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Stephen J. Pearton

Bio: Stephen J. Pearton is an academic researcher from University of Florida. The author has contributed to research in topics: Dry etching & Etching (microfabrication). The author has an hindex of 104, co-authored 1913 publications receiving 58669 citations. Previous affiliations of Stephen J. Pearton include Kyungpook National University & University of Southern California.


Papers
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TL;DR: By monitoring photoluminescence (PL) in real time and in situ, hydrogen plasma operating conditions have been optimized for surface passivation of nativeoxide-contaminated GaAs.
Abstract: By monitoring photoluminescence (PL) in real time and in situ, hydrogen plasma operating conditions have been optimized for surface passivation of native-oxide-contaminated GaAs. PL enhancement is critically dependent on exposure time and pressure because of competition between plasma passivation and damage. Optimal exposure time and pressure are inversely related; thus, previous reports of ineffective passivation at room temperature result from overexposure at low pressure. Plasma treatment is effective in removing As to leave a Ga-rich oxide; removal of excess As increases the photoluminescence yield as the corresponding near-midgap-state density is reduced. Passivation is stable for more than a month. These results demonstrate the power of real time monitoring for optimizing plasma processing of optoelectronic materials.

50 citations

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TL;DR: In this article, the use of AlGaN∕GaN high electron mobility transistor (HEMT) differential sensing diodes is shown to provide robust detection of 1% H2 in air at 25°C.
Abstract: The use of AlGaN∕GaN high electron mobility transistor (HEMT) differential sensing diodes is shown to provide robust detection of 1% H2 in air at 25°C. The active device in the differential pair is coated with 10nm of Pt to enhance catalytic dissociation of molecular hydrogen, while the reference diode is coated with Ti∕Au. The active diode in the pair shows an increase in forward current of several milliamperes at a bias voltage of 2.5V when exposed to 1% H2 in air. The HEMT diodes show a response approximately twice that of GaN Schottky diodes, due to the presence of piezoelectric and spontaneous polarization in the heterostructure. The use of the differential pair removes false alarms due to ambient temperature variations.

49 citations

Journal ArticleDOI
TL;DR: In this article, the etch rates for both materials increased with increasing etch temperatures, which was varied from 20 to 80 C. The etch rate decreased approximately an order of magnitude at 80 C etch temperature after an 1,100 C anneal.
Abstract: Wet chemical etching of AlN and In{sub x}Al{sub 1{minus}x}N was investigated in KOH-based solutions as a function of etch temperature and material quality. The etch rates for both materials increased with increasing etch temperatures, which was varied from 20 to 80 C. The crystal quality of AlN prepared by reactive sputtering was improved by rapid thermal annealing at temperatures to 1,100 C, with a decreased wet etch rate of the material measured with increasing anneal temperature. The etch rate decreased approximately an order of magnitude at 80 C etch temperature after an 1,100 C anneal. The etch rate for In{sub 0.19}Al{sub 0.81}N grown by metallorganic molecular beam epitaxy was approximately three times higher for material on Si than on GaAs. This corresponds to the superior crystalline quality of the material grown on GaAs. Etching of In{sub x}Al{sub 1{minus}x}N was also examined as a function of In composition. The etch rate initially increased as the In composition changed from 0 to 36%, and then decreased to 0 {angstrom}min for InN. The authors also compared the effect of doping concentration on etch rate. Two InAlN samples of similar crystal quality were also etched; one was fully depleted with n < 10{sup 16}more » cm{sup {minus}3} (2.6% In) and the other n {approximately} 5 {times} 10{sup 18} cm{sup {minus}3} (3.1% In). At low etch temperature, the rates were similar, but above 60 C the n-type sample etched faster, approximately three times faster at 80 C. The activation energy for these etches is very low, 2.0 {+-} 0.5 kcal/mol for the sputtered AlN. The activation energies for InAlN were dependent on In composition and were in the range 2 to 6 kcal/mol. GaN and InN layers did not show any etching in KOH at temperatures up to 80 C.« less

49 citations

Journal ArticleDOI
TL;DR: In this paper, low temperature deposition of Sc/sub 2/O/sub 3/ or MgO layers was found to significantly increase the output power of AlGaN/GaN HEMTs.
Abstract: The low temperature (100/spl deg/C) deposition of Sc/sub 2/O/sub 3/ or MgO layers is found to significantly increase the output power of AlGaN/GaN HEMTs. At 4 GHz, there was a better than 3 dB increase in output power of 0.5/spl times/100 /spl mu/m/sup 2/ HEMTs for both types of oxide passivation layers. Both Sc/sub 2/O/sub 3/ and MgO produced larger output power increases at 4 GHz than conventional plasma-enhanced chemical vapor deposited (PECVD) SiN/sub x/ passivation which typically showed /spl les/2 dB increase on the same types of devices. The HEMT gain also in general remained linear over a wider input power range with the Sc/sub 2/O/sub 3/ or MgO passivation. These films appear promising for reducing the effects of surface states on the DC and RF performance of AlGaN/GaN HEMTs.

49 citations

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TL;DR: In this paper, the SnO 2 -coated ZnO nanorods on c-plane sapphire substrates were synthesized by pulsed laser deposition and tested by depositing Ti/Au Ohmic contacts on a random array of the nanorod and measuring the current at fixed voltage.

49 citations


Cited by
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TL;DR: The semiconductor ZnO has gained substantial interest in the research community in part because of its large exciton binding energy (60meV) which could lead to lasing action based on exciton recombination even above room temperature.
Abstract: The semiconductor ZnO has gained substantial interest in the research community in part because of its large exciton binding energy (60meV) which could lead to lasing action based on exciton recombination even above room temperature. Even though research focusing on ZnO goes back many decades, the renewed interest is fueled by availability of high-quality substrates and reports of p-type conduction and ferromagnetic behavior when doped with transitions metals, both of which remain controversial. It is this renewed interest in ZnO which forms the basis of this review. As mentioned already, ZnO is not new to the semiconductor field, with studies of its lattice parameter dating back to 1935 by Bunn [Proc. Phys. Soc. London 47, 836 (1935)], studies of its vibrational properties with Raman scattering in 1966 by Damen et al. [Phys. Rev. 142, 570 (1966)], detailed optical studies in 1954 by Mollwo [Z. Angew. Phys. 6, 257 (1954)], and its growth by chemical-vapor transport in 1970 by Galli and Coker [Appl. Phys. ...

10,260 citations

Journal ArticleDOI
TL;DR: Spintronics, or spin electronics, involves the study of active control and manipulation of spin degrees of freedom in solid-state systems as discussed by the authors, where the primary focus is on the basic physical principles underlying the generation of carrier spin polarization, spin dynamics, and spin-polarized transport.
Abstract: Spintronics, or spin electronics, involves the study of active control and manipulation of spin degrees of freedom in solid-state systems. This article reviews the current status of this subject, including both recent advances and well-established results. The primary focus is on the basic physical principles underlying the generation of carrier spin polarization, spin dynamics, and spin-polarized transport in semiconductors and metals. Spin transport differs from charge transport in that spin is a nonconserved quantity in solids due to spin-orbit and hyperfine coupling. The authors discuss in detail spin decoherence mechanisms in metals and semiconductors. Various theories of spin injection and spin-polarized transport are applied to hybrid structures relevant to spin-based devices and fundamental studies of materials properties. Experimental work is reviewed with the emphasis on projected applications, in which external electric and magnetic fields and illumination by light will be used to control spin and charge dynamics to create new functionalities not feasible or ineffective with conventional electronics.

9,158 citations

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TL;DR: A critical review of the synthesis methods for graphene and its derivatives as well as their properties and the advantages of graphene-based composites in applications such as the Li-ion batteries, supercapacitors, fuel cells, photovoltaic devices, photocatalysis, and Raman enhancement are described.
Abstract: Graphene has attracted tremendous research interest in recent years, owing to its exceptional properties. The scaled-up and reliable production of graphene derivatives, such as graphene oxide (GO) and reduced graphene oxide (rGO), offers a wide range of possibilities to synthesize graphene-based functional materials for various applications. This critical review presents and discusses the current development of graphene-based composites. After introduction of the synthesis methods for graphene and its derivatives as well as their properties, we focus on the description of various methods to synthesize graphene-based composites, especially those with functional polymers and inorganic nanostructures. Particular emphasis is placed on strategies for the optimization of composite properties. Lastly, the advantages of graphene-based composites in applications such as the Li-ion batteries, supercapacitors, fuel cells, photovoltaic devices, photocatalysis, as well as Raman enhancement are described (279 references).

3,340 citations

Journal ArticleDOI
TL;DR: In this article, the status of zinc oxide as a semiconductor is discussed and the role of impurities and defects in the electrical conductivity of ZnO is discussed, as well as the possible causes of unintentional n-type conductivity.
Abstract: In the past ten years we have witnessed a revival of, and subsequent rapid expansion in, the research on zinc oxide (ZnO) as a semiconductor. Being initially considered as a substrate for GaN and related alloys, the availability of high-quality large bulk single crystals, the strong luminescence demonstrated in optically pumped lasers and the prospects of gaining control over its electrical conductivity have led a large number of groups to turn their research for electronic and photonic devices to ZnO in its own right. The high electron mobility, high thermal conductivity, wide and direct band gap and large exciton binding energy make ZnO suitable for a wide range of devices, including transparent thin-film transistors, photodetectors, light-emitting diodes and laser diodes that operate in the blue and ultraviolet region of the spectrum. In spite of the recent rapid developments, controlling the electrical conductivity of ZnO has remained a major challenge. While a number of research groups have reported achieving p-type ZnO, there are still problems concerning the reproducibility of the results and the stability of the p-type conductivity. Even the cause of the commonly observed unintentional n-type conductivity in as-grown ZnO is still under debate. One approach to address these issues consists of growing high-quality single crystalline bulk and thin films in which the concentrations of impurities and intrinsic defects are controlled. In this review we discuss the status of ZnO as a semiconductor. We first discuss the growth of bulk and epitaxial films, growth conditions and their influence on the incorporation of native defects and impurities. We then present the theory of doping and native defects in ZnO based on density-functional calculations, discussing the stability and electronic structure of native point defects and impurities and their influence on the electrical conductivity and optical properties of ZnO. We pay special attention to the possible causes of the unintentional n-type conductivity, emphasize the role of impurities, critically review the current status of p-type doping and address possible routes to controlling the electrical conductivity in ZnO. Finally, we discuss band-gap engineering using MgZnO and CdZnO alloys.

3,291 citations