Varian Associates

About: Varian Associates is a based out in . It is known for research contribution in the topics: Beam (structure) & Wafer. The organization has 2160 authors who have published 2591 publications receiving 46002 citations.

Method for controlling a collimated sputtering source

Abstract: A method for automatically controlling a collimated sputtering source that is controllable by a computer to compensate for the build-up of sputtered material on the collimator. The method involves providing software for the computer including a formula to calculate a multiplier as a function of the age of the collimator, sequentially depositing film on a series of substrates using the sputtering source, monitoring the age of the collimator, and using the software to periodically adjust the value of a controllable sputtering parameter as a function of the multiplier. The sputtering parameter is automatically adjusted by the software such that a property of the film deposited by the source on the series of substrates does not substantially vary among the substrates as sputtered material builds up on the collimator.

Heating and cooling apparatus for chromatography column

Abstract: A baffle divides a housing into first and second compartments. The first compartment includes a chromatography oven having a fan for circulating heated air over the columns while the oven is closed and for sucking ambient temperature cooling air in the first compartment into the oven while the oven is open. Ambient air is sucked into a tortuous path in the first compartment. Cooling air from the second compartment flows into the first compartment via openings in the baffle. The cooling air flows over the oven exterior and is at least partially sucked into the oven by an oven fan while the oven is open. The oven heater, coaxial with the blades, is located between an oven wall and blades. A ring baffle, having approximately the same diameter as and coaxial with the blades, is located between the wall and the blades. A fan outside of the oven sucks air from the oven through an outlet while the oven is open. The second fan is separated from an inlet for the oven by a baffle having an opening through which air is sucked by the second fan while the oven is closed. The second compartment includes a casing for fluid flow controllers for the columns, which casing is maintained at constant temperature by ambient air sucked around the second compartment.

Stepped-gap achromatic bending magnet

Abstract: A first order achromatic magnetic deflection system for use in conjunction with a charged particle accelerator, is realized from a stepped gap manget wherein a charged particle propagated through the system is subject to at least two adjacent homogenous magnetic fields in traversing one-half of a symmetric trajectory through the system.

Vacuum pick for semiconductor wafers

Abstract: A vacuum pick suitable for removing semiconductor wafers from and replacing wafers in a cassette holder. The vacuum pick includes a thin profile housing having a wafer support surface with a cavity therein, a resilient, flexible member covering a portion of the cavity to form an enclosure, and a rigid chuck mounted on the flexible member so as to permit movement of the chuck relative to the housing. The chuck includes a wafer-receiving surface connected through a passage to the enclosure. When a vacuum is applied to the enclosure, the wafer and the chuck are retracted against the housing and held firmly in place. The chuck tilts relative to the housing when it contacts a tilted wafer, thereby insuring reliable attachment to the wafer.