Institution
Varian Associates
About: Varian Associates is a based out in . It is known for research contribution in the topics: Beam (structure) & Amplifier. The organization has 2160 authors who have published 2591 publications receiving 46002 citations.
Topics: Beam (structure), Amplifier, Wafer, Cathode, Resonance
Papers published on a yearly basis
Papers
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10 Jun 1977TL;DR: A planar diode sputtering source employs an anode and a generally concave cathode as discussed by the authors, with an outer portion providing a lip for protecting a surrounding cooling jacket from sputtering, a middle portion configured to optimize the average match between the surface thereof with a surrounding magnetic field for long useful life, and an inner portion.
Abstract: A planar diode sputtering source employs an anode and a generally concave cathode. The interior surfaces of the cathode include an outer portion providing a lip for protecting a surrounding cooling jacket from sputtering, a middle portion configured to optimize the average match between the surface thereof with a surrounding magnetic field for long useful life, and an inner portion. The middle and outer portion are faired together to minimize localized target erosion leading to premature target depletion or failure. The inner portion joins the middle portion with surface tangents meeting at an angle which minimizes local erosion at this juncture.
49 citations
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21 May 1996TL;DR: A peristaltic pump as mentioned in this paper is a rotatable drum having rollers 5 or cams 5' for squashing a flexible tube against a profiled surface 10 of a presser plate 7.
Abstract: A peristaltic pump comprises a rotatable drum 2 having rollers 5 or cams 5' for squashing a flexible tube 9 against a profiled surface 10 of a presser plate 7. Tube 9 is mounted between supports 14 and 15 on presser plate 7 and is automatically movable between an inoperative and operative (pumping) position by pivotal movement of plate 7 about axis 8 produced by an electro mechanical actuator. A flexible membrane 33 is sandwiched between rollers 5 or cams 5' for eliminating shear forces on the tube 9. The construction of the pump and shape of profile 10 are such as to mimimise pulsations in the output flow. Systems for supplying a sample for analysis to spectroscopic apparatus using the peristaltic pump are also described.
49 citations
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19 May 1995TL;DR: In this article, a quadrupole ion trap is used to form a parallel ion beam, and the ions are simultaneously sucked and pulsed out of an interaction region of the trap through an opening in a front end cap electrode by applying different polarity voltage pulses at the same time to the front and back end cap electrodes.
Abstract: A time-of-flight mass spectrometer includes an ion beam source having a quadrupole ion trap. To form a parallel ion beam, the ions are simultaneously sucked and pulsed out of an interaction region of the trap through an opening in a front end cap electrode of the trap by applying different polarity voltage pulses at the same time to the front end cap electrode and a back end cap electrode of the trap.
49 citations
01 Aug 1965
TL;DR: In this paper, the instability of passive atomic frequency standards caused by shot noise introduced by the atomic reference is calculated and the instability can be characterized by a figure of merit for the reference, and the asymptotic functions for the rms frequency fluctuation for long and short averaging times expressed in terms of this quantity.
Abstract: The instability of passive atomic frequency standards caused by shot noise introduced by the atomic reference is calculated. This instability can be characterized by a figure of merit for the atomic reference, and the asymptotic functions for the rms frequency fluctuation for long and short averaging times expressed in terms of this quantity. Measurements of the rms frequency fluctuation of cesium atomic beam and rubidium vapor frequency standards are compared with theory, and the predicted performances of various existing and proposed atomic standards are tabulated. It is feasible to build atomic beam frequency standards whose stability for averaging times less than one second is limited by noise in the crystal oscillator rather than by shot noise, a criterion generally met by rubidium vapor frequency standards. For long averaging times, shot noise will always be the fundamental limiting factor in atomic frequency standard stability.
49 citations
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09 Jun 1989TL;DR: In this article, a mechanical scanning system for a batch ion implanter includes a disk (40) for mounting wafers at sites near its periphery and a disk drive assembly (50) for rotating the disk.
Abstract: A mechanical scanning system for a batch ion implanter includes a disk (40) for mounting wafers (39) at sites (42) near its periphery and a disk drive assembly (50) for rotating the disk (40). The disk (40) and the disk drive assembly (50) are supported in an end station vacuum chamber (30) by a scan arm (44) which extends through a sealed opening (64) in an access door (60). A scan drive assembly (52) attached to the access door (60) scans the scan arm (44) and the disk (40) in an arc-shaped path. Simultaneous rotation and scanning of the disk cause the ion beam (20) to be distributed over the surfaces of the wafers (39) mounted on the disk (40). A pivot drive assembly (54) rotates the scan arm (44) and the disk (40) about a pivot axis (C) between an implant position and a load/unload position. A bellows (102) seals the scan arm (44) to the vacuum chamber (30) while transmitting arc-shaped movement into the vacuum chamber (30). A bellows guide apparatus guides an intermediate portion of the bellows so as to limit lateral distortion caused by pressure differences applied to the bellows in the combination with asymmetrical deflection thereof.
48 citations
Authors
Showing all 2160 results
Name | H-index | Papers | Citations |
---|---|---|---|
Richard R. Ernst | 96 | 352 | 53100 |
Fred E. Regnier | 88 | 412 | 25169 |
Norbert Schuff | 88 | 280 | 25442 |
James S. Hyde | 79 | 412 | 35755 |
Carl Djerassi | 77 | 1523 | 37630 |
Ray Freeman | 73 | 269 | 22872 |
Robert Kaptein | 72 | 436 | 24275 |
Minghwei Hong | 58 | 515 | 14309 |
Jesse L. Beauchamp | 55 | 275 | 10971 |
Herbert Kroemer | 52 | 237 | 9936 |
Hans J. Jakobsen | 49 | 274 | 8401 |
James N. Eckstein | 42 | 168 | 6634 |
Ivan Bozovic | 31 | 128 | 5060 |
John Glushka | 31 | 76 | 3004 |
Gary Virshup | 24 | 113 | 2374 |