Author
Tino Hausotte
Other affiliations: Technische Universität Ilmenau
Bio: Tino Hausotte is an academic researcher from University of Erlangen-Nuremberg. The author has contributed to research in topics: Nanometrology & Metrology. The author has an hindex of 19, co-authored 136 publications receiving 1541 citations. Previous affiliations of Tino Hausotte include Technische Universität Ilmenau.
Topics: Nanometrology, Metrology, Measurement uncertainty, Calibration, Confocal
Papers published on a yearly basis
Papers
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TL;DR: In this paper, an overview over laser-based additive manufacturing with comments on the main steps necessary to build parts to introduce the complexity of the whole process chain is presented. But despite good sales of AM machines, there are still several challenges hindering a broad economic use of AM.
415 citations
TL;DR: In this article, a range of nanoprobe systems usable in nanomeasuring machines is discussed, such as optical focus sensors, white light interferometer microscopes, CCD camera microscopes using the depth from the focus method, tactile stylus probes, atomic force microscopes (AFMs) and 3D microprobes.
Abstract: Rapid progress in several high-tech industries has significantly increased the need for dimensional micro- and nano-metrology. Structures to be measured are becoming more complex with smaller structure widths and higher aspect ratios in increasingly larger surface regions and potentially highly curved surfaces. Significant international effort can be seen to develop high-capacity measuring machines with nanometre precision in growing measuring ranges up to hundreds of millimetres. This paper begins with an outline of the requirements stemming from high-tech developments currently being done or expected in the future and discusses recent developments in the field of nanopositioning and nanomeasuring technology with respect to basic measurement approaches, laser interferometer systems. The large range of nanoprobe systems usable in nanomeasuring machines is discussed, such as optical focus sensors, white light interferometer microscopes, CCD camera microscopes using the depth from the focus method, tactile stylus probes, atomic force microscopes (AFMs) and 3D microprobes. The versatile properties of these sensors allow the machine to be used in many different metrological applications. The paper also introduces a multi-sensor approach using a microscope revolver. It concludes with an illustration of metrologically challenging measurements, e.g., scanning micro-structures of curved optical surfaces or performing AFM scans of very large regions with significant data volume.
163 citations
TL;DR: In this article, a focus probe with a spot size of approximately 0.5 µm, a working distance of 1.5 mm and a resolution of less than 1 nm was developed and adopted in the NPM-machine.
Abstract: With the nanopositioning and nanomeasuring machine (NPM-Machine) developed at the Technische Universitat Ilmenau, subnanometre resolution and nanometre uncertainty in a measuring volume of 25 × 25 × 5 mm3 have been demonstrated in the last few years. This machine allows the most various measuring problems to be solved. In practice, however, there are too many different requirements for sensing surfaces or for detecting structures. So, this paper deals with the development and also the improvement of several optical and tactile probes for application in the NPM-Machine. A focus probe with a spot size of approximately 0.5 µm, a working distance of 1.5 mm and a resolution of less than 1 nm was developed and adopted in the NPM-Machine. In the next step, the working distance was improved to exploit the full vertical range of the NPM-Machine of 5 mm. To realize tactile sensing, an atomic force probe and tactile stylus probe were developed on the basis of the focus probe. These probing systems can acquire measuring data only by scanning the surface sequentially and point-by-point. To increase data acquisition, we realized a sensor based on a white-light interference microscope and parallel sampling of 1600 × 1200 data points. First results of fringe evaluation with laser interferometer reference are presented.
109 citations
TL;DR: In this article, the authors compare tactile profile measurement methods, as established in industry, to optical measurement techniques such as Focus Variation, Fringe Projection Technique (FPT), and Confocal Laser Scanning Microscope (CLSM).
86 citations
TL;DR: In this article, a review of capabilities and advances in micro-manufacturing technologies, metrology, and equipment demonstrates increased versatility across varied applications, while also highlighting limitations, and a guide for machining high-precision components with micro-scale features in process chains is given with respect to machine tools, tools, technology and environmental conditions.
80 citations
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Journal Article•
9,185 citations
TL;DR: It is shown that on the basis of open-source software development, a fully functional software package can be created that covers the needs of a large part of the scanning probe microscopy user community.
Abstract: In this article, we review special features of Gwyddion—a modular, multiplatform, open-source software for scanning probe microscopy data processing, which is available at http://gwyddion.net/. We describe its architecture with emphasis on modularity and easy integration of the provided algorithms into other software. Special functionalities, such as data processing from non-rectangular areas, grain and particle analysis, and metrology support are discussed as well. It is shown that on the basis of open-source software development, a fully functional software package can be created that covers the needs of a large part of the scanning probe microscopy user community.
3,151 citations
TL;DR: In this paper, the state-of-the-art with respect to inspection methodologies compatible with additively manufactured (AM) processes is explored with the intention of identifying new avenues for research and proposing approaches to integration into future generations of AM systems.
1,024 citations
TL;DR: Freeform optics is the next generation of modern optics, bringing advantages of excellent optical performance and system integration as mentioned in this paper, and finds wide applications in various fields, such as new energy, illumination, aerospace and biomedical engineering.
638 citations
06 Apr 2016
TL;DR: Marshall has unique expertise in leveraging new digital tools, 3D printing, and other advanced manufacturing technologies and applying them to propulsion systems design and other aerospace materials to meet NASA mission and industry needs.
Abstract: Propulsion system development requires new, more affordable manufacturing techniques and technologies in a constrained budget environment, while future in-space applications will require in-space manufacturing and assembly of parts and systems. Marshall is advancing cuttingedge commercial capabilities in additive and digital manufacturing and applying them to aerospace challenges. The Center is developing the standards by which new manufacturing processes and parts will be tested and qualified. Rapidly evolving digital tools, such as additive manufacturing, are the leading edge of a revolution in the design and manufacture of space systems that enables rapid prototyping and reduces production times. Marshall has unique expertise in leveraging new digital tools, 3D printing, and other advanced manufacturing technologies and applying them to propulsion systems design and other aerospace materials to meet NASA mission and industry needs. Marshall is helping establish the standards and qualifications “from art to part” for the use of these advanced techniques and the parts produced using them in aerospace or elsewhere in the U.S. industrial base.
481 citations