Thomas Grille

TL;DR: In this article, a photonic gas sensor based on infrared evanescent field absorption, designed for CO2 sensing, was presented, and the measured transmittance at various CO2 concentrations was fitted using the Beer-Lambert law.

TL;DR: In this paper, a photonic gas sensor concept based on silicon waveguides using infrared evanescent field absorption was presented, specifically designed for CO $2$ sensing at a wavelength of $\lambda ={\text{4.26}},\mathrm{\mu m}$ as possible application for the proposed sensor platform.

TL;DR: In this article, the authors demonstrate the feasibility of gas detection using a silicon waveguide and a low-cost integrated thermal emitter, using the first demonstrators they achieved CO2 detection with a confidence level of three standard deviations.

TL;DR: In this article, the impact of various deposition parameters such as the reactive gas flow ratio, plasma power, substrate temperature and chamber back pressure of ICP-CVD deposited a-SiC:H thin films is investigated and the influence on important MEMS-related properties like residual stress, Young's modulus, hardness, mass density and refractive index is evaluated.

TL;DR: In this paper, the authors describe a method for fabricating a cavity structure, a semiconductor structure, and a cavity-structured microphone using a first layer, depositing a carbon layer on the first layer and covering the carbon layer with a second layer to define the cavity structure.