S
Stephen J. Pearton
Researcher at University of Florida
Publications - 1988
Citations - 62995
Stephen J. Pearton is an academic researcher from University of Florida. The author has contributed to research in topics: Dry etching & Etching (microfabrication). The author has an hindex of 104, co-authored 1913 publications receiving 58669 citations. Previous affiliations of Stephen J. Pearton include Kyungpook National University & University of Southern California.
Papers
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Journal ArticleDOI
Patterning of AlN, InN, and GaN in KOH‐based solutions
Jeffrey Mileham,Stephen J. Pearton,C. R. Abernathy,J. D. MacKenzie,Randy J. Shul,S.P. Kilcoyne +5 more
TL;DR: In this article, it was shown that KOH-based solutions provide reaction-rate limited etching of AlN at rates strongly dependent on the crystalline quality, and the activation energy for etching is 15.5 kcal/mol−1 for both polycrystalline and single-crystal AlN.
Journal ArticleDOI
Indication of hysteresis in AlMnN
TL;DR: In this article, high-resolution x-ray diffraction characterization revealed good crystallinity in single-phase AlMnN with lattice constant decreasing with increasing Mn concentration, and showed no evidence of room temperature magnetization in multiphase material.
Journal ArticleDOI
Influence of High-Energy Proton Irradiation on β-Ga2O3 Nanobelt Field-Effect Transistors
TL;DR: The radiation-induced damage in the β-Ga2O3-based FETs was significantly recovered after rapid thermal annealing at 500 °C, rendering it a promising building block for space applications.
BookDOI
GaN and ZnO-based materials and devices
TL;DR: In this article, the authors proposed an approach to enhance the light-extraction efficiency of GaN-based light-emitting diode (LED) based light emitting diodes.
Journal ArticleDOI
Gadolinium Oxide and Scandium Oxide: Gate Dielectrics for GaN MOSFETs
Brent P. Gila,Jerry W. Johnson,R. Mehandru,B. Luo,A. H. Onstine,V. Krishnamoorthy,S. Bates,C. R. Abernathy,Fan Ren,Stephen J. Pearton +9 more
TL;DR: Scandium oxide was deposited epitaxially on (0001) GaN via gas-source molecular beam epitaxy (GSMBE) using elemental Sc and an electron cyclotron resonance (ECR) oxygen plasma.