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Stephen J. Pearton

Bio: Stephen J. Pearton is an academic researcher from University of Florida. The author has contributed to research in topics: Dry etching & Etching (microfabrication). The author has an hindex of 104, co-authored 1913 publications receiving 58669 citations. Previous affiliations of Stephen J. Pearton include Kyungpook National University & University of Southern California.


Papers
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TL;DR: In this paper, two different kinds of high density plasma reactors are found to be effective for dry etching of Ni0.8Fe0.2 and Ni0.13Co0.07.
Abstract: Two different kinds of high density plasma reactors are found to be effective for dry etching of Ni0.8Fe0.2 and Ni0.8Fe0.13Co0.07. Using a Cl2/Ar plasma chemistry, electron cyclotron resonance and inductively coupled plasma system produce a factor of 2 higher etch rates than for pure Ar sputtering under the same conditions. The etch rates are a strong function of ion flux, ion energy, and plasma gas composition, all of which may be interpreted in terms of balancing formation of chloride etch products with efficient ion-assisted desorption of these products. Typical peak etch selectivities of ∼5 and ∼4, respectively, were obtained for NiFe over SiO2 and SiNx masks. Post-etch corrosion was also studied, and found to be strongly dependent on the conditioning of the reactor walls.

26 citations

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TL;DR: In this article, the collector current was approximately equal to the emitter current under all conditions, and the dc current gain was in the range 20−25 at room temperature at a power density of ∼50 kW/cm−2.
Abstract: AlGaN/GaN pnp heterojunction bipolar transistors were fabricated using a low-damage dry-etch process, and the dc characteristics measured up to 250 °C. In the common–base mode, the collector current was approximately equal to the emitter current under all conditions. Although not optimized for power operations, the devices were tested up to power densities of ∼50 kW cm−2. The dc current gain was in the range 20–25 at room temperature. The pnp configuration avoids the problem of high base sheet resistance encountered with npn-AlGaN/GaN devices.

26 citations

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TL;DR: In this article, the electrical properties of Au and Ag Schottky diodes prepared on epiready (0001)Zn surfaces of bulk n-ZnO crystals with electron concentration close to 1017 cm−3 were studied after various surface cleaning treatments.
Abstract: Electrical properties of Au and Ag Schottky diodes prepared on epiready (0001)Zn surfaces of bulk n-ZnO crystals with electron concentration close to 1017 cm−3 were studied after various surface cleaning treatments. The lowest reverse currents were obtained with simple cleaning of the surface in organic solvents while additional etching of the surface in concentrated HCl or HNO3 substantially increased the reverse current without giving any clear advantages in the ideality factor of the forward current–voltage characteristics or in the accuracy of capacitance–voltage characteristics and deep level spectra measurements. The properties of both the Au and the Ag Schottky diodes were seriously degraded by heating them in vacuum to temperatures higher than about 365 K but the mechanisms of degradation seem to be different for the two metals.

26 citations

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TL;DR: In this article, the effects of neutron transmutation doping were studied for undoped (residual donor concentrations <1015 cm−3) GaN films grown by metalorganic chemical vapor deposition.
Abstract: The effects of neutron transmutation doping were studied for undoped (residual donor concentrations <1015 cm−3) GaN films grown by metalorganic chemical vapor deposition After irradiation with reactor neutrons (equal fluences of 15×1017 n/cm2 of thermal and fast neutrons) the sample became semi-insulating, with the Fermi level pinned near Ec−08 eV Isochronal annealing from 100 to 1000 °C showed three stages—slight recovery of conductivity at 200–300 °C, reverse annealing at 300–500 °C, and a broad recovery stage from 600 to 1000 °C After annealing at 1000 °C, the donor concentration in the sample was close to the expected concentration of Ge donors transformed from Ga atoms upon interaction with thermal neutrons (2×1016 cm−3) Admittance spectroscopy showed that the donors had ionization energies ∼Ea=02 eV, much deeper than substitutional Ge donors For intermediate annealing temperatures of 800 °C the donors were deeper (Ea=047 eV), but the proximity of concentrations of all these different center

26 citations

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TL;DR: In this paper, the effects of hydrogen treatment on electrical properties, luminescence spectra, and deep traps in InGaAlP and InGaP have been studied, and it is shown that acceptors and donors (both shallow and deep) can be effectively passivated by hydrogen.
Abstract: The effects of hydrogen treatment on electrical properties, luminescence spectra, and deep traps in InGaAlP and InGaP have been studied. It is shown that acceptors and donors (both shallow and deep) can be effectively passivated by hydrogen. The hydrogen is found not only to passivate the main electron and hole traps in our samples, but also to generate electron traps in n‐InGaAlP and hole traps in p‐InGaP. The influence of hydrogen treatment mode (direct plasma or a crossed‐beams source in which the low‐energy ion bombardment of the surface is effectively eliminated) on hydrogen concentration and hydrogen profiles in InGaAlP are discussed.

26 citations


Cited by
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TL;DR: The semiconductor ZnO has gained substantial interest in the research community in part because of its large exciton binding energy (60meV) which could lead to lasing action based on exciton recombination even above room temperature.
Abstract: The semiconductor ZnO has gained substantial interest in the research community in part because of its large exciton binding energy (60meV) which could lead to lasing action based on exciton recombination even above room temperature. Even though research focusing on ZnO goes back many decades, the renewed interest is fueled by availability of high-quality substrates and reports of p-type conduction and ferromagnetic behavior when doped with transitions metals, both of which remain controversial. It is this renewed interest in ZnO which forms the basis of this review. As mentioned already, ZnO is not new to the semiconductor field, with studies of its lattice parameter dating back to 1935 by Bunn [Proc. Phys. Soc. London 47, 836 (1935)], studies of its vibrational properties with Raman scattering in 1966 by Damen et al. [Phys. Rev. 142, 570 (1966)], detailed optical studies in 1954 by Mollwo [Z. Angew. Phys. 6, 257 (1954)], and its growth by chemical-vapor transport in 1970 by Galli and Coker [Appl. Phys. ...

10,260 citations

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TL;DR: Spintronics, or spin electronics, involves the study of active control and manipulation of spin degrees of freedom in solid-state systems as discussed by the authors, where the primary focus is on the basic physical principles underlying the generation of carrier spin polarization, spin dynamics, and spin-polarized transport.
Abstract: Spintronics, or spin electronics, involves the study of active control and manipulation of spin degrees of freedom in solid-state systems. This article reviews the current status of this subject, including both recent advances and well-established results. The primary focus is on the basic physical principles underlying the generation of carrier spin polarization, spin dynamics, and spin-polarized transport in semiconductors and metals. Spin transport differs from charge transport in that spin is a nonconserved quantity in solids due to spin-orbit and hyperfine coupling. The authors discuss in detail spin decoherence mechanisms in metals and semiconductors. Various theories of spin injection and spin-polarized transport are applied to hybrid structures relevant to spin-based devices and fundamental studies of materials properties. Experimental work is reviewed with the emphasis on projected applications, in which external electric and magnetic fields and illumination by light will be used to control spin and charge dynamics to create new functionalities not feasible or ineffective with conventional electronics.

9,158 citations

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TL;DR: A critical review of the synthesis methods for graphene and its derivatives as well as their properties and the advantages of graphene-based composites in applications such as the Li-ion batteries, supercapacitors, fuel cells, photovoltaic devices, photocatalysis, and Raman enhancement are described.
Abstract: Graphene has attracted tremendous research interest in recent years, owing to its exceptional properties. The scaled-up and reliable production of graphene derivatives, such as graphene oxide (GO) and reduced graphene oxide (rGO), offers a wide range of possibilities to synthesize graphene-based functional materials for various applications. This critical review presents and discusses the current development of graphene-based composites. After introduction of the synthesis methods for graphene and its derivatives as well as their properties, we focus on the description of various methods to synthesize graphene-based composites, especially those with functional polymers and inorganic nanostructures. Particular emphasis is placed on strategies for the optimization of composite properties. Lastly, the advantages of graphene-based composites in applications such as the Li-ion batteries, supercapacitors, fuel cells, photovoltaic devices, photocatalysis, as well as Raman enhancement are described (279 references).

3,340 citations

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TL;DR: In this article, the status of zinc oxide as a semiconductor is discussed and the role of impurities and defects in the electrical conductivity of ZnO is discussed, as well as the possible causes of unintentional n-type conductivity.
Abstract: In the past ten years we have witnessed a revival of, and subsequent rapid expansion in, the research on zinc oxide (ZnO) as a semiconductor. Being initially considered as a substrate for GaN and related alloys, the availability of high-quality large bulk single crystals, the strong luminescence demonstrated in optically pumped lasers and the prospects of gaining control over its electrical conductivity have led a large number of groups to turn their research for electronic and photonic devices to ZnO in its own right. The high electron mobility, high thermal conductivity, wide and direct band gap and large exciton binding energy make ZnO suitable for a wide range of devices, including transparent thin-film transistors, photodetectors, light-emitting diodes and laser diodes that operate in the blue and ultraviolet region of the spectrum. In spite of the recent rapid developments, controlling the electrical conductivity of ZnO has remained a major challenge. While a number of research groups have reported achieving p-type ZnO, there are still problems concerning the reproducibility of the results and the stability of the p-type conductivity. Even the cause of the commonly observed unintentional n-type conductivity in as-grown ZnO is still under debate. One approach to address these issues consists of growing high-quality single crystalline bulk and thin films in which the concentrations of impurities and intrinsic defects are controlled. In this review we discuss the status of ZnO as a semiconductor. We first discuss the growth of bulk and epitaxial films, growth conditions and their influence on the incorporation of native defects and impurities. We then present the theory of doping and native defects in ZnO based on density-functional calculations, discussing the stability and electronic structure of native point defects and impurities and their influence on the electrical conductivity and optical properties of ZnO. We pay special attention to the possible causes of the unintentional n-type conductivity, emphasize the role of impurities, critically review the current status of p-type doping and address possible routes to controlling the electrical conductivity in ZnO. Finally, we discuss band-gap engineering using MgZnO and CdZnO alloys.

3,291 citations