Stacy H. Gleixner

Bio: Stacy H. Gleixner is an academic researcher from San Jose State University. The author has contributed to research in topics: Process (engineering) & Copper interconnect. The author has an hindex of 8, co-authored 31 publications receiving 183 citations.

Improvements to a microelectronic design and fabrication course

Abstract: This paper presents improvements made to a complimentary metal-oxide-semiconductor (CMOS) fabrication laboratory course to increase student learning and student impact (enrollment). The three main improvements to the course discussed include: 1) use of a two-mask MOS process that significantly reduced the time students took previously to design, fabricate, and verify the electrical properties of a metal-oxide-semiconductor field-effect transistor (MOSFET) process; 2) students' use of a semicustom integrated circuit (IC) design that significantly reduced the average design and processing time of previous years; and 3) development and implementation of a system of course prerequisites, which allowed a larger number of students to enroll in the course.

Teaching design of experiments and statistical analysis of data through laboratory experiments

Abstract: A new laboratory course at San Jose State University, Advanced Thin Film Processes, integrates fabrication of thin films with design of experiment and statistical analysis of data. In the laboratory section of this course, students work through six multi-week modules that increase in the complexity of design of experiment and statistical analysis of data. The six modules have been developed with a standard format that includes learning objectives, background on the specific thin film process, theory of design of experiment principles, instructor notes, dry lab exercises, experimental plan worksheets, and assessment tools. While the modules were developed for a semiconductor processing class, they can easily be implemented in other engineering classes. The modules have been developed with a robust framework that allows the instructor to teach design of experiments and statistical analysis of data along with the specific engineering principles related to their class.

EXCEED: Excellence in Your Engineering Education Summer Transition Program

Abstract: EXCEED: Excellence in Your Engineering Education is a ten day, residential summer transition program that was designed to improve retention and graduation rates at San Jose State University (SJSU). SJSU is a large, public institution in the West with a very diverse student population. However, the university has lower graduation and retention rates for certain student populations in engineering including underrepresented groups and first generation college students. This transition program was designed to meet five outcomes: acculturate the students to the College of Engineering and the university, enhance math and writing preparation, build community amongst the cohort of students, enhance study skills, and introduce engineering design principles and an exposure to the engineering field. These outcomes were chosen based on a literature review of student success and through focus groups with freshmen in our college. To meet the outcomes of the program, a set of twenty learning objectives were created. Then activities were designed to meet these learning objectives. Workshops on writing and math were included to better prepare students for the level of work needed in their first year classes. Resources in the university were highlighted to students through a “campus resource hunt” and through workshops with key university staff on topics including counseling, health services, time management, and career resources. Students were exposed to the engineering field through industry tours and guest lecturers. One key aspect of the program was that the incoming freshmen worked on a community based, service learning project. In the service learning project, students worked in small teams to build something for a local non-profit agency. These included an after school center, a community garden, a women and children’s shelter, and a food and clothing distribution center. The projects were designed to be relatively small projects that could be accomplished in ten days with no engineering or construction experience. The primary goal of the project was to teach the students the engineering design process. The steps included brainstorming, narrowing down their design options, communicating their design idea to the stakeholder, incorporating feedback into their design, managing the project, and working together as a team. This learning could be accomplished through a range of different project types. However, research has shown that using a community service project, known as service learning, has a number of benefits including increased motivation towards using engineering to better society and increased retention and graduation rates in engineering, particularly among women and under-represented groups. The program utilized peer mentors who worked closely with the students, with each peer mentor assigned to a small group of incoming students. One key role the peer mentors performed was teaching the incoming students strategies for student success including time management, working in groups, and study skills. Assessment of how well the program met the outcomes and specific learning objectives was conducted in an electronic survey following the program and follow-up focus groups towards the end of their first semester. Students indicate the program was successful in meeting all of the objectives, particularly familiarizing students with the University, building community, and introducing students to the engineering design process through the service learning project. Revisions of the math, writing, and study skills components are planned for the second pilot program to more closely integrate them with the engineering projects.

The Grain Size and Microstructure of Jet-Electroplated Damascene Copper Films

Abstract: Copper is rapidly replacing aluminum as an interconnect metal­ lization in ultralarge-scale integrated circuits (ULSIs) for better per­ formance and reliability. The methods of depositing copper include physical vapor deposition (PVD), chemical vapor deposition (CVD), and electroless and electrochemical deposition (ECD) plating tech­ niques. Additive-enhanced ECD has received the most attention as the method for filling interconnect structures due to its high deposition rate, low cost of tool ownership, the ability to fill deep submicrometer damascene features, and the low resistivity of the plated copper. Jet electrochemical deposition (JECD) is a plating technique that utilizes rapid cathode rotation in conjunction with the impinge­ ment of jets of solution to sustain higher current densities and better gap-filling performance than those achieved with conventional ECD methods. 11 A successful copper electroplating process for semiconductor onchip interconnects using a damascene materials system must consis­ tently produce defect-free, large-grained films with a high degree of (111) fiber crystallographic texture. Electroplated damascene copper films are typically deposited in the presence of organic brightening additives that are used in conjunction with other organic and inor­ ganic additives to promote the ‘‘bottom up’’ filling of fine intercon­ nect features. 1

The Design and Analysis of Experiments

Abstract: THE DESIGN AND ANALYSIS OF EXPERIMENTS. By Oscar Kempthorne. New York, John Wiley and Sons, Inc., 1952. 631 pp. $8.50. This book by a teacher of statistics (as well as a consultant for \"experimenters\") is a comprehensive study of the philosophical background for the statistical design of experiment. It is necessary to have some facility with algebraic notation and manipulation to be able to use the volume intelligently. The problems are presented from the theoretical point of view, without such practical examples as would be helpful for those not acquainted with mathematics. The mathematical justification for the techniques is given. As a somewhat advanced treatment of the design and analysis of experiments, this volume will be interesting and helpful for many who approach statistics theoretically as well as practically. With emphasis on the \"why,\" and with description given broadly, the author relates the subject matter to the general theory of statistics and to the general problem of experimental inference. MARGARET J. ROBERTSON

Colloidal nanocrystal synthesis and the organic-inorganic interface

Abstract: Colloidal nanocrystals are nanometer-sized, solution-grown inorganic particles stabilized by a layer of surfactants attached to their surface. The inorganic cores exhibit useful properties controlled by composition as well as size and shape, while the surfactant coating ensures that these structures are easy to fabricate and process. It is this combination of features that makes colloidal nanocrystals attractive and promising building blocks for advanced materials and devices. But their full potential can only be exploited if we achieve exquisite control over their composition, size, shape, crystal structure and surface properties. Here we review what is known about nanocrystal growth and outline strategies for controlling it.

Engaging and empowering first-year students through curriculum design: perspectives from the literature

Abstract: There is an increasing value being placed on engaging and empowering first-year students and first-year curriculum design is a key driver and opportunity to ensure early enculturation into successful learning at university. This paper summarises the literature on first-year curriculum design linked to student engagement and empowerment. We present conceptualisations of ‘curriculum’ and examples from first-year curriculum design. We also note the limited literature where students have been involved in designing first-year curricula. The results of the literature review suggest that key characteristics of engaging first-year curricula include active learning, timely feedback, relevance and challenge. The literature also points to the importance of identifying students' abilities on entry to university as well as being clear about desired graduate attributes and developmental goals. Acknowledging realities and constraints, we present a framework for the first-year curriculum design process based on the liter...