Varian Associates

About: Varian Associates is a based out in . It is known for research contribution in the topics: Beam (structure) & Amplifier. The organization has 2160 authors who have published 2591 publications receiving 46002 citations.

Magnetron sputter device having separate confining magnetic fields to separate targets and magnetically enhanced r.f. bias

Abstract: A first target for a magnetron sputter device has a planar annular emitting surface bounded by an inner radius R1 and an outer radius R2. A second target has a sloped emitting surface defined by a side wall of a frustum of a cone. The second target is limited by an inner radius R3 and outer radius R4. R3 is greater than R2. Each target element has pins in diametrically opposite holes to assist in holding the target elements in situ in bayonet slots in the sputter device. The targets are fit closely in cooling rings so that as the targets heat during operation, thermal expansion of the targets assists thermal conduction into the cooling rings. A coil is formed behind the workpiece to act as a mirror to the plasma. The field of the coil moves the plasma away from the workpiece which permits putting high power R.F. bias on the workpiece. The R.F. bias in combination with gas heating the wafer from behind aids in sputtering a coating of superior conformality.

High resolution position sensing apparatus with linear variable differential transformers having phase-shifted energizing signals

Abstract: Apparatus for high resolution sensing of the position of a rapidly moving member. The apparatus includes at least two linear variable differential transformers (LVDT's) each having a magnetic core coupled to the movable member. A signal source and a phase shifter provide energizing signals to the primary coil of each LVDT. The energizing signals have the same frequency but are phase shifted relative to each other. The induced secondary voltages of the LVDT's are sampled by synchronous detectors, the outputs of which are combined by an adder into a high resolution output signal. When two LVDT's are utilized, the energizing signals have a relative phase shift of 90° and the effective position sampling rate is doubled. The apparatus can be used to sense the operating frequency of a tunable magnetron.

System and method for administering radiation

Abstract: A system and method for metering the quantity of radiation administered a subject by a source of radiation movable along a path relative to the subject. The system cumulatively counts the amount of radiation directed toward the subject during each of a succession of increments of motion of the source. When a predetermined amount of radiation is delivered during an increment, the source is disabled until the source passes into the next increment of displacement. The count of radiation is restarted at the instant the source is disabled, to accumulate accurately any added spurious radiation dosage which may occur and to include that dosage in the count of the permitted amount for the next succeeding increment of motion. Several interlocks for disabling the system in response to various malfunctions are included. Means for controlling the speed of movement of the source and/or the dose rate of the source are also included.

Broadband microwave bias network

Abstract: For supplying a bias (modulation) signal, either AC or DC, to a microwave circuit, a network consisting of a low pass filter is provided which presents a high isolating impedance to an extremely wide bandwidth of microwave frequencies, while allowing low frequency bias or modulating signals to be supplied to the microwave circuit without significant attenuation. The network consists of two helical inductors, one within the other, plus a bypass capacitor. The inner small inductor presents a high, non-resonant impedance to high microwave frequencies and the outer, larger inductor presents a high impedance to lower microwave frequencies. The bypass capacitor cooperates with the outer inductor to complete the filter circuit for the lower microwave frequencies. The smaller inductor's proximity to and within the larger inductor provides a distributed shunt capacitance to ground so as to terminate the filter for the higher microwave frequencies at the smaller inductor.