Nanotechnology is the science of understanding matter and the control of matter at dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and technology, nanotechnology involves imaging, measuring, modeling, and manipulation of matter at this level of precision. An important aspect of research in nanotechnology involves precision control and manipulation of devices and materials at a nanoscale, i.e., nanopositioning. Nanopositioners are precision mechatronic systems designed to move objects over a small range with a resolution down to a fraction of an atomic diameter. The desired attributes of a nanopositioner are extremely high resolution, accuracy, stability, and fast response. The key to successful nanopositioning is accurate position sensing and feedback control of the motion. This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.

/pdf/a-survey-of-control-issues-in-nanopositioning-1zgjre9s1l.pdf

A Survey of Control Issues in Nanopositioning

Digital Control Of Dynamic Systems This well-respected, market-leading text discusses the use of digital computers in the real-time control of dynamic systems. The emphasis is on the design of digital controls that achieve good dynamic response and small errors while using signals that are sampled in time and quantized in amplitude. Digital Control of Dynamic Systems (3rd Edition): Franklin ... This well-respected, market-leading text discusses the use of digital computers in the real-time control of dynamic systems. The emphasis is on the design of digital controls that achieve good dynamic response and small errors while using signals that are sampled in time and quantized in amplitude. Digital Control of Dynamic Systems: Gene F. Franklin ... Digital Control of Dynamic Systems, 2nd Edition. Gene F. Franklin, Stanford University. J. David Powell, Stanford University Digital Control of Dynamic Systems, 2nd Edition Pearson This well-respected work discusses the use of digital computers in the real-time control of dynamic systems. The emphasis is on the design of digital controls that achieve good dynamic response and small errors while using signals that are sampled in time and quantized in amplitude. MATLAB statements and problems are thoroughly and carefully integrated throughout the book to offer readers a complete design picture. Digital Control of Dynamic Systems, 3rd Edition ... Digital control of dynamic systems | Gene F. Franklin, J. David Powell, Michael L. Workman | download | B–OK. Download books for free. Find books Digital control of dynamic systems | Gene F. Franklin, J ... Abstract This well-respected work discusses the use of digital computers in the real-time control of dynamic systems. The emphasis is on the design of digital controls that achieve good dynamic... (PDF) Digital Control of Dynamic Systems Digital Control of Dynamic Systems, Addison.pdf There is document Digital Control of Dynamic Systems, Addison.pdfavailable here for reading and downloading. Use the download button below or simple online reader. The file extension PDFand ranks to the Documentscategory. Digital Control of Dynamic Systems, Addison.pdf Download ... Automatic control is the science that develops techniques to steer, guide, control dynamic systems. These systems are built by humans and must perform a specific task. Examples of such dynamic systems are found in biology, physics, robotics, finance, etc. Digital Control means that the control laws are implemented in a digital device, such as a microcontroller or a microprocessor. Introduction to Digital Control of Dynamic Systems And ... The discussions are clear, nomenclature is not hard to follow and there are plenty of worked examples. The book covers discretization effects and design by emulation (i.e. design of continuous-time control system followed by discretization before implementation) which are not to be found on every book on digital control. Amazon.com: Customer reviews: Digital Control of Dynamic ... Find helpful customer reviews and review ratings for Digital Control of Dynamic Systems (3rd Edition) at Amazon.com. Read honest and unbiased product reviews from our users. Amazon.com: Customer reviews: Digital Control of Dynamic ... 1.1.2 Digital control Digital control systems employ a computer as a fundamental component in the controller. The computer typically receives a measurement of the controlled variable, also often receives the reference input, and produces its output using an algorithm. Introduction to Applied Digital Control From the Back Cover This well-respected, marketleading text discusses the use of digital computers in the real-time control of dynamic systems. The emphasis is on the design of digital controls that achieve good dynamic response and small errors while using signals that are sampled in time and quantized in amplitude. Digital Control of Dynamic Systems (3rd Edition) Test Bank `Among the advantages of digital logic for control are the increased flexibility `of the control programs and the decision-making or logic capability of digital `systems, which can be combined with the dynamic control function to meet `other system requirements. `The digital controls studied in this book are for closed-loop (feedback) Every day, eBookDaily adds three new free Kindle books to several different genres, such as Nonfiction, Business & Investing, Mystery & Thriller, Romance, Teens & Young Adult, Children's Books, and others.

http://ieeexplore.ieee.org/iel6/29/26151/01163502.pdf

Digital control of dynamic systems

The Cloud infrastructure and its extensive set of Internet-accessible resources has potential to provide significant benefits to robots and automation systems. We consider robots and automation systems that rely on data or code from a network to support their operation, i.e., where not all sensing, computation, and memory is integrated into a standalone system. This survey is organized around four potential benefits of the Cloud: 1) Big Data: access to libraries of images, maps, trajectories, and descriptive data; 2) Cloud Computing: access to parallel grid computing on demand for statistical analysis, learning, and motion planning; 3) Collective Robot Learning: robots sharing trajectories, control policies, and outcomes; and 4) Human Computation: use of crowdsourcing to tap human skills for analyzing images and video, classification, learning, and error recovery. The Cloud can also improve robots and automation systems by providing access to: a) datasets, publications, models, benchmarks, and simulation tools; b) open competitions for designs and systems; and c) open-source software. This survey includes over 150 references on results and open challenges. A website with new developments and updates is available at: http://goldberg.berkeley.edu/cloud-robotics/

/pdf/a-survey-of-research-on-cloud-robotics-and-automation-1tjsiehd9n.pdf

A Survey of Research on Cloud Robotics and Automation

We demonstrate five-degree-of-freedom (5-DOF) wireless magnetic control of a fully untethered microrobot (3-DOF position and 2-DOF pointing orientation). The microrobot can move through a large workspace and is completely unrestrained in the rotation DOF. We accomplish this level of wireless control with an electromagnetic system that we call OctoMag. OctoMag's unique abilities are due to its utilization of complex nonuniform magnetic fields, which capitalizes on a linear representation of the coupled field contributions of multiple soft-magnetic-core electromagnets acting in concert. OctoMag was primarily designed to control intraocular microrobots for delicate retinal procedures, but it also has potential uses in other medical applications or micromanipulation under an optical microscope.

/pdf/octomag-an-electromagnetic-system-for-5-dof-wireless-iwelpmckld.pdf

OctoMag: An Electromagnetic System for 5-DOF Wireless Micromanipulation

We demonstrate five-degree-of-freedom (5-DOF) wireless magnetic control of a fully untethered microrobot with a magnetic steering system we call OctoMag. Although only occupying a single hemisphere, this system is capable of isotropically applying forces on the order of 1–40 µN with unrestricted control of the 2 orienting DOF. These capabilities are enabled through the use of soft-magnetic-cores which provide an increase of approximately 20× that of air cores in magnetic-field strength, but comes at the cost of more complicated interactions between coils. We propose a modeling mechanism that assumes the field contributions of the individual currents superimpose linearly when using cores with large linear regions and negligible hysteresis. When designing the system, the locations and quantity of electromagnets were optimized with regards to the force generation in the worst-case direction predicted by the model. The resultant system is capable of both open and closed-loop operation over a workspace of 4 cm3. OctoMag was primarily designed for the control of intraocular microrobots for delicate retinal procedures, but also has potential uses in other medical applications or micromanipulation under an optical microscope.

/pdf/octomag-an-electromagnetic-system-for-5-dof-wireless-3nyhufftcq.pdf

OctoMag: An electromagnetic system for 5-DOF wireless micromanipulation

In this paper, we present a high-precision magnetic levitation (maglev) stage for photolithography in semiconductor manufacturing. This stage is the world’s first maglev stage that provides fine six-degree-of-freedom motion controls and realizes large (50 mm × 50 mm) planar motions with only a single magnetically levitated moving part. The key element of this stage is a linear motor capable of providing forces in both suspension and translation without contact. The advantage of such a stage is that the mechanical design is far simpler than competing conventional approaches and, thus, promises faster dynamic response and higher mechanical reliability. The stage operates with a positioning noise as low as 5 nm rms in x and y , and acceleration capabilities in excess of 1 g (10 m/s 2 ). We demonstrate the utility of this stage for next-generation photolithography or in other high-precision motion control applications.

https://wonjongkim.tamu.edu/pdf/papers/pe98.pdf

High-precision magnetic levitation stage for photolithography

This paper presents a design and analysis framework for the general class of permanent magnet electric machines. In the authors' analysis, surface-mounted linear motors consisting of permanent magnets and ironless current-carrying coils are treated in a uniform way via the magnetic vector potential. This analysis is developed to design novel linear magnetic levitators for driving precision motion control stages such as those used in wafer steppers. For one such motor structure, they give analytical formulae for its magnetic field, force, flux linkage, inductance of the winding, and back electromotive force. They provide experimental results with a six degree-of-freedom magnetic levitator. These results are in good agreement with analytical estimations. The levitator uses a permanent-magnet Halbach array in order to improve its power efficiency. By analogy, there also exists an electromagnetic dual of the Halbach array. One such dual utilizes a triangular winding pattern in order to achieve a primarily single-sided magnetic field.

Design and analysis framework for linear permanent magnet machines

The authors designed and implemented a magnetically levitated stage with large planar motion capability. This planar magnetic levitator employs four novel permanent-magnet linear motors. Each motor generates vertical force for suspension against gravity, as well as a horizontal force for drive. These linear levitation motors can be used as building blocks in the general class of multi-degree-of-freedom motion stages. In this paper, they discuss the electromechanical modeling and real-time vector control of such a permanent-magnet levitator. They describe the dynamics in a dq frame introduced to decouple the forces acting on the magnetically levitated moving part, namely, the platen. A transformation similar to the Blondel-Park transformation is derived for commutation of the stator phase currents. They provide test results on step responses of the magnetically levitated stage. They show 5 nm RMS positioning noise in x and y, which demonstrates the applicability of such stages in the next-generation photolithography in semiconductor manufacturing.

/pdf/modeling-and-vector-control-of-a-planar-magnetic-levitator-160dbsw6sm.pdf

Modeling and vector control of a planar magnetic levitator

In this paper, we present the design, control, and testing of a 6 degrees-of-freedom magnetically-levitated system with nanometer-precision positioning capability and several-hundred-micrometer travel range. This system levitates a triangular single-moving-part platen, and produces the six-axis motion with six single-axis linear actuators. One of the prominent advantages of this magnetic levitation (maglev) system is that there is no physical contact between the moving part and the stator, which eliminates friction, wear, backlash, and hysteresis. As compared to other traditional devices, the present system is very compact with the minimum number of actuators for six-axis motion generation. The maglev device presented herein shows the position resolution better than 5 nm with 2-nm rms position noise, and is capable of a velocity of 0.5 m/s and an acceleration of 30 m/s/sup 2/. The nominal power consumption is only 15 mW by each horizontal actuator, and 320 mW by each vertical actuator. The actuators are sized to be able to orient and position a maximum payload of 1 kg. The key application of this maglev device is the manipulation at nanoscale for microassemblies and manufacture of their parts. Other potential applications are stereolithography, vibration-free delicate instrumentation, and microscale rapid prototyping.

Won-jong Kim

Papers

High-precision magnetic levitation stage for photolithography

Design and analysis framework for linear permanent magnet machines

Modeling and vector control of a planar magnetic levitator

Six-axis nanopositioning device with precision magnetic levitation technology

High-precision planar magnetic levitation