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Sylwester Bargiel

Bio: Sylwester Bargiel is an academic researcher from Centre national de la recherche scientifique. The author has contributed to research in topics: Microlens & Wafer. The author has an hindex of 15, co-authored 74 publications receiving 635 citations. Previous affiliations of Sylwester Bargiel include University of Franche-Comté & Wrocław University of Technology.


Papers
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Journal ArticleDOI
TL;DR: In this paper, the authors present a technology platform for the hybrid integration of MOEMS components on a reconfigurable silicon free-space micro-optical bench (FS-MOB), where a desired optical component (e.g. micromirror, microlens) is integrated with a removable and adjustable silicon holder which can be manipulated, aligned and fixed in the precisely etched rail of the silicon baseplate by use of a robotic microassembly station.
Abstract: The 3D integration of hybrid chips is a viable approach for the micro-optical technologies to reduce the costs of assembly and packaging. In this paper a technology platform for the hybrid integration of MOEMS components on a reconfigurable silicon free-space micro-optical bench (FS-MOB) is presented. In this approach a desired optical component (e.g. micromirror, microlens) is integrated with a removable and adjustable silicon holder which can be manipulated, aligned and fixed in the precisely etched rail of the silicon baseplate by use of a robotic micro-assembly station. An active-based gripping system allows modification of the holder position on the baseplate with nanometre precision. The fabrication processes of the micromachined parts of the micro-optical bench, based on bulk micromachining of standard silicon wafer and SOI wafer, are described. The successful assembly of the holders, equipped with a micromirror and a refractive glass ball microlens, on the baseplate rail is demonstrated.

60 citations

Journal ArticleDOI
TL;DR: In this article, the authors report the design, fabrication and characterization of a newly developed electrostatic silicon X -Y micro-stage with large displacement, suitable for many MOEMS including raster scanning devices.
Abstract: We report the design, fabrication and characterization of a newly developed electrostatic silicon X – Y micro-stage with large displacement, suitable for many MOEMS including raster scanning devices. The micro-stage consists of four electrostatic comb-drive actuators driving a suspended movable platform via a system of straight spring suspensions and converting their deflections into a linear motion. Independent driving of the platform along X - and Y -direction has been achieved by employing a “stage-in-the-stage” construction of the movable structure, mechanically linked by suspended insulation bridges. Experimental characteristics have shown the large static translations of ±28 μm along X -axis and ±37 μm along Y -axis, at a driving voltage of 100 V. The resonant frequency at the fundamental mode in the X -direction (290 Hz) was lower than in the Y -direction (550 Hz) while the maximum out-of-plane displacement was measured to be 26 nm within the bandwidth of 0–5 kHz. The device was fabricated by double-side DRIE of a silicon-on-insulator (SOI) wafer with 30-μm-thick device layer. The micro-stage is intended to be integrated with micro-optical components (microlens, diffraction grating) and offers an attractive solution to build miniature and low cost 2D raster scanning modules.

44 citations

Journal ArticleDOI
TL;DR: In this article, an array type of micromachined Mirau interferometers, operating in the regime of low coherence interferometry (LCI) and adapted for massively parallel inspection of MEMS, is presented.
Abstract: We present the development of an array type of micromachined Mirau interferometers, operating in the regime of low coherence interferometry (LCI) and adapted for massively parallel inspection of MEMS. The system is a combination of free-space micro-optical technologies and silicon micromachining, based on the vertical assembly of two glass wafers. The probing wafer carries an array of refractive microlenses, diffractive gratings to correct chromatic and spherical aberrations and reference micro-mirrors. The semitransparent beam splitter plate is based on the deposition of a dielectric multilayer, sandwiched between two glass wafers. The interferometer matrix is the key element of a novel inspection system aimed to perform parallel inspection of MEMS. The fabricated demonstrator, including 5 × 5 channels, allows consequently decreasing the measurement time by a factor of 25. In the following, the details of fabrication processes of the micro-optical components and their assembly are described. The feasibility of the LCI is demonstrated for the measurement of a wafer of MEMS sensors.

41 citations

Journal ArticleDOI
TL;DR: A new porous silicon dioxide chip (DIOSD) for matrix-free laser desorption/ionisation time-of-flight mass spectrometry (MALDI TOF MS) has been presented in this article.
Abstract: A new porous silicon dioxide chip (DIOSD) for matrix-free laser desorption/ionisation time-of-flight mass spectrometry (MALDI TOF MS) has been presented. Spots of porous silicon dioxide were fabricated by electrochemical etching of a silicon substrate followed by the high temperature wet oxidation. It was shown, that the porous silicon dioxide ensures effective laser-induced desorption and ionisation of biomolecules. The noise background signal of the DIOSD chip was low, and did not interfere to the measurements. The 50 fmol detectability of tripeptide LGG was obtained. Spectrograms of the selected catecholamines (dopamine, norepinephrine) and captopril in the range of a few dozen picomoles were successfully done. Is has been shown, that the DIOSD chip may successfully replace the standard matrix-assisted target plate, used in the proteomics/peptideomics mass spectrometry, especially for low-mass biomolecules analysis.

39 citations

Journal ArticleDOI
TL;DR: Desorption/ionization from porous silicon can extend the operating range of a mass spectrometer for studies on metabolomics (small organic molecules and their metabolites, such as chemical neurotransmitters, prostaglandins, steroids, etc.).
Abstract: A method has been developed for laser desorption/ionization of catecholamines from porous silicon. This methodology is particularly attractive for analysis of small molecules. MALDI TOF mass spectrometry, although a very sensitive technique, utilizes matrices that need to be mixed with the sample prior to their analysis. Each matrix produces its own background, particularly in the low-molecular mass region. Therefore, detection and identification of molecules below 400 Da can be difficult. Desorption/ionization of samples deposited on porous silicon does not require addition of a matrix, thus, spectra in the low-molecular mass region can be clearly readable. Here, we describe a method for the analysis of catecholamines. While MALDI TOF is superior for proteomics/peptidomics, desorption/ionization from porous silicon can extend the operating range of a mass spectrometer for studies on metabolomics (small organic molecules and their metabolites, such as chemical neurotransmitters, prostaglandins, steroids, etc.).

34 citations


Cited by
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01 Jan 2016
TL;DR: In this paper, the authors present the principles of optics electromagnetic theory of propagation interference and diffraction of light, which can be used to find a good book with a cup of coffee in the afternoon, instead of facing with some infectious bugs inside their computer.
Abstract: Thank you for reading principles of optics electromagnetic theory of propagation interference and diffraction of light. As you may know, people have search hundreds times for their favorite novels like this principles of optics electromagnetic theory of propagation interference and diffraction of light, but end up in harmful downloads. Rather than enjoying a good book with a cup of coffee in the afternoon, instead they are facing with some infectious bugs inside their computer.

2,213 citations

Journal Article
TL;DR: In this article, the diffraction tomography theorem is adapted to one-dimensional length measurement and the resulting spectral interferometry technique is described and the first length measurements using this technique on a model eye and on a human eye in vivo are presented.
Abstract: The diffraction tomography theorem is adapted to one-dimensional length measurement. The resulting spectral interferometry technique is described and the first length measurements using this technique on a model eye and on a human eye in vivo are presented.

1,237 citations

Journal ArticleDOI
TL;DR: In this paper, the authors demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasuran, and a scanning frequency that can potentially reach a few kHz.
Abstract: Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.

461 citations

01 Sep 2015
TL;DR: In this paper, the authors report a new type of phononic crystals with topologically nontrivial band gaps for both longitudinal and transverse polarizations, resulting in protected one-way elastic edge waves.
Abstract: We report a new type of phononic crystals with topologically nontrivial band gaps for both longitudinal and transverse polarizations, resulting in protected one-way elastic edge waves. In our design, gyroscopic inertial effects are used to break the time-reversal symmetry and realize the phononic analogue of the electronic quantum (anomalous) Hall effect. We investigate the response of both hexagonal and square gyroscopic lattices and observe bulk Chern numbers of 1 and 2, indicating that these structures support single and multimode edge elastic waves immune to backscattering. These robust one-way phononic waveguides could potentially lead to the design of a novel class of surface wave devices that are widely used in electronics, telecommunication, and acoustic imaging.

363 citations

Journal ArticleDOI
TL;DR: In this article, the design, fabrication, and performance of chip-scale atomic clocks, magnetometers, and gyroscopes are discussed and many applications in which these novel instruments are being used.
Abstract: Chip-scale atomic devices combine elements of precision atomic spectroscopy, silicon micromachining, and advanced diode laser technology to create compact, low-power, and manufacturable instruments with high precision and stability. Microfabricated alkali vapor cells are at the heart of most of these technologies, and the fabrication of these cells is discussed in detail. We review the design, fabrication, and performance of chip-scale atomic clocks, magnetometers, and gyroscopes and discuss many applications in which these novel instruments are being used. Finally, we present prospects for future generations of miniaturized devices, such as photonically integrated systems and manufacturable devices, which may enable embedded absolute measurement of a broad range of physical quantities.

288 citations