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Shinichi Takagi

Bio: Shinichi Takagi is an academic researcher from University of Tokyo. The author has contributed to research in topics: Electron mobility & MOSFET. The author has an hindex of 61, co-authored 651 publications receiving 16363 citations. Previous affiliations of Shinichi Takagi include National Institute of Advanced Industrial Science and Technology & Stanford University.


Papers
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Journal ArticleDOI
TL;DR: In this paper, the inversion layer mobility in n-and p-channel Si MOSFETs with a wide range of substrate impurity concentrations (10/sup 15/ to 10/sup 18/ cm/sup -3/) was examined.
Abstract: This paper reports the studies of the inversion layer mobility in n- and p-channel Si MOSFET's with a wide range of substrate impurity concentrations (10/sup 15/ to 10/sup 18/ cm/sup -3/). The validity and limitations of the universal relationship between the inversion layer mobility and the effective normal field (E/sub eff/) are examined. It is found that the universality of both the electron and hole mobilities does hold up to 10/sup 18/ cm/sup -3/. The E/sub eff/ dependences of the universal curves are observed to differ between electrons and holes, particularly at lower temperatures. This result means a different influence of surface roughness scattering on the electron and hole transports. On substrates with higher impurity concentrations, the electron and hole mobilities significantly deviate from the universal curves at lower surface carrier concentrations because of Coulomb scattering by the substrate impurity. Also, the deviation caused by the charged centers at the Si/SiO/sub 2/ interface is observed in the mobility of MOSFET's degraded by Fowler-Nordheim electron injection. >

1,389 citations

Journal ArticleDOI
TL;DR: In this paper, the authors investigated the phonon-limited mobility of strained Si metal-oxide-semiconductor field effect transistors (MOSFETs) through theoretical calculations including two-dimensional quantization.
Abstract: The phonon‐limited mobility of strained Si metal–oxide–semiconductor field‐effect transistors (MOSFETs) fabricated on a SiGe substrate is investigated through theoretical calculations including two‐dimensional quantization, and compared with the mobility of conventional (unstrained) Si MOSFETs. In order to match both the mobility of unstrained Si MOSFETs and the mobility enhancement in strained Si MOSFETs, it is necessary to increase the coupling of electrons in the two‐dimensional gas with intervalley phonons, compared to the values used in conventional models. The mobility enhancement associated with strain in Si is attributed to the following two factors: the suppression of intervalley phonon scattering due to the strain‐induced band splitting, and the decrease in the occupancy of the fourfold valleys which exhibit a lower mobility due to the stronger interaction with intervalley phonons. While the decrease in the averaged conductivity mass, caused by the decrease in the occupancy of the fourfold valle...

454 citations

Journal ArticleDOI
TL;DR: In this paper, the inversion layer mobilities in n-channel MOSFET's fabricated on Si wafers with three surface orientations were investigated from the viewpoint of the universal relationship against the effective field.
Abstract: For part I see ibid., vol.41, no.12, pp.2357-62 (1994). This paper reports the studies of the inversion layer mobilities in n-channel MOSFET's fabricated on Si wafers with three surface orientations ([100], [110], and [111]) from the viewpoint of the universal relationship against the effective field, E/sub eff/(=q(N/sub dpl/+/spl eta//spl middot/N/sub s/)//spl epsi/Si). It is found that the universality does hold for the electron mobilities on [110] and [111], when the value of /spl eta/ is taken to be 1/3, different from the electron mobility on [100], where /spl eta/ is 1/2. Also, the E/sub eff/ dependence of the electron mobility is found to differ among [100], [110], and [111] surfaces. This is attributed to the differences in the E/sub eff/ dependence of the mobility limited by surface roughness scattering among the orientations. The origins of E/sub eff/ and /spl eta/ are discussed on the basis of the relaxation time approximation for a 2DEG (2-dimensional electron gas). While the surface orientation dependence of /spl eta/ in phonon scattering can be understood in terms of the subband occupation, it is found that the theoretical formulation of surface roughness scattering, used currently, needs to be refined in order to explain the differences in E/sub eff/ dependence and the value of /spl eta/ among the three orientations. >

340 citations

Journal ArticleDOI
TL;DR: In this article, the authors reviewed the recent approaches in realizing carrier-transport-enhanced CMOS, and the critical issues, fabrication techniques, and device performance of MOSFETs using three types of channel materials, Si (SiGe) with uniaxial strain, Ge-on-insulator (GOI), and III-V semiconductors, are presented.
Abstract: An effective way to reduce supply voltage and resulting power consumption without losing the circuit performance of CMOS is to use CMOS structures using high carrier mobility/velocity. In this paper, our recent approaches in realizing these carrier-transport-enhanced CMOS will be reviewed. First, the basic concept on the choice of channels for increasing on current of MOSFETs, the effective-mass engineering, is introduced from the viewpoint of both carrier velocity and surface carrier concentration under a given gate voltage. Based on this understanding, critical issues, fabrication techniques, and the device performance of MOSFETs using three types of channel materials, Si (SiGe) with uniaxial strain, Ge-on-insulator (GOI), and III-V semiconductors, are presented. As for the strained devices, the importance of uniaxial strain, as well as the combination with multigate structures, is addressed. A novel subband engineering for electrons on (110) surfaces is also introduced. As for GOI MOSFETs, the versatility of the Ge condensation technique for fabricating a variety of Ge-based devices is emphasized. In addition, as for III-V semiconductor MOSFETs, advantages and disadvantages on low effective mass are examined through simple theoretical calculations.

337 citations

Journal ArticleDOI
TL;DR: In this article, a promising fabrication method for a Si1−xGex-on-insulator (SGOI) virtual substrate and evaluation of strain in the Si layer on this SGOI substrate are presented.
Abstract: A promising fabrication method for a Si1−xGex-on-insulator (SGOI) virtual substrate and evaluation of strain in the Si layer on this SGOI substrate are presented. A 9-nm-thick SGOI layer with x=0.56 was formed by dry oxidation after epitaxial growth of Si0.92Ge0.08 on a silicon-on-insulator substrate. During the oxidation, Ge atoms were rejected from the surface oxide layer and condensed in the remaining SGOI layer, which was partially relaxed without introducing a significant amount of dislocations. It is found from the analysis of the Raman spectra that the strained Si layer grown on the SGOI layer involves a tensile strain of 1%. This strained Si on the SGOI structure is applicable to sub-100-nm metal–oxide–semiconductor field-effect transistors.

307 citations


Cited by
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Journal ArticleDOI
Jingsi Qiao1, Xianghua Kong1, Zhixin Hu1, Feng Yang1, Wei Ji1 
TL;DR: A detailed theoretical investigation of the atomic and electronic structure of few-layer black phosphorus (BP) is presented to predict its electrical and optical properties, finding that the mobilities are hole-dominated, rather high and highly anisotropic.
Abstract: Two-dimensional crystals are emerging materials for nanoelectronics. Development of the field requires candidate systems with both a high carrier mobility and, in contrast to graphene, a sufficiently large electronic bandgap. Here we present a detailed theoretical investigation of the atomic and electronic structure of few-layer black phosphorus (BP) to predict its electrical and optical properties. This system has a direct bandgap, tunable from 1.51 eV for a monolayer to 0.59 eV for a five-layer sample. We predict that the mobilities are hole-dominated, rather high and highly anisotropic. The monolayer is exceptional in having an extremely high hole mobility (of order 10,000 cm(2) V(-1) s(-1)) and anomalous elastic properties which reverse the anisotropy. Light absorption spectra indicate linear dichroism between perpendicular in-plane directions, which allows optical determination of the crystalline orientation and optical activation of the anisotropic transport properties. These results make few-layer BP a promising candidate for future electronics.

3,622 citations

Book
Yuan Taur1, Tak H. Ning1
01 Jan 2016
TL;DR: In this article, the authors highlight the intricate interdependencies and subtle tradeoffs between various practically important device parameters, and also provide an in-depth discussion of device scaling and scaling limits of CMOS and bipolar devices.
Abstract: Learn the basic properties and designs of modern VLSI devices, as well as the factors affecting performance, with this thoroughly updated second edition. The first edition has been widely adopted as a standard textbook in microelectronics in many major US universities and worldwide. The internationally-renowned authors highlight the intricate interdependencies and subtle tradeoffs between various practically important device parameters, and also provide an in-depth discussion of device scaling and scaling limits of CMOS and bipolar devices. Equations and parameters provided are checked continuously against the reality of silicon data, making the book equally useful in practical transistor design and in the classroom. Every chapter has been updated to include the latest developments, such as MOSFET scale length theory, high-field transport model, and SiGe-base bipolar devices.

2,680 citations

Journal ArticleDOI
TL;DR: A review of electronic devices based on two-dimensional materials, outlining their potential as a technological option beyond scaled complementary metal-oxide-semiconductor switches and the performance limits and advantages, when exploited for both digital and analog applications.
Abstract: The compelling demand for higher performance and lower power consumption in electronic systems is the main driving force of the electronics industry's quest for devices and/or architectures based on new materials. Here, we provide a review of electronic devices based on two-dimensional materials, outlining their potential as a technological option beyond scaled complementary metal-oxide-semiconductor switches. We focus on the performance limits and advantages of these materials and associated technologies, when exploited for both digital and analog applications, focusing on the main figures of merit needed to meet industry requirements. We also discuss the use of two-dimensional materials as an enabling factor for flexible electronics and provide our perspectives on future developments.

2,531 citations

PatentDOI
06 Apr 2012-Science
TL;DR: In this article, the authors present stretchable and printable semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed, or otherwise deformed.
Abstract: The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

1,673 citations

Journal ArticleDOI
TL;DR: With the discovery of hexagonal boron nitride as an ideal dielectric, the materials are now in place to advance integrated flexible nanoelectronics, which uniquely take advantage of the unmatched portfolio of properties of two-dimensional crystals, beyond the capability of conventional thin films for ubiquitous flexible systems.
Abstract: The unique electrical, mechanical and physical properties of two-dimensional materials make them attractive candidates in flexible nanoelectronic systems. Here Akinwande et al. review the literature on two-dimensional materials in flexible nanoelectronics, and highlight barriers to their full implementation.

1,575 citations