aided design (CAD) tools for the automated synthesis and optimization of biochips, from physical modeling to fluidic-level synthesis and then to chip-level design. By efficiently utilizing the electronic design automation (EDA) technique on emerging CAD tools, users can concentrate on the development of nanoscale bioas-says, leaving chip optimization and implementation details to design-automation tools.