Showing papers in "Applied Surface Science in 1995"

TL;DR: In this paper, the influence of the tip geometry on the local magnification and atom positioning on a long-range-ordered phase was analyzed and the proposed procedure was validated by studying the effects of calculations.

TL;DR: In this paper, two kinds of amorphous carbon (a-C) thin film samples were synthesized, one by magnetron sputtering, the other by filtered cathodic arc deposition.

TL;DR: In this paper, a DC plasma nitriding was applied to titanium metal sheets in a commercial cell using Ar + NH3 as the admixture and the nitrided surface investigated by means of XPS.

TL;DR: In this paper, the authors used the modeling and fitting program VEPFIT for resolving defect depth profiles and depth structures of deposited layers, and proposed a new model of MOS systems for implementation into VEPFit and a study into decomposition of Doppler-broadened photo-peaks.

TL;DR: In this article, the influence of gas composition (O2 content in the gas mixture 0.1%-50%) and substrate temperature (300 or 493 K) during the film deposition has been studied.

TL;DR: In this article, an analysis of core-electron binding energy (BE) data for solid elements from four sources is presented, where a single instrument had been used to measure BEs for many elements.

TL;DR: In this article, a spatial correlation model was used to analyze the linewidth of the Raman peaks of RuO 2 thin films in annealing at high and low temperatures.

TL;DR: In this article, an excimer laser-induced forward transfer technique has been used for selective prenucleation of arbitrary substrate materials with palladium, which can act as catalyst for subsequent chemical deposition of metallic films, e.g., copper, nickel, gold etc.

TL;DR: In this paper, the basic principles of field-evaporation theory, as it applies to pure metals, are reviewed, and a simplified derivation of the author's activation energy formula is also given.

TL;DR: In this article, the morphology, composition and structure of wet chemically prepared 6HSiC(0001) samples were investigated immediately after introduction into vacuum and the step structure found is correlated to the sample periodicity normal to the surface.

TL;DR: An overview of the world-wide R&D effort underway to develop both manufacturable processes and their integration at each level of the interconnect structure for advanced semiconductor devices is given.

TL;DR: The field of ternary amorphous metallic thin films made of an early transition metal and a combination of B, C, N, Si, and P is briefly reviewed in this paper.

TL;DR: In this article, a process sequence comprising excimer laser ablation of microstructures, inverse replication by an electroplating process and second inverse replica by injection molding (Laser-LIGA) is described.

TL;DR: In this article, the theory of spincoating is applied to predict the amount of inorganic material that is deposited from a solution on a flat substrate on the basis of concentration, density, viscosity and evaporation rate of the solution and the spin speed applied during spin-coating.

TL;DR: In this paper, TGA and spectroscopic ellipsometry (SE) were employed to examine the oxidation behavior of bulk Cu (99.9% purity) in the range 250 to 500°C.

TL;DR: In this paper, an XPS investigation of loss feature and peak shape analysis of the chromium 2p region has been performed based on the use of a modified Shirley background model and requires the estimation of an individual background for each component of the photopeak under examination.

TL;DR: Pulsed laser deposition is a highly flexible technique for the fabrication of thin films, and can in principle be applied to all solid materials including metals, refractory metals and rare earths as discussed by the authors.

TL;DR: In this paper, the laser ablation of copper with a 532 nm, 6 ns laser has been investigated in the regime normally used for pulsed laser deposition, and the ablation depth per pulse and the flux and energy distribution of the ions in the plume were measured and compared to the deposition rate as measured by a quartz microbalance.

TL;DR: In this paper, the results of the numerical solution of a one-dimensional heat diffusion equation indicated a strong superheating effect of the melted target material for the case of frequency-doubled Nd:YAG laser irradiations.

TL;DR: It is shown that a dilute target monolayer is necessary to allow for an effective dimerization process and parallel multi-site detection of the DNA binding is demonstrated to be possible with surface plasmon microscopy without the need for any extra labeling of the reaction partners.

TL;DR: In this article, the influence of the substrate material on the growth of V 2 O 5 flash-evaporated films has been studied by Raman scattering spectroscopy, and the highest quality films were grown on silicon substrate maintained at 25°C and annealed at 450°C in Ar atmosphere.

TL;DR: In this article, the authors investigated the chemical modification of polymethyl-methacrylate (PMMA) surfaces after plasma and low-energy ion beam treatment and found that less than three ions are needed to decompose the ester group (OCO) completely.

TL;DR: In this paper, structural and field-emission studies of diamond-coated tips were performed and two approaches for the observed emission behavior were proposed: (1) NEA-affected emission and (2) emission from sharp nano-size points.

TL;DR: In this article, a time-of-flight secondary ion mass spectrometry (ToF SIMS) was used to analyze the catalytic activity of CoPc/XC-72 pyrolyzed at temperatures above 400-degrees-C.

TL;DR: In this article, Boron layers on clean and B-adsorbed surfaces of α-SiC have been studied using Auger and electron energy-loss spectroscopies and low-energy electron diffraction.

TL;DR: In this article, a laser ablation was applied to thin film deposition from a tin selenide target and diagnostic methods were applied to the characterization of the laser ablated plume.

TL;DR: In this article, the preparation and surface science study of a magnesium chloride/titanium chloride system, grown in the form of a thin film on an inert substrate under ultra-high vacuum conditions is reported.

TL;DR: In this article, the surface reactivity of the Pd 50 Cu 50 (111) and (110) single crystals in the adsorption and the co-adsorption of CO and NO at low temperature was studied.

TL;DR: In this paper, the effects of heating a 26 A thick ZrO2 film after a hydrogen-plasma treatment were investigated. But the results indicated that the results were not consistent with the observed inhomogeneity of the film.

TL;DR: In this article, the authors presented a method for photoannealing of thin gel films based on hydrolyzed alkoxy compounds such as TEOS or TEOTi by irradiation with UV light (λ < 200 nm).