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Stephen J. Pearton

Bio: Stephen J. Pearton is an academic researcher from University of Florida. The author has contributed to research in topics: Dry etching & Etching (microfabrication). The author has an hindex of 104, co-authored 1913 publications receiving 58669 citations. Previous affiliations of Stephen J. Pearton include Kyungpook National University & University of Southern California.


Papers
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Stephen J. Pearton1
TL;DR: In this article, the key areas associated with damage removal and dopant activation in binary (GaAs, InP) and ternary (AlGaA, InGaA and AlInAs) compounds are reviewed.
Abstract: Ion implantation is used for two purposes in III–V materials — to create doped regions that act as active channel layers or contacts or to create high-resistivity regions that provide device isolation. We review the key areas associated with damage removal and dopant activation in binary (GaAs, InP) and ternary (AlGaAs, InGaAs, AlInAs) compounds. In particular recent results on the behavior of implanted carbon in these materials sheds new light on puzzling past data on more conventional light dopants such as Be. The production of high-resistance regions in Ga- and In-based materials resulting from radiation damage that traps free carriers will also be reviewed. In the Ga-based materials the Fermi level becomes pinned at midgap for either n-type or p-type samples, and resistivities ≥ 107 Ω cm can he achieved. By contrast, in InP the Fermi level moved into the upper half of the band gap and initially n-type material shows a limiting resistivity of 103−104 Ω cm. The differences between damage-induced and chemically induced compensation will be detailed.

39 citations

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TL;DR: The evolution of sheet resistance with post-implant annealing temperature is consistent with the introduction of deep acceptor states by the ion bombardment, and the subsequent removal of these states at temperatures ≲500 °C where the initial carrier concentrations are restored as mentioned in this paper.
Abstract: Carrier concentrations in doped InN, In0.37Ga0.63N, and In0.75Al0.25N layers are reduced by both F+ ion implantation to produce resistive material for device isolation, and by exposure to a hydrogen plasma. In the former case, post‐implant annealing at 450–500 °C produces sheet resistances ≳106 Ω/⧠ in initially n+ (7×1018–3×1019 cm−3) ternary layers and values of ∼5×103 Ω/⧠ in initially degenerately doped (4×1020 cm−3) InN. The evolution of sheet resistance with post‐implant annealing temperature is consistent with the introduction of deep acceptor states by the ion bombardment, and the subsequent removal of these states at temperatures ≲500 °C where the initial carrier concentrations are restored. Hydrogenation of the nitrides at 200 °C reduces the n‐type doping levels by 1–2 orders of magnitude and suggests that unintentional carrier passivation occurring during cool down after epitaxial growth may play a role in determining the apparent doping efficiency in these materials.

39 citations

Journal ArticleDOI
04 Apr 2021-Small
TL;DR: A review of 2D materials-based artificial synapses can be found in this article, where the fundamental synaptic behavior is reviewed, such as synaptic plasticity and learning rule, and the compulsory behavior and requirements of artificial neurons such as the allornothing law and refractory periods to simulate a spike neural network are described.
Abstract: Neuromorphic systems, which emulate neural functionalities of a human brain, are considered to be an attractive next-generation computing approach, with advantages of high energy efficiency and fast computing speed After these neuromorphic systems are proposed, it is demonstrated that artificial synapses and neurons can mimic neural functions of biological synapses and neurons However, since the neuromorphic functionalities are highly related to the surface properties of materials, bulk material-based neuromorphic devices suffer from uncontrollable defects at surfaces and strong scattering caused by dangling bonds Therefore, 2D materials which have dangling-bond-free surfaces and excellent crystallinity have emerged as promising candidates for neuromorphic computing hardware First, the fundamental synaptic behavior is reviewed, such as synaptic plasticity and learning rule, and requirements of artificial synapses to emulate biological synapses In addition, an overview of recent advances on 2D materials-based synaptic devices is summarized by categorizing these into various working principles of artificial synapses Second, the compulsory behavior and requirements of artificial neurons such as the all-or-nothing law and refractory periods to simulate a spike neural network are described, and the implementation of 2D materials-based artificial neurons to date is reviewed Finally, future challenges and outlooks of 2D materials-based neuromorphic devices are discussed

39 citations

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TL;DR: In this article, the effect of V/III ratio and substrate temperature on the growth rate, Al composition, crystallinity, and impurity concentration of AlGaAs grown by metalorganic beam epitaxy (MOMBE) was investigated.

39 citations

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TL;DR: In this paper, the etch selectivities of GaN to AlN and InN are typically /spl les/4 in these tools, while the selectivities for InN and GaN are O(n 2 ).
Abstract: The etch rates and feature anisotropy for GaN, AlN, and InN etched in Cl/sub 2/-Ar plasmas with four different techniques were examined. Conventional reactive ion etching produces the slowest etch rates, even when high dc self-biases (>-900 V) are employed, and this leads to mask erosion and sloped feature sidewalls during ridge waveguide fabrication. Two high-ion-density techniques, inductively coupled plasma and electron cyclotron resonance, provide the highest etch rates and most anisotropic features through their combination of high-ion flux and moderate-ion energy. Etch selectivities of GaN to AlN and InN are typically /spl les/4 in these tools. Reactive ion beam etching utilizing a high density (ICP) source is also an attractive option for pattern transfer in the nitrides, although its etch rates are slower than for ICP or ECR due to its lower operating pressure.

39 citations


Cited by
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TL;DR: The semiconductor ZnO has gained substantial interest in the research community in part because of its large exciton binding energy (60meV) which could lead to lasing action based on exciton recombination even above room temperature.
Abstract: The semiconductor ZnO has gained substantial interest in the research community in part because of its large exciton binding energy (60meV) which could lead to lasing action based on exciton recombination even above room temperature. Even though research focusing on ZnO goes back many decades, the renewed interest is fueled by availability of high-quality substrates and reports of p-type conduction and ferromagnetic behavior when doped with transitions metals, both of which remain controversial. It is this renewed interest in ZnO which forms the basis of this review. As mentioned already, ZnO is not new to the semiconductor field, with studies of its lattice parameter dating back to 1935 by Bunn [Proc. Phys. Soc. London 47, 836 (1935)], studies of its vibrational properties with Raman scattering in 1966 by Damen et al. [Phys. Rev. 142, 570 (1966)], detailed optical studies in 1954 by Mollwo [Z. Angew. Phys. 6, 257 (1954)], and its growth by chemical-vapor transport in 1970 by Galli and Coker [Appl. Phys. ...

10,260 citations

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TL;DR: Spintronics, or spin electronics, involves the study of active control and manipulation of spin degrees of freedom in solid-state systems as discussed by the authors, where the primary focus is on the basic physical principles underlying the generation of carrier spin polarization, spin dynamics, and spin-polarized transport.
Abstract: Spintronics, or spin electronics, involves the study of active control and manipulation of spin degrees of freedom in solid-state systems. This article reviews the current status of this subject, including both recent advances and well-established results. The primary focus is on the basic physical principles underlying the generation of carrier spin polarization, spin dynamics, and spin-polarized transport in semiconductors and metals. Spin transport differs from charge transport in that spin is a nonconserved quantity in solids due to spin-orbit and hyperfine coupling. The authors discuss in detail spin decoherence mechanisms in metals and semiconductors. Various theories of spin injection and spin-polarized transport are applied to hybrid structures relevant to spin-based devices and fundamental studies of materials properties. Experimental work is reviewed with the emphasis on projected applications, in which external electric and magnetic fields and illumination by light will be used to control spin and charge dynamics to create new functionalities not feasible or ineffective with conventional electronics.

9,158 citations

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TL;DR: A critical review of the synthesis methods for graphene and its derivatives as well as their properties and the advantages of graphene-based composites in applications such as the Li-ion batteries, supercapacitors, fuel cells, photovoltaic devices, photocatalysis, and Raman enhancement are described.
Abstract: Graphene has attracted tremendous research interest in recent years, owing to its exceptional properties. The scaled-up and reliable production of graphene derivatives, such as graphene oxide (GO) and reduced graphene oxide (rGO), offers a wide range of possibilities to synthesize graphene-based functional materials for various applications. This critical review presents and discusses the current development of graphene-based composites. After introduction of the synthesis methods for graphene and its derivatives as well as their properties, we focus on the description of various methods to synthesize graphene-based composites, especially those with functional polymers and inorganic nanostructures. Particular emphasis is placed on strategies for the optimization of composite properties. Lastly, the advantages of graphene-based composites in applications such as the Li-ion batteries, supercapacitors, fuel cells, photovoltaic devices, photocatalysis, as well as Raman enhancement are described (279 references).

3,340 citations

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TL;DR: In this article, the status of zinc oxide as a semiconductor is discussed and the role of impurities and defects in the electrical conductivity of ZnO is discussed, as well as the possible causes of unintentional n-type conductivity.
Abstract: In the past ten years we have witnessed a revival of, and subsequent rapid expansion in, the research on zinc oxide (ZnO) as a semiconductor. Being initially considered as a substrate for GaN and related alloys, the availability of high-quality large bulk single crystals, the strong luminescence demonstrated in optically pumped lasers and the prospects of gaining control over its electrical conductivity have led a large number of groups to turn their research for electronic and photonic devices to ZnO in its own right. The high electron mobility, high thermal conductivity, wide and direct band gap and large exciton binding energy make ZnO suitable for a wide range of devices, including transparent thin-film transistors, photodetectors, light-emitting diodes and laser diodes that operate in the blue and ultraviolet region of the spectrum. In spite of the recent rapid developments, controlling the electrical conductivity of ZnO has remained a major challenge. While a number of research groups have reported achieving p-type ZnO, there are still problems concerning the reproducibility of the results and the stability of the p-type conductivity. Even the cause of the commonly observed unintentional n-type conductivity in as-grown ZnO is still under debate. One approach to address these issues consists of growing high-quality single crystalline bulk and thin films in which the concentrations of impurities and intrinsic defects are controlled. In this review we discuss the status of ZnO as a semiconductor. We first discuss the growth of bulk and epitaxial films, growth conditions and their influence on the incorporation of native defects and impurities. We then present the theory of doping and native defects in ZnO based on density-functional calculations, discussing the stability and electronic structure of native point defects and impurities and their influence on the electrical conductivity and optical properties of ZnO. We pay special attention to the possible causes of the unintentional n-type conductivity, emphasize the role of impurities, critically review the current status of p-type doping and address possible routes to controlling the electrical conductivity in ZnO. Finally, we discuss band-gap engineering using MgZnO and CdZnO alloys.

3,291 citations