scispace - formally typeset
Y

Yong S. Park

Researcher at Sungkyunkwan University

Publications -  4
Citations -  60

Yong S. Park is an academic researcher from Sungkyunkwan University. The author has contributed to research in topics: Sputter deposition & Raman spectroscopy. The author has an hindex of 4, co-authored 4 publications receiving 58 citations.

Papers
More filters
Journal ArticleDOI

Structures and mechanical properties of diamond like carbon films prepared by closed-field unbalanced magnetron sputtering

TL;DR: In this paper, a diamond-like carbon (DLC) was synthesized by closed-field unbalanced magnetron sputtering (CFUBM) using carbon targets in Ar and Ar/C2H2 atmosphere.
Journal ArticleDOI

Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering

TL;DR: Amorphous hydrogen-free carbon (a-C) films were synthesized by closed-field unbalanced magnetron sputtering (CFUBM), and the deposition rate, structure, and mechanical properties of these films were studied as a function of applied bias voltage on substrate during deposition.
Journal ArticleDOI

Effect of the target power density on the synthesis and physical properties of sputtered nc-C films

TL;DR: In this paper, a closed field unbalanced magnetron sputtering system (CFUBM) was used to synthesize hydrogen-free nanostructured carbon (nc-C) films at various graphite target power densities.
Journal ArticleDOI

Synthesis and mechanical properties of hydrogenated carbon and carbon nitride films prepared by magnetron sputtering

TL;DR: In this paper, a closed field unbalanced magnetron sputtering (CFUBM) was used to synthesize hydrogenated carbon and carbon nitride films and the properties of these films were studied as a function of applied bias voltage and nitrogen partial pressure on substrate during deposition.