T
Tetsu Tanaka
Researcher at Tohoku University
Publications - 423
Citations - 11239
Tetsu Tanaka is an academic researcher from Tohoku University. The author has contributed to research in topics: Wafer & Chip. The author has an hindex of 38, co-authored 406 publications receiving 10375 citations. Previous affiliations of Tetsu Tanaka include NTT DoCoMo & Tokyo Medical and Dental University.
Papers
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Journal ArticleDOI
On-wafer thermomechanical characterization of a thin film polyimide formed by vapor deposition polymerization for through-silicon via applications: Comparison to plasma-enhanced chemical vapor deposition SiO2
Takafumi Fukushima,Mariappan Murugesan,Ji Cheol Bea,Hiroyuki Hashimoto,Hisashi Kino,Tetsu Tanaka,Mitsumasa Koyanagi +6 more
Proceedings ArticleDOI
Highly efficient TSV repair technology for resilient 3-D stacked multicore processor system
TL;DR: The processor chip for the resilient 3-D stacked multicore processor has been designed and fabricated with highly area-efficient TSV repair technology.
Journal ArticleDOI
Significant Die-Shift Reduction and μ LED Integration Based on Die-First Fan-Out Wafer-Level Packaging for Flexible Hybrid Electronics
Takafumi Fukushima,Yuki Susumago,Zhengyang Qian,Chidai Shima,Bang Du,Noriyuki Takahashi,Shuta Nagata,Tomo Odashima,Hisashi Kino,Tetsu Tanaka +9 more
TL;DR: In this paper, an on-nail photoplethysmogram (PPG) sensor module is integrated with a polydimethylsiloxane (PDMS) mold resin for real-time monitoring pulse wave and percutaneous oxygen saturation (SpO2).
Proceedings ArticleDOI
Development of a new self-assembled die bonder to three-dimensionally stack known good dies in batch
TL;DR: A new self-assembled die bonder to produce three-dimensionally integrated circuit (3D IC) using a multichip-to-wafer bonding method in batch and the average alignment accuracy was found to be approximately 400 nm and the total alignment time was less than 0.1 sec.