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Siddheswar Maikap

Bio: Siddheswar Maikap is an academic researcher from Chang Gung University. The author has contributed to research in topics: Resistive random-access memory & Non-volatile memory. The author has an hindex of 28, co-authored 170 publications receiving 2788 citations. Previous affiliations of Siddheswar Maikap include Seoul National University & National Taiwan University.


Papers
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Journal ArticleDOI
TL;DR: This study investigates the switching mode, mechanism, and performance of low-current operated TaOx-based devices as compared to other RRAM devices and encourages researcher to overcome the challenges in the future production.
Abstract: Resistive switching memories (RRAMs) are attractive for replacement of conventional flash in the future. Although different switching materials have been reported; however, low-current operated devices (<100 μA) are necessary for productive RRAM applications. Therefore, TaOx is one of the prospective switching materials because of two stable phases of TaO2 and Ta2O5, which can also control the stable low- and high-resistance states. Long program/erase endurance and data retention at high temperature under low-current operation are also reported in published literature. So far, bilayered TaOx with inert electrodes (Pt and/or Ir) or single layer TaOx with semi-reactive electrodes (W and Ti/W or Ta/Pt) is proposed for real RRAM applications. It is found that the memory characteristics at current compliance (CC) of 80 μA is acceptable for real application; however, data are becoming worst at CC of 10 μA. Therefore, it is very challenging to reduce the operation current (few microampere) of the RRAM devices. This study investigates the switching mode, mechanism, and performance of low-current operated TaOx-based devices as compared to other RRAM devices. This topical review will not only help for application of TaOx-based nanoscale RRAM devices but also encourage researcher to overcome the challenges in the future production.

172 citations

Journal ArticleDOI
TL;DR: In this paper, a nonstoichiometric hafnium oxide (HfOx) resistive-switching memory with low power operation has been demonstrated, where polycrystalline HfOx (O:Hf=1.5:1) films with a thickness of 20 nm are grown on a titanium nitride (TiN) bottom electrode by commercial atomic layer deposition.
Abstract: Nonstoichiometric hafnium oxide (HfOx) resistive-switching memory devices with low-power operation have been demonstrated. Polycrystalline HfOx (O:Hf=1.5:1) films with a thickness of 20 nm are grown on a titanium nitride (TiN) bottom electrode by commercial atomic layer deposition. Platinum (Pt) as a top electrode is used in the memory device. Voltage-induced resistance switching is repeatedly observed in the Pt/HfOx/TiN/Si memory device with resistance ratio is greater than 10. During the switching cycles, the power consumptions for high- and low-resistance states are found to be 0.25 and 0.15 mW, respectively. At 85 °C, the memory device shows stable resistance switching and superior data retention with resistance ratio is greater than 100. In addition, our memory device shows little area dependence of resistance-switching behavior. The anodic electrode containing noble metal Pt serves an important role in maintaining stable resistance switching. The resistance switching in the HfOx films is thought to be due to the defects that are generated by the applied bias. The nonstoichiometric HfOx films are responsible for the low SET and RESET currents during switching. Our study shows that the HfOx resistive-switching memory is a promising candidate for next-generation nonvolatile memory device applications.

172 citations

Journal ArticleDOI
TL;DR: In this article, the authors investigated the charge trapping characteristics of high-relative permittivity (high-?) HfO2 films with Al2O3 as a blocking oxide in p-Si/SiO2/HfO 2/Al 2O3/metal memory structures.
Abstract: Charge trapping characteristics of high-relative permittivity (high-?) HfO2 films with Al2O3 as a blocking oxide in p-Si/SiO2/HfO2/Al2O3/metal memory structures have been investigated. All high-? films have been grown by atomic layer deposition. A transmission electron microscope image shows that the HfO2 film is polycrystalline, while the Al2O3 film is partially crystalline after a high temperature annealing treatment at 1000 ?C for 10 s in N2 ambient. A well-behaved counter-clockwise capacitance?voltage hysteresis has been observed for all memory capacitors. A large memory window of ~7.4 V and a high charge trapping density of ~1.1 ? 1013 cm?2 have been observed for high-? HfO2 charge trapping memory capacitors. The memory window and charge trapping density can be increased with increasing thickness of the HfO2 film. The charge loss can be decreased using a thick trapping layer or thick tunnelling oxide. A high work function metal gate electrode shows low charge loss and large memory window after 10 years of retention. High-? HfO2 memory devices with high-? Al2O3 as a blocking oxide and a high work function metal gate can be used in future high-density non-volatile memory device applications.

125 citations

Journal ArticleDOI
TL;DR: In this paper, the size-dependent electrical and optical properties of group-IV semiconductors (Si and Ge), metal and high-k NCs for silicon planar technology compatible light-emitting and floating gate memory devices are discussed.
Abstract: Nanocrystals (NCs), representing a zero-dimensional system, are an ideal platform for exploring quantum phenomena on the nanoscale, and are expected to play a major role in future electronic and photonic devices. Here we review recent progress in the growth, characterization and utilization of some group-IV semiconductors (Si and Ge), metal and high-k NCs for silicon planar technology compatible light-emitting and floating gate memory devices. We first introduce the size-dependent electrical and optical properties of Si and Ge NCs. We outline some of the schemes to achieve light emission from indirect band gap Si and Ge NCs embedded in different high band gap oxide matrices. In particular, special emphasis is given on the review of the advances in Ge NCs because of some of their intriguing electronic and optical properties. We then describe the use of semiconductor and metal NCs as floating gates for non-volatile memory devices to achieve high data retention and faster program/erase speeds. The exploitation of high-k oxides with tunable and variable injection barriers for improved charge storage devices is discussed. Finally, the integration of single and multilayer metallic NCs and multilayer high-k oxides as floating gates is explored by the fabrication and testing of memory transistors.

113 citations

Journal ArticleDOI
TL;DR: This review of conductive-bridging random access memory shows that operation current should be optimized for few microamperes with a maintaining speed of few nanoseconds, which will have challenges and also opportunities for three-dimensional (3D) architecture.
Abstract: The performances of conductive-bridging random access memory (CBRAM) have been reviewed for different switching materials such as chalcogenides, oxides, and bilayers in different structures. The structure consists of an inert electrode and one oxidized electrode of copper (Cu) or silver (Ag). The switching mechanism is the formation/dissolution of a metallic filament in the switching materials under external bias. However, the growth dynamics of the metallic filament in different switching materials are still debated. All CBRAM devices are switching under an operation current of 0.1 μA to 1 mA, and an operation voltage of ±2 V is also needed. The device can reach a low current of 5 pA; however, current compliance-dependent reliability is a challenging issue. Although a chalcogenide-based material has opportunity to have better endurance as compared to an oxide-based material, data retention and integration with the complementary metal-oxide-semiconductor (CMOS) process are also issues. Devices with bilayer switching materials show better resistive switching characteristics as compared to those with a single switching layer, especially a program/erase endurance of >105 cycles with a high speed of few nanoseconds. Multi-level cell operation is possible, but the stability of the high resistance state is also an important reliability concern. These devices show a good data retention of >105 s at >85°C. However, more study is needed to achieve a 10-year guarantee of data retention for non-volatile memory application. The crossbar memory is benefited for high density with low power operation. Some CBRAM devices as a chip have been reported for proto-typical production. This review shows that operation current should be optimized for few microamperes with a maintaining speed of few nanoseconds, which will have challenges and also opportunities for three-dimensional (3D) architecture.

81 citations


Cited by
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PatentDOI
06 Apr 2012-Science
TL;DR: In this article, the authors present stretchable and printable semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed, or otherwise deformed.
Abstract: The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

1,673 citations

PatentDOI
TL;DR: In this article, the authors present methods, systems and system components for transferring, assembling and integrating features and arrays of features having selected nanosized and/or microsized physical dimensions, shapes and spatial orientations.
Abstract: The present invention provides methods, systems and system components for transferring, assembling and integrating features and arrays of features having selected nanosized and/or microsized physical dimensions, shapes and spatial orientations. Methods of the present invention utilize principles of ‘soft adhesion’ to guide the transfer, assembly and/or integration of features, such as printable semiconductor elements or other components of electronic devices. Methods of the present invention are useful for transferring features from a donor substrate to the transfer surface of an elastomeric transfer device and, optionally, from the transfer surface of an elastomeric transfer device to the receiving surface of a receiving substrate. The present methods and systems provide highly efficient, registered transfer of features and arrays of features, such as printable semiconductor element, in a concerted manner that maintains the relative spatial orientations of transferred features.

1,305 citations

Journal ArticleDOI
TL;DR: Puurunen et al. as discussed by the authors summarized the two-reactant ALD processes to grow inorganic materials developed to-date, updating the information of an earlier review on ALD.
Abstract: Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely suitable for depositing uniform and conformal films on complex three-dimensional topographies. The deposition of a film of a given material by ALD relies on the successive, separated, and self-terminating gas–solid reactions of typically two gaseous reactants. Hundreds of ALD chemistries have been found for depositing a variety of materials during the past decades, mostly for inorganic materials but lately also for organic and inorganic–organic hybrid compounds. One factor that often dictates the properties of ALD films in actual applications is the crystallinity of the grown film: Is the material amorphous or, if it is crystalline, which phase(s) is (are) present. In this thematic review, we first describe the basics of ALD, summarize the two-reactant ALD processes to grow inorganic materials developed to-date, updating the information of an earlier review on ALD [R. L. Puurunen, J. Appl. Phys. 97, 121301 (2005)], and give an overview of the status of processing ternary compounds by ALD. We then proceed to analyze the published experimental data for information on the crystallinity and phase of inorganic materials deposited by ALD from different reactants at different temperatures. The data are collected for films in their as-deposited state and tabulated for easy reference. Case studies are presented to illustrate the effect of different process parameters on crystallinity for representative materials: aluminium oxide, zirconium oxide, zinc oxide, titanium nitride, zinc zulfide, and ruthenium. Finally, we discuss the general trends in the development of film crystallinity as function of ALD process parameters. The authors hope that this review will help newcomers to ALD to familiarize themselves with the complex world of crystalline ALD films and, at the same time, serve for the expert as a handbook-type reference source on ALD processes and film crystallinity.

1,160 citations

Journal ArticleDOI
Feng Pan1, Song Gao1, Chao Chen1, Cheng Song1, Fei Zeng1 
TL;DR: A comprehensive review of the recent progress in the so-called resistive random access memories (RRAMs) can be found in this article, where a brief introduction is presented to describe the construction and development of RRAMs, their potential for broad applications in the fields of nonvolatile memory, unconventional computing and logic devices, and the focus of research concerning RRAMS over the past decade.
Abstract: This review article attempts to provide a comprehensive review of the recent progress in the so-called resistive random access memories (RRAMs) First, a brief introduction is presented to describe the construction and development of RRAMs, their potential for broad applications in the fields of nonvolatile memory, unconventional computing and logic devices, and the focus of research concerning RRAMs over the past decade Second, both inorganic and organic materials used in RRAMs are summarized, and their respective advantages and shortcomings are discussed Third, the important switching mechanisms are discussed in depth and are classified into ion migration, charge trapping/de-trapping, thermochemical reaction, exclusive mechanisms in inorganics, and exclusive mechanisms in organics Fourth, attention is given to the application of RRAMs for data storage, including their current performance, methods for performance enhancement, sneak-path issue and possible solutions, and demonstrations of 2-D and 3-D crossbar arrays Fifth, prospective applications of RRAMs in unconventional computing, as well as logic devices and multi-functionalization of RRAMs, are comprehensively summarized and thoroughly discussed The present review article ends with a short discussion concerning the challenges and future prospects of the RRAMs

1,129 citations

PatentDOI
16 Jun 2009-Nature
TL;DR: In this paper, a patterned layer of randomly oriented or partially aligned carbon nanotubes, such as one or more interconnected SWNT networks, is used to provide a semiconductor channel exhibiting improved electronic properties relative to conventional nanotube-based electronic systems.
Abstract: The present invention provides device components geometries and fabrication strategies for enhancing the electronic performance of electronic devices based on thin films of randomly oriented or partially aligned semiconducting nanotubes. In certain aspects, devices and methods of the present invention incorporate a patterned layer of randomly oriented or partially aligned carbon nanotubes, such as one or more interconnected SWNT networks, providing a semiconductor channel exhibiting improved electronic properties relative to conventional nanotubes-based electronic systems.

1,081 citations