Varian Associates

About: Varian Associates is a based out in . It is known for research contribution in the topics: Beam (structure) & Wafer. The organization has 2160 authors who have published 2591 publications receiving 46002 citations.

Sputter-coating system, and vaccuum valve, transport, and sputter source array arrangements therefor

Abstract: Relatively wide workpieces, such as auto grilles, are rapidly conveyed into and from a vacuum processing chamber provided with entry and exit air locks and vacuum isolation valves, in which thin metallic coatings are deposited uniformly over workpiece surfaces. The gate member of the valve is supported for sliding vertical movement, as well as limited outward and inward movement for sealing the chamber opening, at the protruding ends of an elongated member backing the gate. Air cylinders act directly on these ends to close the gate. A linkage and air cylinder above the gate vertically propels the gate. The processing chamber is provided with several side by side arrays of sputtering sources with circular cathodes, the workpieces moving thereunder at a steady rate orthogonally to the arrays. The spacings of each source relative to the other in each array, the workpiece to source distance, and the degree of outboard placement of the outer sources relative to the workpiece edges are defined to provide both even coatings on horizontal workpiece surfaces, as well as on the vertical surfaces. A compact conveyor system with space-saving corner modules is coordinated with the valve action to maintain an even steady flow through the evacuated processing chamber for optimum coating.

Hyperthermia applicator for treatment with microwave energy and ultrasonic wave energy

Abstract: A direct contact hyperthermia applicator includes an ultrasonic lens with an array of ultrasonic transducers and an array of microwave antenna elements mounted behind the lens and positioned for transmission of ultrasonic wave energy and microwave energy therethrough. The antenna elements can be waveguide sections having radiating apertures or microstrip antenna elements. A fluid enclosure is defined between the front surface of the lens and a thin rubber sheet sealed around the periphery of the lens. During hyperthermia treatment, the rubber sheet conforms to the contours of the patient's body. The fluid, which is typically cooled distilled water, improves coupling of microwave energy and ultrasonic wave energy into the patient's body and cools the surface region.

Transfer plate rotation system

Abstract: The system for rotating the transfer plate of a coating system in a vacuum chamber consists of a transfer plate driver assembly on the outside of the chamber at the axis and a transfer plate rotator assembly inside the chamber. The driver assembly consists of a pneumatic actuator for linear motion, a barrel cam which translates the linear motion into rotary motion with high torque at starting and stopping positions, and a rotary feedthrough all in a structural housing. The rotator assembly comprises a central hub with means for supporting the end walls, a transfer plate hub assembly and a ratchet arm connected to the rotary feedthrough. As the pressure plate assembly is drawn back by the ram, it in turn draws back the transfer plate and engages the ratchet arm with the transfer plate hub. The actuator then rotates the transfer plate. The ram then reverses direction, the ratchet arm disengages and is returned to its initial position.

Liquid chromatography system with packed flow cell for improved fluorescence detection

Abstract: In a liquid chromatography system, the effluent from the chromatographic column is passed through a detector flow cell, which is packed with a stationary phase that is adsorptive of the sample species to be detected. Detection of the sample species adsorbed at the stationary phase is effected by measuring fluorescence emitted from such species in response to electromagnetic radiation incident thereon at the flow cell. The fluorescing species, which are in equilibrium between the stationary phase and the mobile phase in the flow cell when fluorescence is being measured, can be detected at lower concentration thresholds than when the fluorescing species are in equilibrium only with the mobile phase.