Y
Yong S. Park
Researcher at Sungkyunkwan University
Publications - 4
Citations - 60
Yong S. Park is an academic researcher from Sungkyunkwan University. The author has contributed to research in topics: Sputter deposition & Raman spectroscopy. The author has an hindex of 4, co-authored 4 publications receiving 58 citations.
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Structures and mechanical properties of diamond like carbon films prepared by closed-field unbalanced magnetron sputtering
TL;DR: In this paper, a diamond-like carbon (DLC) was synthesized by closed-field unbalanced magnetron sputtering (CFUBM) using carbon targets in Ar and Ar/C2H2 atmosphere.
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Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering
TL;DR: Amorphous hydrogen-free carbon (a-C) films were synthesized by closed-field unbalanced magnetron sputtering (CFUBM), and the deposition rate, structure, and mechanical properties of these films were studied as a function of applied bias voltage on substrate during deposition.
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Effect of the target power density on the synthesis and physical properties of sputtered nc-C films
Hyun S. Myung,Yong S. Park,Byungyou Hong,Jeon G. Han,Young H. Kim,Jeong Y. Lee,L. R. Shaginyan +6 more
TL;DR: In this paper, a closed field unbalanced magnetron sputtering system (CFUBM) was used to synthesize hydrogen-free nanostructured carbon (nc-C) films at various graphite target power densities.
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Synthesis and mechanical properties of hydrogenated carbon and carbon nitride films prepared by magnetron sputtering
TL;DR: In this paper, a closed field unbalanced magnetron sputtering (CFUBM) was used to synthesize hydrogenated carbon and carbon nitride films and the properties of these films were studied as a function of applied bias voltage and nitrogen partial pressure on substrate during deposition.