There is an indispensable need for fluid flow rate and direction sensors in various medical, industrial and environmental applications. Besides the critical demands on sensing range of flow parameters (such as rate, velocity, direction and temperature), the properties of different target gases or liquids to be sensed pose challenges to the development of reliable, inexpensive and low powered sensors. This paper presents an overview of the work done on design and development of Microelectromechanical system (MEMS)-based flow sensors in recent years. In spite of using some similar principles, diverse production methods, analysis strategies, and different sensing materials, MEMS flow sensors can be broadly categorized into three main types, namely thermal sensors, piezoresistive sensors and piezoelectric sensors. Additionally, some key challenges and future prospects for the use of the MEMS flow sensors are discussed briefly.

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Design and applications of MEMS flow sensors: A review

Whole-field velocity measurement techniques based on ultrasound imaging (a.k.a. ‘ultrasound imaging velocimetry’ or ‘echo-PIV’) have received significant attention from the fluid mechanics community in the last decade, in particular because of their ability to obtain velocity fields in flows that elude characterisation by conventional optical methods. In this review, an overview is given of the history, typical components and challenges of these techniques. The basic principles of ultrasound image formation are summarised, as well as various techniques to estimate flow velocities; the emphasis is on correlation-based techniques. Examples are given for a wide range of applications, including in vivo cardiovascular flow measurements, the characterisation of sediment transport and the characterisation of complex non-Newtonian fluids. To conclude, future opportunities are identified. These encompass not just optimisation of the accuracy and dynamic range, but also extension to other application areas.

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Ultrasound imaging velocimetry : A review

Flow, its measurement and control in science and industry: Rodger B. Dowdell and H. W. Stoll (editors) Part I.450 plus xiv pp. Instrument society of America, Pittsburgh, 1974,£19.60

Yi Liu

Papers

Ultrasonic flowmeters: half-century progress report, 1955-2005.