V
V. Chikarmane
Researcher at Intel
Publications - 16
Citations - 2061
V. Chikarmane is an academic researcher from Intel. The author has contributed to research in topics: Transistor & NMOS logic. The author has an hindex of 9, co-authored 16 publications receiving 1892 citations.
Papers
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Proceedings ArticleDOI
A 22nm high performance and low-power CMOS technology featuring fully-depleted tri-gate transistors, self-aligned contacts and high density MIM capacitors
C. Auth,C. Allen,A. Blattner,Daniel B. Bergstrom,Mark R. Brazier,M. Bost,M. Buehler,V. Chikarmane,Tahir Ghani,Timothy E. Glassman,R. Grover,W. Han,D. Hanken,Michael L. Hattendorf,P. Hentges,R. Heussner,J. Hicks,D. Ingerly,Pulkit Jain,S. Jaloviar,Robert James,David Jones,J. Jopling,Subhash M. Joshi,C. Kenyon,Huichu Liu,R. McFadden,B. McIntyre,J. Neirynck,C. Parker,L. Pipes,Ian R. Post,S. Pradhan,M. Prince,S. Ramey,T. Reynolds,J. Roesler,J. Sandford,J. Seiple,Pete Smith,Christopher D. Thomas,D. Towner,T. Troeger,Cory E. Weber,P. Yashar,K. Zawadzki,Kaizad Mistry +46 more
TL;DR: In this paper, a 22nm generation logic technology is described incorporating fully-depleted tri-gate transistors for the first time, which provides steep sub-threshold slopes (∼70mV/dec) and very low DIBL ( ∼50m V/V).
Proceedings ArticleDOI
A 14nm logic technology featuring 2 nd -generation FinFET, air-gapped interconnects, self-aligned double patterning and a 0.0588 µm 2 SRAM cell size
Sanjay Natarajan,M. Agostinelli,S. Akbar,M. Bost,A. Bowonder,V. Chikarmane,S. Chouksey,A. Dasgupta,K. Fischer,Q. Fu,Tahir Ghani,M. Giles,S. Govindaraju,R. Grover,W. Han,D. Hanken,E. Haralson,M. Haran,M. Heckscher,R. Heussner,Pulkit Jain,R. James,R. Jhaveri,I. Jin,Hei Kam,Eric Karl,C. Kenyon,Mark Y. Liu,Y. Luo,R. Mehandru,S. Morarka,L. Neiberg,Paul A. Packan,A. Paliwal,C. Parker,P. Patel,R. Patel,C. Pelto,L. Pipes,P. Plekhanov,M. Prince,S. Rajamani,J. Sandford,Sell Bernhard,Swaminathan Sivakumar,Pete Smith,B. Song,K. Tone,T. Troeger,J. Wiedemer,M. Yang,Kevin Zhang +51 more
TL;DR: In this paper, a 14nm logic technology using 2nd-generation FinFET transistors with a novel subfin doping technique, self-aligned double patterning (SADP) for critical patterning layers, and air-gapped interconnects at performance-critical layers is described.
Proceedings ArticleDOI
A 65nm logic technology featuring 35nm gate lengths, enhanced channel strain, 8 Cu interconnect layers, low-k ILD and 0.57 /spl mu/m/sup 2/ SRAM cell
P. Bai,C. Auth,Sridhar Balakrishnan,M. Bost,Ruth A. Brain,V. Chikarmane,R. Heussner,Makarem A. Hussein,Jack Hwang,D. Ingerly,R. James,J. Jeong,C. Kenyon,E. Lee,Seung Hwan Lee,Nick Lindert,Mark Y. Liu,Z. Ma,T. Marieb,Anand Portland Murthy,Ramune Nagisetty,Sanjay Natarajan,J. Neirynck,Andrew Ott,C. Parker,J. Sebastian,R. Shaheed,Swaminathan Sivakumar,Joseph M. Steigerwald,S. Tyagi,Cory E. Weber,Bruce Woolery,Yeoh Andrew W,Kevin Zhang,M. Bohr +34 more
TL;DR: A 65nm generation logic technology with 1.2nm physical gate oxide, 35nm gate length, enhanced channel strain, NiSi, 8 layers of Cu interconnect, and low-k ILD for dense high performance logic is presented in this article.
Proceedings ArticleDOI
A 32nm logic technology featuring 2 nd -generation high-k + metal-gate transistors, enhanced channel strain and 0.171μm 2 SRAM cell size in a 291Mb array
Sanjay Natarajan,Mark Armstrong,M. Bost,Ruth A. Brain,Mark R. Brazier,C.-H. Chang,V. Chikarmane,Michael A. Childs,H. Deshpande,K. Dev,G. Ding,Tahir Ghani,Oleg Golonzka,W. Han,Jun He,R. Heussner,Robert James,I. Jin,C. Kenyon,S. Klopcic,Seung Hwan Lee,Mark Y. Liu,S. Lodha,B. McFadden,Anand Portland Murthy,L. Neiberg,J. Neirynck,Paul A. Packan,S. Pae,C. Parker,C. Pelto,L. Pipes,J. Sebastian,J. Seiple,Sell Bernhard,Swaminathan Sivakumar,B. Song,K. Tone,T. Troeger,Cory E. Weber,M. Yang,Yeoh Andrew W,Kevin Zhang +42 more
TL;DR: In this paper, a 32 nm generation logic technology is described incorporating 2nd-generation high-k + metal-gate technology, 193 nm immersion lithography for critical patterning layers, and enhanced channel strain techniques.
Patent
Stressed barrier plug slot contact structure for transistor performance enhancement
TL;DR: In this paper, a method for forming a slot contact structure for transistor performance enhancement is presented, in which a contact opening is formed to expose a contact region, and the slot contact is disposed within the contact opening in order to induce a stress on an adjacent channel region.