Yoshinori Nishiki

Bio: Yoshinori Nishiki is an academic researcher from Yokohama National University. The author has contributed to research in topics: Anode & Cathode. The author has an hindex of 23, co-authored 194 publications receiving 1984 citations. Previous affiliations of Yoshinori Nishiki include Tokyo Institute of Technology & Shinshu University.

Water electrolysis using diamond thin-film electrodes

Abstract: Thin, boron-doped diamond films formed on a silicon substrate were evaluated during water electrolysis in acidic solution in order to determine their potential for industrial use. Though the electrode exhibited overvoltages in excess of 2 V in the industrial current range, ozone gas was produced at a current efficiency of a few percent at ambient temperature. It was confirmed that the consumption rate of the highly doped sample was small and comparable with a platinum-plated anode, indicating that the diamond is dimensionally stable under extreme conditions. The failure mechanism in the test is discussed on the basis of scanning electron microscopy, X-ray diffraction, and Raman analyses. The spalling of the film from the substrate, which was observed in the deteriorated sample after the electrolysis, is attributed to the residual stress that accumulated during the production process carried out under high temperature.

Electrode for electrolysis and electrolytic cell using the electrode

Abstract: An electrode for electrolysis comprising an electrode base material and an electrode substance having an electrically conductive diamond structure covering the surface of the electrode base material. The electrode substance having an electrically conductive diamond structure may be a diamond containing an impurity selected from boron, phosphorus and graphite. Alternatively, the electrode substance having an electrically conductive diamond structure may comprise a composite of a diamond and an electrically conductive material. In a preferred embodiment, the electrode further comprises an interlayer comprising at least one of the carbide of a valve metal and silicon carbide disposed between the electrode base material and the electrode substance having an electrically conductive diamond structure. Also disclosed is an electrolytic cell having two chambers including an anode chamber and a cathode chamber partitioned by an ion-exchange membrane. At least one of the anode placed in the anode chamber and a cathode placed in the cathode chamber is an electrode comprising an electrode base material and an electrode substance having an electrically conductive diamond structure covering the surface of the electrode base material. An electrolytic cell having three chambers is also disclosed, including an anode chamber, an intermediate chamber and a cathode chamber partitioned by ion-exchange membranes. At least one of an anode placed in the anode chamber and a cathode placed in the cathode chamber is an electrode comprising an electrode base material and an electrode substance having an electrically conductive diamond structure covering the surface of the electrode base material.

Method of sterilization and electrolytic water ejecting apparatus

Abstract: The present invention provides a method of sterilization with an electrolytic water, including: electrolyzing a raw water with an electrolytic unit including: a cathode; and an anode at least having a part containing a conductive diamond to prepare an electrolytic water; and ejecting the electrolytic water to a substance to be sterilized, and an electrolytic water ejecting apparatus.

Electrochemical treating method and apparatus

Abstract: An electrochemical treating apparatus comprising an electrolytic cell comprising an anode and a cathode spaced apart from the anode, the anode including an electrode material made of diamond and the cathode including an electrode material made of diamond. Also disclosed is an electrochemical treating method for electrochemically decomposing a substance contained in a gas or solution, which comprises introducing a gas or solution containing a substance to be treated into the electrolytic cell, passing an electric current through the electrolytic cell, and recovering a treated gas or solution. In a preferred embodiment, the electrolytic cell comprises an anode including an electrode material made of diamond, a cathode including an electrode material made of diamond and an ion exchange resin or an ion exchange membrane as an electrolyte disposed between the anode and the cathode.

An acidic ozone solution having a high ozone content, a method for preparing the solution, and a cleaning method using the solution

Abstract: The present invention relates to an acidic ozone solution having a high concentration of ozone, a method for preparing the solution by injecting ozone into an acid, and a method for cleaning single crystal silicon wafers using the solution.

Substrate Processing Apparatus

Abstract: Process gas discharged from a bypass pipe to a gas exhaust system can be prevented from diffusing back to the inside of a process chamber without having to install a dedicated vacuum pump at the downstream side of the bypass pipe. The substrate processing apparatus includes a process chamber accommodating a substrate, a gas supply system supplying process gas from a process gas source to the process chamber for processing the substrate, a gas exhaust system configured to exhaust the process chamber, two or more vacuum pumps installed in series at the gas exhaust system, and a bypass pipe connected between the gas supply system and the gas exhaust system. The most upstream one of the vacuum pumps is a mechanical booster pump, and the bypass pipe is connected between the mechanical booster pump and the rest vacuum pumps located at a downstream side of the mechanical booster pump.