scispace - formally typeset
Search or ask a question
Author

Stephen J. Pearton

Bio: Stephen J. Pearton is an academic researcher from University of Florida. The author has contributed to research in topics: Dry etching & Etching (microfabrication). The author has an hindex of 104, co-authored 1913 publications receiving 58669 citations. Previous affiliations of Stephen J. Pearton include Kyungpook National University & University of Southern California.


Papers
More filters
Journal ArticleDOI
TL;DR: In this article, the Schottky barrier height of GaAs was shown to increase with the growth of thin (50-100 A), C or Zn δ-doped layers on n-type GaAs.
Abstract: The growth of thin (50–100 A), C or Zn δ‐doped layers on n‐type GaAs is shown to yield large enhancements in the effective Schottky barrier height (ΦB) of TiPtAu contacts subsequently deposited on the material. The incorporation of a single C δ‐doped layer (p=1.5×1020 cm−3, 50 A wide) within 100 A of the surface leads to a barrier height of 0.93 eV, a significant increase over the value for a control sample (0.76 eV). The use of two sequential δ‐doped layers leads to an apparent barrier height in excess of the GaAs band gap (ΦB=1.67 eV). This appears to be consistent with the predictions of a unified defect model. Zinc δ doping (p∼3×1018 cm−3) in a similar fashion produces barrier heights of 0.81 eV for one spike and 0.95 eV for two spikes.

20 citations

Journal ArticleDOI
TL;DR: Tantalum nitride films were reactive sputter deposited onto chemical vapor deposited (CVD)diamond self-standing thick layers, to be used as resistors for microelectronic applications as mentioned in this paper.
Abstract: Tantalum nitride films were reactive sputter deposited onto chemical vapor deposited (CVD)‐diamond self‐standing thick layers, to be used as resistors for microelectronic applications. The TaN films had excellent morphology and were very stable through heating cycles at temperatures up to 400 °C for a few hours. Post‐deposition sintering of the films at temperatures up to 300 °C stabilized the film resistance at values in the range of 75–85 Ω. The deposited film was later patterned with photoresist and dry etched, at rates of up to 70 nm min−1 and the resulting features served as masks for further self‐aligned etching processes of the underlying CVD‐diamond layer.

20 citations

Journal ArticleDOI
TL;DR: In this article, the breakdown characteristics of metal-AlN-metal structures are reported as a function of contact diameter, and the results indicate the great promise of the Al(Ga)N system for high power rectifiers.
Abstract: The breakdown characteristics of metal-AlN-metal structures are reported as a function of contact diameter. The bulk AlN was grown by a HVPE method, resulting in a resistivity of 4×10 8 Ω cm. Front-side contact diameters of 175–600 μm were fabricated, displaying breakdown voltages up to ∼6300 V at 25 °C. Breakdown appeared to initiate at internal surfaces related to grain boundaries or cracks in the material. The results indicate the great promise of the Al(Ga)N system for high power rectifiers.

20 citations

Journal ArticleDOI
TL;DR: The conducting 2DEG channel of GaN/AlGaN high electron mobility transistor (HEMT) based sensors have been developed to analyze a wide variety of gases and biological agents for bio medical applications as mentioned in this paper.
Abstract: AlGaN/GaN high electron mobility transistor (HEMT) based sensors have been developed to analyze a wide variety of gases and biological agents for bio medical applications. The conducting 2DEG channel of GaN/AlGaN HEMTs is very close to the surface and extremely sensitive to adsorption of analytes. Examples of detecting breath cancer marker, carbon monoxide carbon dioxide, kidney injury molecule, and botulinum toxin are discussed in this paper.

20 citations

Journal ArticleDOI
TL;DR: In this article, the effects of 10MeV electron irradiation on AlGaN∕GaN and AlN√GaN heterojunctions grown by molecular beam epitaxy are reported.
Abstract: The effects of 10MeV electron irradiation on AlGaN∕GaN and AlN∕GaN heterojunctions grown by molecular beam epitaxy are reported. The irradiation increases the resistivity of the GaN buffer due to compensation by radiation defects with levels near Ec−1eV and decreases the mobility of the two-dimensional electron gas (2DEG) near the AlGaN∕GaN (or AlN∕GaN) interface. The bulk carrier removal rate in the GaN buffer is the same for both types of structures and similar to carrier removal rates for undoped n-GaN films. In structures with a density of residual donors of ∼1015cm−3, irradiation with electron doses of ∼5×1015cm−2 renders the buffer semi-insulating. The 50% degradation of the 2DEG conductivity happens at several times higher doses (close to 3×1016cm−2 versus 6.5×1015cm−2) for AlN∕GaN than for AlGaN∕GaN structures, most likely because of the lower thickness of the AlN barrier.

20 citations


Cited by
More filters
Journal ArticleDOI
TL;DR: The semiconductor ZnO has gained substantial interest in the research community in part because of its large exciton binding energy (60meV) which could lead to lasing action based on exciton recombination even above room temperature.
Abstract: The semiconductor ZnO has gained substantial interest in the research community in part because of its large exciton binding energy (60meV) which could lead to lasing action based on exciton recombination even above room temperature. Even though research focusing on ZnO goes back many decades, the renewed interest is fueled by availability of high-quality substrates and reports of p-type conduction and ferromagnetic behavior when doped with transitions metals, both of which remain controversial. It is this renewed interest in ZnO which forms the basis of this review. As mentioned already, ZnO is not new to the semiconductor field, with studies of its lattice parameter dating back to 1935 by Bunn [Proc. Phys. Soc. London 47, 836 (1935)], studies of its vibrational properties with Raman scattering in 1966 by Damen et al. [Phys. Rev. 142, 570 (1966)], detailed optical studies in 1954 by Mollwo [Z. Angew. Phys. 6, 257 (1954)], and its growth by chemical-vapor transport in 1970 by Galli and Coker [Appl. Phys. ...

10,260 citations

Journal ArticleDOI
TL;DR: Spintronics, or spin electronics, involves the study of active control and manipulation of spin degrees of freedom in solid-state systems as discussed by the authors, where the primary focus is on the basic physical principles underlying the generation of carrier spin polarization, spin dynamics, and spin-polarized transport.
Abstract: Spintronics, or spin electronics, involves the study of active control and manipulation of spin degrees of freedom in solid-state systems. This article reviews the current status of this subject, including both recent advances and well-established results. The primary focus is on the basic physical principles underlying the generation of carrier spin polarization, spin dynamics, and spin-polarized transport in semiconductors and metals. Spin transport differs from charge transport in that spin is a nonconserved quantity in solids due to spin-orbit and hyperfine coupling. The authors discuss in detail spin decoherence mechanisms in metals and semiconductors. Various theories of spin injection and spin-polarized transport are applied to hybrid structures relevant to spin-based devices and fundamental studies of materials properties. Experimental work is reviewed with the emphasis on projected applications, in which external electric and magnetic fields and illumination by light will be used to control spin and charge dynamics to create new functionalities not feasible or ineffective with conventional electronics.

9,158 citations

Journal ArticleDOI
TL;DR: A critical review of the synthesis methods for graphene and its derivatives as well as their properties and the advantages of graphene-based composites in applications such as the Li-ion batteries, supercapacitors, fuel cells, photovoltaic devices, photocatalysis, and Raman enhancement are described.
Abstract: Graphene has attracted tremendous research interest in recent years, owing to its exceptional properties. The scaled-up and reliable production of graphene derivatives, such as graphene oxide (GO) and reduced graphene oxide (rGO), offers a wide range of possibilities to synthesize graphene-based functional materials for various applications. This critical review presents and discusses the current development of graphene-based composites. After introduction of the synthesis methods for graphene and its derivatives as well as their properties, we focus on the description of various methods to synthesize graphene-based composites, especially those with functional polymers and inorganic nanostructures. Particular emphasis is placed on strategies for the optimization of composite properties. Lastly, the advantages of graphene-based composites in applications such as the Li-ion batteries, supercapacitors, fuel cells, photovoltaic devices, photocatalysis, as well as Raman enhancement are described (279 references).

3,340 citations

Journal ArticleDOI
TL;DR: In this article, the status of zinc oxide as a semiconductor is discussed and the role of impurities and defects in the electrical conductivity of ZnO is discussed, as well as the possible causes of unintentional n-type conductivity.
Abstract: In the past ten years we have witnessed a revival of, and subsequent rapid expansion in, the research on zinc oxide (ZnO) as a semiconductor. Being initially considered as a substrate for GaN and related alloys, the availability of high-quality large bulk single crystals, the strong luminescence demonstrated in optically pumped lasers and the prospects of gaining control over its electrical conductivity have led a large number of groups to turn their research for electronic and photonic devices to ZnO in its own right. The high electron mobility, high thermal conductivity, wide and direct band gap and large exciton binding energy make ZnO suitable for a wide range of devices, including transparent thin-film transistors, photodetectors, light-emitting diodes and laser diodes that operate in the blue and ultraviolet region of the spectrum. In spite of the recent rapid developments, controlling the electrical conductivity of ZnO has remained a major challenge. While a number of research groups have reported achieving p-type ZnO, there are still problems concerning the reproducibility of the results and the stability of the p-type conductivity. Even the cause of the commonly observed unintentional n-type conductivity in as-grown ZnO is still under debate. One approach to address these issues consists of growing high-quality single crystalline bulk and thin films in which the concentrations of impurities and intrinsic defects are controlled. In this review we discuss the status of ZnO as a semiconductor. We first discuss the growth of bulk and epitaxial films, growth conditions and their influence on the incorporation of native defects and impurities. We then present the theory of doping and native defects in ZnO based on density-functional calculations, discussing the stability and electronic structure of native point defects and impurities and their influence on the electrical conductivity and optical properties of ZnO. We pay special attention to the possible causes of the unintentional n-type conductivity, emphasize the role of impurities, critically review the current status of p-type doping and address possible routes to controlling the electrical conductivity in ZnO. Finally, we discuss band-gap engineering using MgZnO and CdZnO alloys.

3,291 citations