Stephen J. Pearton

Bio: Stephen J. Pearton is an academic researcher from University of Florida. The author has contributed to research in topics: Dry etching & Etching (microfabrication). The author has an hindex of 104, co-authored 1913 publications receiving 58669 citations. Previous affiliations of Stephen J. Pearton include Kyungpook National University & University of Southern California.

Attenuation losses in electron cyclotron resonance plasma etched AlGaAs waveguides

Abstract: AlGaAs GaAs ridge waveguides with fundamental mode attenuation ≤ 1 dBcm−1 at a wavelength of 1.32 μm and channel widths of 4–4.5 μm are realized by ECR (Electron Cyclotron Resonance) plasma etching in BCl3/Cl2/Ar/N2 chemistries. The choice of both plasma chemistry and initial mask scheme (single layer photoresist or trilevel resist) has a significant effect on the attenuation losses.

RF performance of HVPE-grown AlGaN/GaN HEMTs

Abstract: AlGaN/GaN high electron mobility transistors (HEMTs) were fabricated on structures grown by hydride vapor phase epitaxy (HVPE). A current gain cut-off frequency, f t , of 11.5 GHz and a maximum frequency of oscillation, f max , of 20.5 GHz were achieved for a 1 × 100 μm 2 device at a gate voltage of 0 V and drain voltage of 2 V. This rf performance is comparable to that obtained with MBE- or MOCVD-grown AlGaN/GaN HEMTs of the same dimension and indicates that HVPE can be competitive with these other growth methods for producing high speed nitride-based HEMTs.

Thermal stability of dry etch damage in SiC

Abstract: The introduction of dry etch damage into n‐type SiC has been measured by monitoring the sheet resistance after exposure to Ar plasmas under both reactive ion etching and electron cyclotron resonance conditions. The threshold rf powers for measurable resistance changes in 1 μm thick films are ∼250 W for reactive ion etching (RIE) conditions, and ∼150 W for electron cyclotron resonance (ECR) conditions. A major annealing stage occurs with an activation energy of ∼3.4 eV, but some damage remains even after 1050 °C annealing.

Improved thermally stable ohmic contacts on p-GaN based on W2B

Abstract: The annealing temperature (25–800 °C) dependence of ohmic contact characteristics on p-GaN using a W2B∕Ti∕Au metallization scheme deposited by sputtering are reported. The contacts are rectifying in the as-deposited condition but become ohmic for annealing at ⩾500°C. A minimum specific contact resistivity of 1.7×10−3Ωcm−2 was obtained after annealing at 800 °C for 60 s. Higher annealing temperatures produced sharp increases in the resistivity of the GaN and irreproducible contact properties. However, the contact morphology was similar over the entire annealing range used here. Auger electron spectroscopy profiling showed the onset of Ti out-diffusion through the Au at 500 °C. By 800 °C the Ti was almost completely removed to the surface, where it became oxidized. These boride-based contacts have superior thermal stability to the more common Ni∕Au, whose morphology degrades significantly above 500 °C.

Effect of temperature on CO detection sensitivity of ZnO nanorod-gated AlGaN/GaN high electron mobility transistors

Abstract: The carbon monoxide (CO) detection sensitivities of ZnO nanorod-gated AlGaN/GaN high electron mobility transistors were measured over a range of temperatures from 25–150 °C. Once the sensor was exposed to the CO-containing ambient, the drain current, I, of the high electron mobility transistors increased due to chemisorbed oxygen on the ZnO surface reacting with CO, forming CO2 and releasing electrons to the oxide surface. Although the sensor could detect CO as low as 100 ppm at room temperature, the detection sensitivity, ΔI/I, was only around 0.23%. By increasing the sensor temperature to 150 °C, the detection sensitivity was improved by a factor of over 30% to 7.5%.

A comprehensive review of zno materials and devices

Abstract: The semiconductor ZnO has gained substantial interest in the research community in part because of its large exciton binding energy (60meV) which could lead to lasing action based on exciton recombination even above room temperature. Even though research focusing on ZnO goes back many decades, the renewed interest is fueled by availability of high-quality substrates and reports of p-type conduction and ferromagnetic behavior when doped with transitions metals, both of which remain controversial. It is this renewed interest in ZnO which forms the basis of this review. As mentioned already, ZnO is not new to the semiconductor field, with studies of its lattice parameter dating back to 1935 by Bunn [Proc. Phys. Soc. London 47, 836 (1935)], studies of its vibrational properties with Raman scattering in 1966 by Damen et al. [Phys. Rev. 142, 570 (1966)], detailed optical studies in 1954 by Mollwo [Z. Angew. Phys. 6, 257 (1954)], and its growth by chemical-vapor transport in 1970 by Galli and Coker [Appl. Phys. ...

Spintronics: Fundamentals and applications

Abstract: Spintronics, or spin electronics, involves the study of active control and manipulation of spin degrees of freedom in solid-state systems. This article reviews the current status of this subject, including both recent advances and well-established results. The primary focus is on the basic physical principles underlying the generation of carrier spin polarization, spin dynamics, and spin-polarized transport in semiconductors and metals. Spin transport differs from charge transport in that spin is a nonconserved quantity in solids due to spin-orbit and hyperfine coupling. The authors discuss in detail spin decoherence mechanisms in metals and semiconductors. Various theories of spin injection and spin-polarized transport are applied to hybrid structures relevant to spin-based devices and fundamental studies of materials properties. Experimental work is reviewed with the emphasis on projected applications, in which external electric and magnetic fields and illumination by light will be used to control spin and charge dynamics to create new functionalities not feasible or ineffective with conventional electronics.

Graphene-based composites

Abstract: Graphene has attracted tremendous research interest in recent years, owing to its exceptional properties. The scaled-up and reliable production of graphene derivatives, such as graphene oxide (GO) and reduced graphene oxide (rGO), offers a wide range of possibilities to synthesize graphene-based functional materials for various applications. This critical review presents and discusses the current development of graphene-based composites. After introduction of the synthesis methods for graphene and its derivatives as well as their properties, we focus on the description of various methods to synthesize graphene-based composites, especially those with functional polymers and inorganic nanostructures. Particular emphasis is placed on strategies for the optimization of composite properties. Lastly, the advantages of graphene-based composites in applications such as the Li-ion batteries, supercapacitors, fuel cells, photovoltaic devices, photocatalysis, as well as Raman enhancement are described (279 references).

Fundamentals of zinc oxide as a semiconductor

Abstract: In the past ten years we have witnessed a revival of, and subsequent rapid expansion in, the research on zinc oxide (ZnO) as a semiconductor. Being initially considered as a substrate for GaN and related alloys, the availability of high-quality large bulk single crystals, the strong luminescence demonstrated in optically pumped lasers and the prospects of gaining control over its electrical conductivity have led a large number of groups to turn their research for electronic and photonic devices to ZnO in its own right. The high electron mobility, high thermal conductivity, wide and direct band gap and large exciton binding energy make ZnO suitable for a wide range of devices, including transparent thin-film transistors, photodetectors, light-emitting diodes and laser diodes that operate in the blue and ultraviolet region of the spectrum. In spite of the recent rapid developments, controlling the electrical conductivity of ZnO has remained a major challenge. While a number of research groups have reported achieving p-type ZnO, there are still problems concerning the reproducibility of the results and the stability of the p-type conductivity. Even the cause of the commonly observed unintentional n-type conductivity in as-grown ZnO is still under debate. One approach to address these issues consists of growing high-quality single crystalline bulk and thin films in which the concentrations of impurities and intrinsic defects are controlled. In this review we discuss the status of ZnO as a semiconductor. We first discuss the growth of bulk and epitaxial films, growth conditions and their influence on the incorporation of native defects and impurities. We then present the theory of doping and native defects in ZnO based on density-functional calculations, discussing the stability and electronic structure of native point defects and impurities and their influence on the electrical conductivity and optical properties of ZnO. We pay special attention to the possible causes of the unintentional n-type conductivity, emphasize the role of impurities, critically review the current status of p-type doping and address possible routes to controlling the electrical conductivity in ZnO. Finally, we discuss band-gap engineering using MgZnO and CdZnO alloys.