Varian Associates

About: Varian Associates is a based out in . It is known for research contribution in the topics: Beam (structure) & Wafer. The organization has 2160 authors who have published 2591 publications receiving 46002 citations.

Blocking shield and method for contouring the thickness of sputter coated layers

Abstract: A method of sputter depositing a desired film thickness profile on a substrate is accomplished by depositing material onto a substrate at spaced apart coating stations whereby a substrate at any of said stations is not coated by the sputter coating action at any of the other sputter stations. The substrate is held stationary during complete sputtering at each station. A blocking shield is placed in fixed position between the substrate and the sputter coating source at one or more of the stations. The duration of sputter coating time at one station may be different than at another station.

Charged particle beam system having beam-defining slit formed by rotating cyclinders

Abstract: A slit assembly for use in a charged particle beam system wherein a charged particle beam is directed along a beam path. The slit assembly may be a mass resolving slit assembly for an ion implanter. The slit assembly includes first and second cylinders spaced apart from each other. Opposing surfaces of the first and second cylinders adjacent to the beam path define a slit for passing the charged particle beam. The first and second cylinders have first and second central axes, respectively. The slit assembly further includes a drive system for rotating the first cylinder about the first central axis and for rotating the second cylinder about the second central axis. The slit assembly provides low contamination and a long operating life. The slit assembly may include a system for adjusting the width of the slit. The slit assembly may further include a cooling system for controlling the temperatures of the first and second cylinders.

A 130-260 GHz, 1 MW free electron maser for fusion

Abstract: We report on design work and testing of several main components of the FOM-Fusion-FEM project. Measurements on the electron gun are presented, showing a uniform beam current profile and a low halo current. A time-dependent simulation study of the interaction between the electron beam and the mm-waves shows that, for proper undulator tapering, longitudinal mode competition results in a quasi single-mode regime. Further, some high power and detailed low power measurements on mock-ups of the waveguide system are presented, showing that the reflection and outcoupling systems perform well.