Author
Ulrich Prof. Dr. Dr. Rohde
Bio: Ulrich Prof. Dr. Dr. Rohde is an academic researcher. The author has contributed to research in topics: Cantilever & Coplanar waveguide. The author has an hindex of 1, co-authored 1 publications receiving 4 citations.
Topics: Cantilever, Coplanar waveguide
Papers
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Patent•
23 Dec 2016
TL;DR: In this paper, a microelectromechanical switch including a first port, one or more second ports, a cantilever beam, and a mechanical spring connected to the beam for providing a mechanical force to move the beam is described.
Abstract: The present disclosure provides for a microelectromechanical switch including a first port (e.g., input port), one or more second ports (e.g., output ports), a cantilever beam, and a mechanical spring connected to the cantilever beam for providing a mechanical force to move the cantilever beam. The cantilever beam extends from a first end, which is in contact with either the first port or one of the second ports, to a second end that is switchably connectable to the other of the first port or said one of the second ports. The first and second ports and cantilever beam may be formed in a coplanar waveguide.
4 citations
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Patent•
25 Jan 2019
TL;DR: In this article, a double deformation model of a double-end fixed beam structure and a flexible substrate was proposed to obtain the deformation coupling model and the amount of biaxial residual stress introduced into the structure.
Abstract: The invention discloses a MEMS double-end fixed beam structural mechanics analysis method based on flexible substrate bending, including two main steps: firstly, establishing the deformation couplingmodel based on the double deformation of MEMS double-end fixed beam structure and flexible substrate, and extracting the variation of key structural parameters between MEMS double-end fixed beam structure and flexible substrate, and secondly, based on the bending characteristic model of MEMS double-end fixed beam structure, obtaining the deformation of MEMS double-end fixed beam structure/substrate double deformation and the amount of stress introduced into MEMS double-end fixed beam structure. In the MEMS double-end fixed beam structural mechanics analysis method, based on complex environmentspace, thedouble deformation model of MEMS double-end fixed beam structure and flexible substrate is used, and influence of biaxial residual stress of MEMS double-end fixed beam structure is considered.
1 citations
Patent•
22 Feb 2019
TL;DR: In this article, the authors provided an RF MEMS electrostatic drive switch microwave characteristic change rule estimation method based on a flexible substrate bending condition, where a double deformation model of the RF EMS and the flexible substrate is included.
Abstract: Disclosed is an RF MEMS electrostatic drive switch microwave characteristic analysis method based on a flexible substrate bending condition. The aim is to provide an RF MEMS electrostatic drive switch microwave characteristic change rule estimation method based on a flexible substrate bending condition. The present invention mainly uses two steps to process RF MEMS electrostatic drive switch microwave characteristic modeling in a flexible substrate bending condition, so as to obtain an analytical model of influence on device microwave characteristics after an RF MEMS electrostatic drive switch is deformed. First is to establish a deformation coupling model based on the double deformation of the RF MEMS electrostatic drive switch and the flexible substrate to realize the extraction of a key structural parameter variation between the RF MEMS electrostatic drive switch and the flexible substrate. Second is to obtain the deformation quantity of double deformation of the RF MEMS electrostatic drive switch/substrate based on an RF MEMS electrostatic drive switch bending characteristic model. On the basis of said parameters, the RF MEMS electrostatic drive switch microwave characteristic model is reestablished to analyze the influence of bending deformation on RF MEMS electrostatic drive switch microwave characteristics. In order to fill the domestic and international research gap of an RF MEMS electrostatic drive switch microwave characteristic model, the present invention provides the RF MEMS electrostatic drive switch microwave characteristic analysis method based on a complex environmental space, wherein a double deformation model of the RF MEMS electrostatic drive switch and the flexible substrate is included.
Patent•
12 Mar 2020
TL;DR: In this article, a deformation coupling model was proposed to model the bending characteristics of the MEMS double-end fixed beam structure under the bending condition of the flexible substrate, to obtain an analysis model of the influence of the deformation of the MOSDF on the mechanical property of a device.
Abstract: Provided is a mechanical analysis method of an MEMS double-end fixed beam structure under bending condition of a flexible substrate. The invention aims to provide an estimation method for a change rule of mechanical property parameters of the MEMS double-end fixed beam structure under the bending condition of the flexible substrate. Two steps are mainly adopted to model the bending characteristics of the MEMS double-end fixed beam structure under the bending condition of the flexible substrate, to obtain an analysis model of the influence of the deformation of the MEMS double-end fixed beam structure on the mechanical property of a device. Firstly, establishing a deformation coupling model on the basis of double deformation of the MEMS double-end fixed beam structure and the flexible substrate, and extracting key structural parameter change amounts between the MEMS double-end fixed beam structure and the flexible substrate. Secondly, on the basis of the bending characteristic model of the MEMS double-end fixed beam structure, obtaining the deformation amounts of the double deformation of the MEMS double-end fixed beam structure and the flexible substrate and the stress introduction amounts in the MEMS double-end fixed beam structure. On the basis of said parameters, the mechanical model of the MEMS double-end fixed beam structure is reconstructed, and the influence of bending deformation on the mechanical property of the MEMS double-end fixed beam structure is analyzed. In order to fill the domestic and foreign research blank of the flexible device model of the MEMS double-end fixed beam structure, the mechanical analysis method of the MEMS double-end fixed beam structure taking the influence of the biaxial residual stress of the MEMS double-end fixed beam structure into account in a complex environment space containing the double deformation model of the the MEMS double-end fixed beam structure and the flexible substrate is provided.
Patent•
13 Dec 2019
TL;DR: In this article, a snowflake single-pole five-throw switch based on MEMS was proposed for gating switching of microwave signals, where the contacts adopt a double contact structure and the effective contact area of double contact is larger compared with the single contact.
Abstract: The invention belongs to the technical field of single-pole five-throw switches, and specifically relates a snowflake single-pole five-throw switch based on MEMS. The switch comprises a substrate, aninput signal line and output signal lines, wherein the input signal line and the output signal line are fixed on the substrate, the number of the input signal line is one, the number of the output signal lines is five, the input signal line is connected with the output signal lines, and each output signal line is provided with a switch. The snowflake single-pole five-throw switch is simple and symmetrical in structural design and small in size, the contacts adopt a double-contact structure, the effective contact area of double contact is larger compared with the single contact, the reliabilityof contact between the switch and the contacts when the switch is pulled down is improved, the double-contact structure can reduce impact force brought by pull-down of the switch when electrostatic force acts on an upper electrode of the switch so as to serve as buffering, the deformation degree of the upper electrode and the contacts is effectively reduced, and the service life of the switch isgreatly prolonged. The snowflake single-pole five-throw switch is used for gating switching of microwave signals.