Z
Zhili Hao
Researcher at Old Dominion University
Publications - 66
Citations - 1603
Zhili Hao is an academic researcher from Old Dominion University. The author has contributed to research in topics: Resonator & Gyroscope. The author has an hindex of 20, co-authored 59 publications receiving 1484 citations. Previous affiliations of Zhili Hao include Georgia Institute of Technology.
Papers
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Journal ArticleDOI
An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations
Zhili Hao,A. Erbil,Farrokh Ayazi +2 more
TL;DR: In this article, the authors presented an analytical model for support loss in clamped-free (C-F) and clampedclamped (C -C) micromachined beam resonators with in-plane flexural vibrations.
Journal ArticleDOI
A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability
TL;DR: In this paper, an in-plane mode-matched tuning-fork gyroscope (M2-TFG) was proposed to detect angular rate about the normal axis using two high-quality-factor resonant flexural modes of a single crystalline silicon mi- crostructure.
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VHF single crystal silicon capacitive elliptic bulk-mode disk resonators-part II: implementation and characterization
TL;DR: In this article, the authors report on the implementation and characterization of high quality factor (Q) side-supported single crystal silicon (SCS) disk resonators with self-aligned, ultra-narrow capacitive gaps in the order of 100 nm.
Journal ArticleDOI
VHF single-crystal silicon elliptic bulk-mode capacitive disk resonators-part I: design and modeling
TL;DR: In this paper, the design and modeling of VHF single-crystal silicon (SCS) capacitive disk resonators operating in their elliptical bulk resonant mode is presented.
Journal ArticleDOI
Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators
Zhili Hao,Farrokh Ayazi +1 more
TL;DR: In this paper, a comprehensive analysis of support loss, the dominant loss mechanism, in center-supported micromechanical disk resonators operating in their radial bulk-modes is presented.