S
Stephen J. Pearton
Researcher at University of Florida
Publications - 1988
Citations - 62995
Stephen J. Pearton is an academic researcher from University of Florida. The author has contributed to research in topics: Dry etching & Etching (microfabrication). The author has an hindex of 104, co-authored 1913 publications receiving 58669 citations. Previous affiliations of Stephen J. Pearton include Kyungpook National University & University of Southern California.
Papers
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Journal ArticleDOI
Photoluminescence study of Er-doped AlN
X. Wu,Uwe Hommerich,J. D. MacKenzie,C. R. Abernathy,Stephen J. Pearton,Robert G. Wilson,Robert N. Schwartz,J. M. Zavada +7 more
TL;DR: In this paper, a photoluminescence (PL) study of Er-doped AlN epilayer on sapphire substrate was presented, which showed that Er3+ is excited through a photo-carrier mediated process.
Journal ArticleDOI
Plasma chemistries for high density plasma etching of SiC
J. Hong,Randy J. Shul,L. Zhang,Luke F. Lester,Hyun Cho,Y. B. Hahn,David C. Hays,K. B. Jung,Stephen J. Pearton,Carl-Mikael Zetterling,M. Ostling +10 more
TL;DR: In this paper, a variety of different plasma chemistries, including SF6, Cl2, ICl, and IBr, have been examined for dry etching of 6H-SiC in high ion density plasma tools (inductively coupled plasma and electron cyclotron resonance).
Journal ArticleDOI
Local structure of S impurities in GaAs.
TL;DR: The local structure of S implanted in GaAs has been determined by extended x-ray-absorption fine structure by monitoring of the K\ensuremath{\alpha}$ fluorescence yield, which indicates two S configurations of approximately equal population.
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Carbon implantation in InP
TL;DR: In this article, the donor activity was measured for C+P implantation at a dose of 5×1014 cm−2, followed by annealing at 700 °C for 10 s.
Journal ArticleDOI
Fabrication of hybrid n-ZnMgO/n-ZnO/p-AlGaN/p-GaN light-emitting diodes
Hyuck Soo Yang,Sang Youn Han,Young-Woo Heo,Kwang Hyeon Baik,David P. Norton,Stephen J. Pearton,Fan Ren,Andrei Osinsky,J. W. Dong,B. Hertog,Amir M. Dabiran,Peter Chow,Leonid Chernyak,T. Steiner,C. J. Kao,Gou-Chung Chi +15 more
TL;DR: In this article, the fabrication of UV light-emitting diodes (LEDs) based on a p-n junction n-ZnMgO/n ZnO/p-AlGaN/ p-GaN semiconductor triple-heterostructure was reported.