Yanxiang Liu

TL;DR: The proposed strategy of integrating MHP with NPA represents a versatile approach for in-situ wafer-level fabrication of high-performance micro/nano gas sensors for real industrial applications.

TL;DR: In this article, a CMOS MEMS-based thermoelectric energy generator (TEG) with an efficient heat dissipation path is presented. But the performance of the TEG is limited by the high thermal contact resistance in the system.

TL;DR: The unique anisotropic wet-etching mechanism of a (111) silicon wafer facilitates the highly controllable top-down fabrication of silicon nanowires (SiNWs) with conventional microfabrication technology.

Abstract: A front-cut infrared thermopile array with good CMOS compatibility is demonstrated in this paper. Properly arranged narrow windows in IR absorbing area of the thermopile are designed along the [1 0 0] direction on the (1 0 0) Si wafer. Our experiment shows that this infrared thermopile array has good responsivity of 43 v/w, detectivity of 2.8 × 10 7 cm Hz 1/2 /W, and response time of 9 ms as well as good yield better than 90%. A single element reached 99% yield in a wafer. The responsivity non-uniformity of elements in a 8 × 2 thermopile array does not exceed 3% and it costs only 90 etching min for the element size of 490 μm × 490 μm. Based on this thermopile array, an IR imager is developed.

TL;DR: The real-time, ultrasensitive, reproducible detection of volatile odorant molecules emitted by human based on free-standing silicon nanowire (SiNW) array functionalized with Anopheles gambiae odorant binding protein (AgOBP) provides a powerful and effective platform for future development of multiplexed human body odor sensor arrays.