Varian Associates

About: Varian Associates is a based out in . It is known for research contribution in the topics: Beam (structure) & Amplifier. The organization has 2160 authors who have published 2591 publications receiving 46002 citations.

Gyrotrons for high power millimeter wave generation

Abstract: The gyrotron is a new type of micrwave tube capable of producing high power output at millimeter wavelengths. Oscillator results have been described in recent Soviet publications This paper describes work in progress at Varian Associates, Inc. to develop an amplifier of the gyroklystron type to deliver 200 kW cw at 28 GHz. Considerable progress has been made with amplifier stability to the point that amplifier gains of up to 40 dB have been measured in a pulsed experimental amplifier. Current effort is concerned with improving efficiency. A pulsed oscillator is also described which produced 248 kW peak power at 28 GHz with 34% efficiency. A cw oscillator is under construction. Areas for future R and D are discussed. These include gyro-TWT amplifiers with increased instantaneous bandwidth (5 to 10%) and operation at harmonics of the cyclotron frequency to reduce the magnetic field requirements.

Sputtering apparatus having a rotating magnet array and fixed electromagnets

Abstract: A magnetron sputter apparatus is disclosed which includes a rotatable generally heart-shaped, closed-loop magnet array behind the target and in front of a pair of separately driven stationary electromagnets The apparatus is optimized to produce a sputtered film on a planar substrate having desired film characteristics such as uniformity of thickness, good step coverage, and good via filling and efficient utilization of the target The shape of the generally heart-shaped array includes a flattened tip forming an arc of a circle centered on the axis of rotation and concave cusps in the lobes of the heart-shape The electromagnets are used to increase target utilization at its center and to compensate for the change in shape of the target and distance from the target to the substrate with depletion

High efficiency klystron amplifier

Abstract: A klystron amplifier yielding above 65 percent efficiency at the 100 kW power level at a frequency of 800 MHz will be described. The high efficiency is obtained by using a novel combination of second harmonic and fundamental frequency cavities in the buncher system.